Marco Koert Stavenga

Person

Eindhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus and a method of operating the apparatus
- Patent number 12,072,635
- Issue date Aug 27, 2024
- ASML Netherlands B.V.
- Christian Gerardus Norbertus Hendricus Marie Cloin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method involving a...
- Patent number 11,378,893
- Issue date Jul 5, 2022
- ASML Netherlands B.V.
- Theodorus Petrus Maria Cadee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate table, immersion lithographic apparatus and device manufa...
- Patent number 11,215,933
- Issue date Jan 4, 2022
- ASML Netherlands B.V.
- Marco Koert Stavenga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle suppression systems and methods
- Patent number 11,204,558
- Issue date Dec 21, 2021
- ASML Netherlands B.V.
- Yang-Shan Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and a method of operating the apparatus
- Patent number 11,187,991
- Issue date Nov 30, 2021
- ASML Netherlands B.V.
- Christian Gerardus Norbertus Hendricus Marie Cloin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method involving a...
- Patent number 10,838,310
- Issue date Nov 17, 2020
- ASML Netherlands B.V.
- Theodorus Petrus Maria Cadee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion liquid, exposure apparatus, and exposure process
- Patent number 10,712,675
- Issue date Jul 14, 2020
- ASML Netherlands B.V.
- Hans Jansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method involving a...
- Patent number 10,620,546
- Issue date Apr 14, 2020
- ASML Netherlands B.V.
- Jacobus Johannus Leonardus Hendricus Verspay
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,509,326
- Issue date Dec 17, 2019
- ASML Netherlands B.V.
- Hans Jansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate table, immersion lithographic apparatus and device manufa...
- Patent number 10,451,980
- Issue date Oct 22, 2019
- ASML Netherlands B.V.
- Marco Koert Stavenga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithographic apparatus and device manufacturing method involving a...
- Patent number 10,274,832
- Issue date Apr 30, 2019
- ASML Netherlands B.V.
- Jacobus Johannus Leonardus Hendricus Verspay
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method involving a...
- Patent number 10,254,663
- Issue date Apr 9, 2019
- ASML Netherlands B.V.
- Theodorus Petrus Maria Cadee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method involving a...
- Patent number 9,964,861
- Issue date May 8, 2018
- ASML Netherlands B.V.
- Jacobus Johannus Leonardus Hendricus Verspay
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method involving a...
- Patent number 9,798,247
- Issue date Oct 24, 2017
- ASML Netherlands B.V.
- Jacobus Johannus Leonardus Hendricus Verspay
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion liquid, exposure apparatus, and exposure process
- Patent number 9,772,565
- Issue date Sep 26, 2017
- ASML Netherlands B.V.
- Hans Jansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,703,210
- Issue date Jul 11, 2017
- ASML Netherlands B.V.
- Hans Jansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,645,507
- Issue date May 9, 2017
- ASML Netherlands B.V.
- Jacobus Johannus Leonardus Hendricus Verspay
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate table, immersion lithographic apparatus and device manufa...
- Patent number 9,625,833
- Issue date Apr 18, 2017
- ASML Netherlands B.V.
- Marco Koert Stavenga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,581,914
- Issue date Feb 28, 2017
- ASML Netherlands B.V.
- Marcel Mathijs Theodore Marie Dierichs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion liquid, exposure apparatus, and exposure process
- Patent number 9,454,088
- Issue date Sep 27, 2016
- ASML Netherlands B.V.
- Hans Jansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method involving a...
- Patent number 9,268,242
- Issue date Feb 23, 2016
- ASML Netherlands B.V.
- Theodorus Petrus Maria Cadee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method involving a...
- Patent number 9,261,797
- Issue date Feb 16, 2016
- ASML Netherlands B.V.
- Jacobus Johannus Leonardus Hendricus Verspay
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method involving a...
- Patent number 9,188,880
- Issue date Nov 17, 2015
- ASML Netherlands B.V.
- Theodorus Petrus Maria Cadee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and a method of operating the apparatus
- Patent number 9,176,393
- Issue date Nov 3, 2015
- ASML Netherlands B.V.
- Christian Gerardus Norbertus Hendricus Marie Cloin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion liquid, exposure apparatus, and exposure process
- Patent number 9,164,391
- Issue date Oct 20, 2015
- ASML Netherlands B.V.
- Hans Jansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate table, immersion lithographic apparatus and device manufa...
- Patent number 9,059,228
- Issue date Jun 16, 2015
- ASML Netherlands B.V.
- Marco Koert Stavenga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,025,127
- Issue date May 5, 2015
- ASML Netherlands B.V.
- Marcel Mathijs Theodore Marie Dierichs
- C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Information Patent Grant
Cleaning device, a lithographic apparatus and a lithographic appara...
- Patent number 9,013,672
- Issue date Apr 21, 2015
- ASML Netherlands B.V.
- Anthonius Martinus Cornelis Petrus De Jong
- B08 - CLEANING
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,953,144
- Issue date Feb 10, 2015
- ASML Netherlands B.V.
- Marcel Mathijs Theodore Marie Dierichs
- C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Information Patent Grant
Cleaning device, a lithographic apparatus and a lithographic appara...
- Patent number 8,947,629
- Issue date Feb 3, 2015
- ASML Netherlands B.V.
- Anthonius Martinus Cornelis Petrus De Jong
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TABLE, IMMERSION LITHOGRAPHIC APPARATUS AND DEVICE MANUFA...
- Publication number 20220121131
