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Marcel H. M. Beems
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Veldhoven, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Method of monitoring and device manufacturing method
Patent number
10,809,631
Issue date
Oct 20, 2020
ASML Netherlands B.V.
Everhardus Cornelis Mos
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Measuring method, measuring apparatus, lithographic apparatus and d...
Patent number
8,593,646
Issue date
Nov 26, 2013
ASML Netherlands B.V.
Arie Jeffrey Den Boef
G01 - MEASURING TESTING
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,514,365
Issue date
Aug 20, 2013
ASML Netherlands B.V.
Frederik Eduard De Jong
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic projection apparatus, device manufacturing method, dev...
Patent number
6,747,729
Issue date
Jun 8, 2004
ASML Netherlands B.V.
Wouter Onno Pril
C01 - INORGANIC CHEMISTRY
Information
Patent Grant
Optomechanical mount for precisely steering/positioning a light beam
Patent number
6,570,721
Issue date
May 27, 2003
Agilent Technologies, Inc.
Kenneth J. Wayne
G02 - OPTICS
Information
Patent Grant
Optomechanical mount for precisely steering/positioning a light beam
Patent number
6,536,736
Issue date
Mar 25, 2003
Agilent Technologies, Inc.
Kenneth J. Wayne
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF MONITORING AND DEVICE MANUFACTURING METHOD
Publication number
20180307145
Publication date
Oct 25, 2018
ASML NETHERLANDS B.V.
Everhardus Cornelis MOS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus temperature compensation
Publication number
20070076218
Publication date
Apr 5, 2007
ASML NETHERLANDS B.V.
Tjarko Adriaan Rudolf Van Empel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and positioning apparatus
Publication number
20060238733
Publication date
Oct 26, 2006
ASML NETHERLANDS B.V.
Marcel Hendrikus Maria Beems
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithogaphic apparatus and positioning apparatus
Publication number
20060238731
Publication date
Oct 26, 2006
ASML NETHERLANDS B.V.
Marcel Hendrikus Maria Beems
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic interferometer system
Publication number
20050248771
Publication date
Nov 10, 2005
ASML NETHERLANDS B.V.
Emiel Jozef Melanie Eussen
G01 - MEASURING TESTING
Information
Patent Application
Lithographic interferometer system
Publication number
20050111005
Publication date
May 26, 2005
ASML NETHERLANDS B.V.
Emiel Jozef Melanie Eussen
G01 - MEASURING TESTING
Information
Patent Application
Lithographic apparatus, device manufacturing method, and computer p...
Publication number
20050002040
Publication date
Jan 6, 2005
ASML NETHERLANDS B.V.
Johannes Mathias Theodorus Antonius Adriaens
G01 - MEASURING TESTING
Information
Patent Application
Optomechanical mount for precisely steering/positioning a light beam
Publication number
20030010885
Publication date
Jan 16, 2003
Kenneth J. Wayne
G02 - OPTICS
Information
Patent Application
Optomechanical mount for precisely steering/positioning a light beam
Publication number
20030011901
Publication date
Jan 16, 2003
Kenneth J. Wayne
G02 - OPTICS
Information
Patent Application
Lithographic projection apparatus, device manufacturing method, dev...
Publication number
20020045113
Publication date
Apr 18, 2002
Wouter Onno Pril
C01 - INORGANIC CHEMISTRY