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Makoto WADA
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Nirasaki City, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Processing apparatus and film forming method
Patent number
11,972,929
Issue date
Apr 30, 2024
Tokyo Electron Limited
Makoto Wada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of making a semiconductor device including a graphene barrie...
Patent number
11,302,576
Issue date
Apr 12, 2022
Tokyo Electron Limited
Makoto Wada
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20240120183
Publication date
Apr 11, 2024
Tokyo Electron Limited
Makoto WADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20230420294
Publication date
Dec 28, 2023
Tokyo Electron Limited
Makoto WADA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PRE-COATING METHOD AND PROCESSING APPARATUS
Publication number
20230167547
Publication date
Jun 1, 2023
Tokyo Electron Limited
Ryota IFUKU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
Publication number
20230102051
Publication date
Mar 30, 2023
TOKYO ELECTRON LIMITED
Ryota IFUKU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20230080956
Publication date
Mar 16, 2023
TOKYO ELECTRON LIMITED
Makoto WADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
Publication number
20230061151
Publication date
Mar 2, 2023
TOKYO ELECTRON LIMITED
Hideki YUASA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
Publication number
20230062105
Publication date
Mar 2, 2023
TOKYO ELECTRON LIMITED
Makoto WADA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMATION METHOD AND FILM FORMATION APPARATUS
Publication number
20230042099
Publication date
Feb 9, 2023
Tokyo Electron Limited
Makoto WADA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PROCESSING APPARATUS AND FILM FORMING METHOD
Publication number
20220316065
Publication date
Oct 6, 2022
TOKYO ELECTRON LIMITED
Makoto WADA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING METHOD AND PROCESSING APPARATUS
Publication number
20210164103
Publication date
Jun 3, 2021
TOKYO ELECTRON LIMITED
Ryota IFUKU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor Device and Method of Manufacturing the Same
Publication number
20200303251
Publication date
Sep 24, 2020
TOKYO ELECTRON LIMITED
Makoto WADA
H01 - BASIC ELECTRIC ELEMENTS