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Mamoru Okada
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Nagano-ken, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method for producing semiconductor wafer and semiconductor wafer
Patent number
7,507,146
Issue date
Mar 24, 2009
Shin-Etsu Handotai Co., Ltd.
Tadahiro Kato
B24 - GRINDING POLISHING
Information
Patent Grant
Semiconductor wafer thinning method, and thin semiconductor wafer
Patent number
6,930,023
Issue date
Aug 16, 2005
Shin-Etsu Handotai Co, Ltd.
Mamoru Okada
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing pad, polishing method, and polishing machine for mirror-p...
Patent number
6,306,021
Issue date
Oct 23, 2001
Shin-Etsu Handotai Co., Ltd.
Hisashi Masumura
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
Method for Producing Semiconductor Wafer and Semiconductor Wafer
Publication number
20080096474
Publication date
Apr 24, 2008
SHIN-ETSU HANDOTAI CO., LTD.
Tadahiro Kato
B24 - GRINDING POLISHING
Information
Patent Application
Semiconductor wafer thinning method, and thin semiconductor wafer
Publication number
20030113984
Publication date
Jun 19, 2003
Mamoru Okada
B24 - GRINDING POLISHING
Information
Patent Application
Polishing pad, polishing method, and polishing machine for mirror-p...
Publication number
20020031990
Publication date
Mar 14, 2002
Shin-Estu Handotai Co., Ltd.
Hisashi Masumura
B24 - GRINDING POLISHING