Maosheng Zhao

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for cleaning a CVD chamber
- Patent number 7,654,224
- Issue date Feb 2, 2010
- Applied Materials, Inc.
- Maosheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for cleaning a CVD chamber
- Patent number 7,500,445
- Issue date Mar 10, 2009
- Applied Materials, Inc.
- Maosheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for cleaning a CVD chamber
- Patent number 7,464,717
- Issue date Dec 16, 2008
- Applied Materials, Inc.
- Maosheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Computer-readable medium that contains software for executing a met...
- Patent number 7,465,357
- Issue date Dec 16, 2008
- Applied Materials, Inc.
- Maosheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heated gas distribution plate for a processing chamber
- Patent number 6,946,033
- Issue date Sep 20, 2005
- Applied Materials Inc.
- Lun Tsuei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for cleaning plasma enhanced chemical vapor deposition chamb...
- Patent number 6,932,092
- Issue date Aug 23, 2005
- Applied Materials, Inc.
- Juan Carlos Rocha-Alvarez
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning of CVD chambers using remote source with cxfyoz based chem...
- Patent number 6,923,189
- Issue date Aug 2, 2005
- Applied Materials, Inc.
- Annamalai Lakshmanan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for curing low dielectric constant film using direct current...
- Patent number 6,914,014
- Issue date Jul 5, 2005
- Applied Materials, Inc.
- Lihua Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma enhanced CVD low k carbon-doped silicon oxide film depositio...
- Patent number 6,797,643
- Issue date Sep 28, 2004
- Applied Materials Inc.
- Juan Carlos Rocha-Alvarez
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER
- Publication number 20170121813
- Publication date May 4, 2017
- Applied Materials, Inc.
- Maosheng ZHAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER
- Publication number 20140158048
- Publication date Jun 12, 2014
- Applied Materials, Inc.
- Maosheng ZHAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER
- Publication number 20100095891
- Publication date Apr 22, 2010
- Maosheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER
- Publication number 20090145360
- Publication date Jun 11, 2009
- Maosheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER
- Publication number 20060231205
- Publication date Oct 19, 2006
- Maosheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER
- Publication number 20060225767
- Publication date Oct 12, 2006
- Maosheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gas blocker plate for improved deposition
- Publication number 20050252447
- Publication date Nov 17, 2005
- Applied Materials, Inc.
- Maosheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Edge flow faceplate for improvement of CVD film properties
- Publication number 20050126484
- Publication date Jun 16, 2005
- APPLIED MATERIALS, INC., A Delaware corporation
- Maosheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for cleaning a CVD chamber
- Publication number 20040144490
- Publication date Jul 29, 2004
- APPLIED MATERIALS, INC.
- Maosheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Cleaning of CVD chambers using remote source with CXFYOZ based chem...
- Publication number 20040139983
- Publication date Jul 22, 2004
- APPLIED MATERIALS, INC.
- Annamalai Lakshmanan
- B08 - CLEANING
Information Patent Application
METHOD FOR CURING LOW DIELECTRIC CONSTANT FILM USING DIRECT CURRENT...
- Publication number 20040137758
- Publication date Jul 15, 2004
- Applied Materials,Inc
- Lihua Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Blocker plate bypass design to improve clean rate at the edge of th...
- Publication number 20040118519
- Publication date Jun 24, 2004
- APPLIED MATERIALS, INC.
- Soovo Sen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for cleaning plasma enhanced chemical vapor deposition chamb...
- Publication number 20040099281
- Publication date May 27, 2004
- APPLIED MATERIALS, INC.
- Juan Carlos Rocha-Alvarez
- B08 - CLEANING
Information Patent Application
PLASMA ENHANCED CVD LOW K CARBON-DOPED SILICON OXIDE FILM DEPOSITIO...
- Publication number 20040082193
- Publication date Apr 29, 2004
- APPLIED MATERIALS, INC.
- Juan Carlos Rocha-Alvarez
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods for operating a chemical vapor deposition chamber using a h...
- Publication number 20040052969
- Publication date Mar 18, 2004
- APPLIED MATERIALS, INC.
- Ju-Hyung Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Heated gas distribution plate for a processing chamber
- Publication number 20040050492
- Publication date Mar 18, 2004
- APPLIED MATERIALS, INC.
- Lun Tsuei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Maosheng Zhao

Person

Patents Grantslast 30 patents

Method and apparatus for cleaning a CVD chamber

Method and apparatus for cleaning a CVD chamber

Method for cleaning a CVD chamber

Computer-readable medium that contains software for executing a met...

Heated gas distribution plate for a processing chamber

Method for cleaning plasma enhanced chemical vapor deposition chamb...

Cleaning of CVD chambers using remote source with cxfyoz based chem...

Method for curing low dielectric constant film using direct current...

Plasma enhanced CVD low k carbon-doped silicon oxide film depositio...

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER

METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER

METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER

METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER

METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER

METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER

Gas blocker plate for improved deposition

Edge flow faceplate for improvement of CVD film properties

Method and apparatus for cleaning a CVD chamber

Cleaning of CVD chambers using remote source with CXFYOZ based chem...

METHOD FOR CURING LOW DIELECTRIC CONSTANT FILM USING DIRECT CURRENT...

Blocker plate bypass design to improve clean rate at the edge of th...

Method for cleaning plasma enhanced chemical vapor deposition chamb...

PLASMA ENHANCED CVD LOW K CARBON-DOPED SILICON OXIDE FILM DEPOSITIO...

Methods for operating a chemical vapor deposition chamber using a h...

Heated gas distribution plate for a processing chamber