Number | Date | Country | Kind |
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10-032241 | Jan 1998 | JP | |
10-259411 | Aug 1998 | JP |
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5212910 | Breivogel et al. | May 1993 | |
5664990 | Adams et al. | Sep 1997 | |
5725417 | Robinson | Mar 1998 | |
6007407 | Rutherford et al. | Dec 1999 |
Entry |
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Watanabe, et al. “The Structure of a Polishing Pad for Polishing While the Surface is Used as a Reference,” Spring Meeting, Japan Society for Precision Engineering, 1997, p. 183-184. |