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Manabu Honma

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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD
    • Publication number 20240060170
    • Publication date Feb 22, 2024
    • TOKYO ELECTRON LIMITED
    • MANABU HONMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20240060181
    • Publication date Feb 22, 2024
    • TOKYO ELECTRON LIMITED
    • Manabu HONMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE HEATING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20230282496
    • Publication date Sep 7, 2023
    • TOKYO ELECTRON LIMITED
    • Manabu HONMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
    • Publication number 20230257877
    • Publication date Aug 17, 2023
    • TOKYO ELECTRON LIMITED
    • Ibuki HAYASHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20230062671
    • Publication date Mar 2, 2023
    • TOKYO ELECTRON LIMITED
    • Junnosuke TAGUCHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    APPARATUS FOR PERFORMING FILM FORMING PROCESS ON SUBSTRATE, AND MET...
    • Publication number 20230069624
    • Publication date Mar 2, 2023
    • TOKYO ELECTRON LIMITED
    • Manabu HONMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING APPARATUS AND FILM FORMING METHOD
    • Publication number 20230068938
    • Publication date Mar 2, 2023
    • TOKYO ELECTRON LIMITED
    • Manabu HONMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    APPARATUS FOR PERFORMING FILM FORMING PROCESS ON SUBSTRATE AND METH...
    • Publication number 20220389582
    • Publication date Dec 8, 2022
    • TOKYO ELECTRON LIMITED
    • Manabu HONMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
    • Publication number 20220389581
    • Publication date Dec 8, 2022
    • TOKYO ELECTRON LIMITED
    • Manabu HONMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20220293439
    • Publication date Sep 15, 2022
    • TOKYO ELECTRON LIMITED
    • Yuki WADA
    • F28 - HEAT EXCHANGE IN GENERAL
  • Information Patent Application

    DEPOSITION APPARATUS
    • Publication number 20210242070
    • Publication date Aug 5, 2021
    • TOKYO ELECTRON LIMITED
    • Manabu HONMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ROTATION DRIVING MECHANISM AND ROTATION DRIVING METHOD, AND SUBSTRA...
    • Publication number 20210164098
    • Publication date Jun 3, 2021
    • TOKYO ELECTRON LIMITED
    • Manabu HONMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20200354832
    • Publication date Nov 12, 2020
    • TOKYO ELECTRON LIMITED
    • Manabu HONMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING APPARATUS AND FILM FORMING METHOD
    • Publication number 20200149168
    • Publication date May 14, 2020
    • TOKYO ELECTRON LIMITED
    • Manabu HONMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM-FORMING APPARATUS AND FILM-FORMING METHOD
    • Publication number 20190136377
    • Publication date May 9, 2019
    • TOKYO ELECTRON LIMITED
    • Manabu HONMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    RELIEF VALVE AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20190136994
    • Publication date May 9, 2019
    • TOKYO ELECTRON LIMITED
    • Yuka NAKASATO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING METHOD, FILM FORMING APPARATUS, AND COMPUTER READABLE...
    • Publication number 20180363134
    • Publication date Dec 20, 2018
    • TOKYO ELECTRON LIMITED
    • Manabu HONMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Substrate Processing Apparatus
    • Publication number 20180195173
    • Publication date Jul 12, 2018
    • TOKYO ELECTRON LIMITED
    • Hitoshi KATO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20170218514
    • Publication date Aug 3, 2017
    • TOKYO ELECTRON LIMITED
    • Hitoshi KATO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
    • Publication number 20170067160
    • Publication date Mar 9, 2017
    • TOKYO ELECTRON LIMITED
    • Hitoshi KATO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20160222509
    • Publication date Aug 4, 2016
    • TOKYO ELECTRON LIMITED
    • MANABU HONMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20160215395
    • Publication date Jul 28, 2016
    • TOKYO ELECTRON LIMITED
    • MANABU HONMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND METHOD OF FABRICATING SUBSTRATE...
    • Publication number 20160083841
    • Publication date Mar 24, 2016
    • TOKYO ELECTRON LIMITED
    • MANABU HONMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS USING ROTATABLE TABLE
    • Publication number 20150240357
    • Publication date Aug 27, 2015
    • TOKYO ELECTRON LIMITED
    • Mitsuhiro TACHIBANA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM DEPOSITION APPARATUS
    • Publication number 20150211119
    • Publication date Jul 30, 2015
    • TOKYO ELECTRON LIMITED
    • Yuji ONO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    GAS PROCESSING APPARATUS
    • Publication number 20140366808
    • Publication date Dec 18, 2014
    • Manabu HONMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD
    • Publication number 20140213068
    • Publication date Jul 31, 2014
    • TOKYO ELECTRON LIMITED
    • Hitoshi KATO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM DEPOSITION METHOD AND COMPUTER READABLE STORAGE MEDIUM
    • Publication number 20130251904
    • Publication date Sep 26, 2013
    • TOKYO ELECTRON LIMITED
    • Hitoshi KATO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND STORAGE MEDIUM
    • Publication number 20130122718
    • Publication date May 16, 2013
    • TOKYO ELECTRON LIMITED
    • Hitoshi KATO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM DEPOSITION APPARATUS AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20130074770
    • Publication date Mar 28, 2013
    • TOKYO ELECTRON LIMITED
    • MANABU HONMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...