Marcel Mathijs Theodore Marie Dierichs

Person

Venlo, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Controllable radiation lithographic apparatus and method
- Patent number 8,345,225
- Issue date Jan 1, 2013
- ASML Netherlands B.V.
- Johannes Onvlee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,279,405
- Issue date Oct 2, 2012
- ASML Netherlands B.V.
- Marcel Mathijs Theodore Marie Dierichs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device manufacturing method and mask for use therein
- Patent number 8,252,487
- Issue date Aug 28, 2012
- ASML Netherlands B.V.
- Marcel Mathijs Theodore Marie Dierichs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,208,123
- Issue date Jun 26, 2012
- ASML Netherlands B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Radiation system with contamination barrier
- Patent number 8,129,702
- Issue date Mar 6, 2012
- ASML Netherlands B.V.
- Levinus Pieter Bakker
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,027,026
- Issue date Sep 27, 2011
- ASML Netherlands B.V.
- Matthew Lipson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,894,040
- Issue date Feb 22, 2011
- ASML Netherlands B.V.
- Matthew Lipson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method using acidic...
- Patent number 7,808,611
- Issue date Oct 5, 2010
- ASML Netherlands B.V.
- Bob Streefkerk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method using acidic...
- Patent number 7,804,574
- Issue date Sep 28, 2010
- ASML Netherlands B.V.
- Bob Streefkerk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Assembly for detection of radiation flux and contamination of an op...
- Patent number 7,800,079
- Issue date Sep 21, 2010
- ASML Netherlands B.V.
- Vadim Yevgenyevich Banine
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device manufacturing method, top coat material and substrate
- Patent number 7,763,355
- Issue date Jul 27, 2010
- ASML Netherlands B.V.
- Johannes Catharinus Hubertus Mulkens
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Lithographic apparatus, device manufacturing method and a substrate
- Patent number 7,746,445
- Issue date Jun 29, 2010
- ASML Netherlands B.V.
- Marcel Mathijs Theodore Marie Dierichs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Contamination barrier with expandable lamellas
- Patent number 7,737,425
- Issue date Jun 15, 2010
- ASML Netherlands B.V.
- Levinus Pieter Bakker
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,733,459
- Issue date Jun 8, 2010
- ASML Netherlands B.V.
- Marcel Mathijs Theodore Marie Dierichs
- C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,697,116
- Issue date Apr 13, 2010
- ASML Netherlands B.V.
- Marcel Mathijs Theodore Marie Dierichs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,684,008
- Issue date Mar 23, 2010
- ASML Netherlands B.V.
- Joannes Theodoor De Smit
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,528,929
- Issue date May 5, 2009
- ASML Netherlands B.V.
- Bob Streefkerk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device manufacturing method, top coat material and substrate
- Patent number 7,491,661
- Issue date Feb 17, 2009
- ASML Netherlands B.V.
- Johannes Catharinus Hubertus Mulkens
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Uniformity correction for lithographic apparatus
- Patent number 7,362,413
- Issue date Apr 22, 2008
- ASML Netherlands B.V.
- Alexander Kremer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,333,178
- Issue date Feb 19, 2008
- ASML Netherlands B.V.
- Marcel Mathijs Theodore Marie Dierichs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device manufacturing method and a substrate
- Patent number 7,326,522
- Issue date Feb 5, 2008
- ASML Netherlands B.V.
- Marcel Mathijs Theodore Marie Dierichs
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,317,504
- Issue date Jan 8, 2008
- ASML Netherlands B.V.
- Joannes Theodoor De Smit
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,277,158
- Issue date Oct 2, 2007
- ASML Netherlands B.V.
- Marcel Mathijs Theodore Marie Dierichs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Diffuser unit, lithographic apparatus, method for homogenizing a be...
- Patent number 7,259,827
- Issue date Aug 21, 2007
- ASML Netherlands B.V.
- Marcel Mathijs Theodore Marie Dierichs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Contamination barrier with expandable lamellas
- Patent number 7,247,866
- Issue date Jul 24, 2007
- ASML Netherlands B.V.
- Levinus Pieter Bakker
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Optical component, optical system including such an optical compone...
- Patent number 7,224,430
- Issue date May 29, 2007
- ASML Netherlands B.V.
- Marcel Mathijs Theodore Marie Dierichs
- G02 - OPTICS
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,224,440
- Issue date May 29, 2007
- ASML Netherlands B.V.
- Stefan Geerte Kruijswijk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stationary and dynamic radial transverse electric polarizer for hig...
- Patent number 7,206,059
- Issue date Apr 17, 2007
- ASML Netherlands B.V.
- Donis George Flagello
- G02 - OPTICS
Information Patent Grant
Lithographic apparatus, device manufacturing method and a substrate
- Patent number 7,175,968
- Issue date Feb 13, 2007
- ASML Netherlands B.V.
- Marcel Mathijs Theodore Marie Dierichs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,170,587
- Issue date Jan 30, 2007
- ASML Netherlands B.V.
- Marcel Mathijs Theodore Marie Dierichs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD FOR REDUCING STRAY RADIATION
- Publication number 20120075610
- Publication date Mar 29, 2012
- ASML NETHERLANDS B.V.
- Marcel Mathijs Theodore Marie Dierichs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20120013870
- Publication date Jan 19, 2012
- ASML NETHERLANDS B.V.
- Marcel Mathijs Theodore Marie Dierichs
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20120013872
- Publication date Jan 19, 2012
- ASML NETHERLANDS B.V.
- Joannes Theodoor De Smit
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20120013874
- Publication date Jan 19, 2012
- ASML NETHERLANDS B.V.
- Marcel Mathijs Theodore Marie Dierichs
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20110273677
- Publication date Nov 10, 2011
- ASML NETHERLANDS B.V.
- Bob STREEFKERK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20110134402
- Publication date Jun 9, 2011
- ASML NETHERLANDS B.V.
- Matthew LIPSON
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Homogenizer
- Publication number 20110122385
- Publication date May 26, 2011
- ASML NETHERLANDS B.V.
- Bert Jan CLAESSENS
- G02 - OPTICS
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20100321652
- Publication date Dec 23, 2010
- ASML NETHERLANDS B.V.
- Bob Streefkerk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20100265476
- Publication date Oct 21, 2010
- ASML NETHERLANDS B.V.
- Marcel Mathijs Theodore Marie Dierichs
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND A SUBSTRATE
- Publication number 20100221660
- Publication date Sep 2, 2010
- ASML NETHERLANDS B.V.
- Marcel Mathijs Theodore Marie DIERICHS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RADIATION SYSTEM WITH CONTAMINATION BARRIER
- Publication number 20100200772
- Publication date Aug 12, 2010
- ASML NETHERLANDS B.V.
- Levinus Pieter BAKKER
- B82 - NANO-TECHNOLOGY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20100128235
- Publication date May 27, 2010
- ASML NETHERLANDS B.V.
- Joannes Theodoor De Smit
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Controllable radiation lithographic apparatus and method
- Publication number 20100045954
- Publication date Feb 25, 2010
- ASML NETHERLANDS B.V.
- Johannes ONVLEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20090207397
- Publication date Aug 20, 2009
- ASML NETHERLANDS B.V.
- Bob Streefkerk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Device manufacturing method, top coat material and substrate
- Publication number 20090075061
- Publication date Mar 19, 2009
- ASML NETHERLANDS B.V.
- Johannes Catharinus Hubertus Mulkens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and method
- Publication number 20080259304
- Publication date Oct 23, 2008
- ASML NETHERLANDS B.V.
- Marcel Mathijs Theodore Marie Dierichs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Cover for shielding a portion of an arc lamp
- Publication number 20080170308
- Publication date Jul 17, 2008
- ASML NETHERLANDS B.V.
- Marcel Mathijs Theodore Marie Dierichs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Radiation system, lithographic apparatus, device manufacturing meth...
- Publication number 20050270511
- Publication date Dec 8, 2005
- ASML NETHERLANDS B.V.
- Marcel Mathijs Theodore Marie Dierichs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20050225734
- Publication date Oct 13, 2005
- ASML NETHERLANDS B.V.
- Joannes Theodoor De Smit
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Device manufacturing method and mask for use therein
- Publication number 20050136334
- Publication date Jun 23, 2005
- ASML NETHERLANDS B.V.
- Marcel Mathijs Theodore Marie Dierichs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20050094119
- Publication date May 5, 2005
- ASML NETHERLANDS B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20050078286
- Publication date Apr 14, 2005
- ASML NETHERLANDS B.V.
- Marcel Mathijs Theodore Marie Dierichs
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL

