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Marcel Mathijs Theodore Marie Dierichs
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Venlo, NL
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last 30 patents
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Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20120008117
Publication date
Jan 12, 2012
ASML NETHERLANDS B.V.
Joannes Theodoor DE SMIT
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20110317138
Publication date
Dec 29, 2011
ASML Holding N.V.
Matthew LIPSON
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20100141918
Publication date
Jun 10, 2010
ASML NETHERLANDS B.V.
Marcel Mathijs Theodore Marie Dierichs
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060139599
Publication date
Jun 29, 2006
ASML NETHERLANDS B.V.
Stefan Geerte Kruijswijk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Uniformity correction for lithographic apparatus
Publication number
20060126036
Publication date
Jun 15, 2006
ASML NETHERLANDS B.V.
Alexander Kremer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for coating a substrate for euv lithography and substrate wi...
Publication number
20050008864
Publication date
Jan 13, 2005
ASML NETHERLANDS B.V.
Koen Van Ingen Schenau
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Device manufacturing method and computer program
Publication number
20040137677
Publication date
Jul 15, 2004
ASML NETHERLANDS B.V.
Martin Lowisch
B82 - NANO-TECHNOLOGY