Marcel Mathijs Theodore Marie Dierichs

Person

Patents Grantslast 30 patents

Controllable radiation lithographic apparatus and method

Lithographic apparatus and device manufacturing method

Device manufacturing method and mask for use therein

Lithographic apparatus and device manufacturing method

Radiation system with contamination barrier

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method using acidic...

Lithographic apparatus and device manufacturing method using acidic...

Assembly for detection of radiation flux and contamination of an op...

Device manufacturing method, top coat material and substrate

Lithographic apparatus, device manufacturing method and a substrate

Contamination barrier with expandable lamellas

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Device manufacturing method, top coat material and substrate

Uniformity correction for lithographic apparatus

Lithographic apparatus and device manufacturing method

Device manufacturing method and a substrate

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Diffuser unit, lithographic apparatus, method for homogenizing a be...

Contamination barrier with expandable lamellas

Optical component, optical system including such an optical compone...

Lithographic apparatus and device manufacturing method

Stationary and dynamic radial transverse electric polarizer for hig...

Lithographic apparatus, device manufacturing method and a substrate

Lithographic apparatus and device manufacturing method

Patents Applicationslast 30 patents

LITHOGRAPHIC APPARATUS AND METHOD FOR REDUCING STRAY RADIATION

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Homogenizer

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND A SUBSTRATE

RADIATION SYSTEM WITH CONTAMINATION BARRIER

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Controllable radiation lithographic apparatus and method

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Device manufacturing method, top coat material and substrate

Lithographic apparatus and method

Cover for shielding a portion of an arc lamp

Radiation system, lithographic apparatus, device manufacturing meth...

Lithographic apparatus and device manufacturing method

Device manufacturing method and mask for use therein

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method