- Publication date Apr 21, 2022
- ASML NETHERLANDS B.V.
- Marco Koert STAVENGA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING THE APPARATUS
- Publication number 20220082948
- Publication date Mar 17, 2022
- ASML NETHERLANDS B.V.
- Christian Gerardus Norbertus Hendricus Marie CLOIN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A...
- Publication number 20210063898
- Publication date Mar 4, 2021
- ASML NETHERLANDS B.V.
- Theodorus Petrus Maria CADEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PARTICLE SUPPRESSION SYSTEMS AND METHODS
- Publication number 20200142326
- Publication date May 7, 2020
- ASML NETHERLANDS B.V.
- Yang-Shan HUANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TABLE, IMMERSION LITHOGRAPHIC APPARATUS AND DEVICE MANUFA...
- Publication number 20200050116
- Publication date Feb 13, 2020
- ASML NETHERLANDS B.V.
- Marco Koert STAVENGA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A...
- Publication number 20190258174
- Publication date Aug 22, 2019
- ASML NETHERLANDS B.V.
- Jacobus Johannus Leonardus Hendricus VERSPAY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A...
- Publication number 20190235397
- Publication date Aug 1, 2019
- ASML NETHERLANDS B.V.
- Theodorus Petrus Maria CADEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOVLING A...
- Publication number 20180356735
- Publication date Dec 13, 2018
- ASML NETHERLANDS B.V.
- Jacobus Johannus Leonardus Hendricus VERSPAY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A...
- Publication number 20180046090
- Publication date Feb 15, 2018
- ASML NETHERLANDS B.V.
- Jacobus Johannus Leonardus Hendricus VERSPAY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMMERSION LIQUID, EXPOSURE APPARATUS, AND EXPOSURE PROCESS
- Publication number 20180004100
- Publication date Jan 4, 2018
- ASML NETHERLANDS B.V.
- Hans JANSEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20170285488
- Publication date Oct 5, 2017
- ASML NETHERLANDS B.V.
- Hans Jansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TABLE, IMMERSION LITHOGRAPHIC APPARATUS AND DEVICE MANUFA...
- Publication number 20170219936
- Publication date Aug 3, 2017
- ASML NETHERLANDS B.V.
- Marco Koert STAVENGA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A...
- Publication number 20170219938
- Publication date Aug 3, 2017
- ASML NETHERLANDS B.V.
- Jacobus Johannus Leonardus Hendricus VERSPAY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20170139333
- Publication date May 18, 2017
- ASML NETHERLANDS B.V.
- Marcel Mathijs Theodore Marie DIERICHS
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
IMMERSION LIQUID, EXPOSURE APPARATUS, AND EXPOSURE PROCESS
- Publication number 20160363873
- Publication date Dec 15, 2016
- ASML NETHERLANDS B.V.
- Hans JANSEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20160124321
- Publication date May 5, 2016
- ASML NETHERLANDS B.V.
- Jacobus Johannus Leonardus Hendricus VERSPAY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A...
- Publication number 20160048085
- Publication date Feb 18, 2016
- ASML NETHERLANDS B.V.
- Theodorus Petrus Maria CADEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMMERSION LIQUID, EXPOSURE APPARATUS, AND EXPOSURE PROCESS
- Publication number 20160033876
- Publication date Feb 4, 2016
- ASML NETHERLANDS B.V.
- Hans JANSEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING THE APPARATUS
- Publication number 20160011522
- Publication date Jan 14, 2016
- ASML NETHERLANDS B.V.
- Christian Gerardus Norbertus Hendricus Marie CLOIN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TABLE, IMMERSION LITHOGRAPHIC APPARATUS AND DEVICE MANUFA...
- Publication number 20150277238
- Publication date Oct 1, 2015
- ASML NETHERLANDS B.V.
- Marco Koert STAVENGA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20150205214
- Publication date Jul 23, 2015
- ASML NETHERLANDS B.V.
- Marcel Mathijs Theodore Marie DIERICHS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20150116675
- Publication date Apr 30, 2015
- ASML NETHERLANDS B.V.
- Hans JANSEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMMERSION LIQUID, EXPOSURE APPARATUS, AND EXPOSURE PROCESS
- Publication number 20150056559
- Publication date Feb 26, 2015
- ASML NETHERLANDS B.V.
- Hans JANSEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20140335457
- Publication date Nov 13, 2014
- ASML NETHERLANDS B.V.
- Jacobus Johannus Leonardus Hendricus VERSPAY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF PREPARING A SUBSTRATE FOR LITHOGRAPHY, A SUBSTRATE, A DEV...
- Publication number 20120129098
- Publication date May 24, 2012
- ASML NETHERLANDS B.V.
- Marcus Theodoor Wilhelmus VAN DER HEIJDEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20120113402
- Publication date May 10, 2012
- ASML NETHERLANDS B.V.
- Theodorus Petrus Maria CADEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20120013870
- Publication date Jan 19, 2012
- ASML NETHERLANDS B.V.
- Marcel Mathijs Theodore Marie Dierichs
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20120013874
- Publication date Jan 19, 2012
- ASML NETHERLANDS B.V.
- Marcel Mathijs Theodore Marie Dierichs
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20120008115
- Publication date Jan 12, 2012
- ASML NETHERLANDS B.V.
- Martinus Cornelis Maria Verhagen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20120008119
- Publication date Jan 12, 2012
- ASML NETHERLANDS B.V.
- Hans JANSEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Marco Koert Stavenga

Person

Patents Grantslast 30 patents

Lithographic apparatus and a method of operating the apparatus

Lithographic apparatus and device manufacturing method involving a...

Substrate table, immersion lithographic apparatus and device manufa...

Particle suppression systems and methods

Lithographic apparatus and a method of operating the apparatus

Lithographic apparatus and device manufacturing method involving a...

Immersion liquid, exposure apparatus, and exposure process

Lithographic apparatus and device manufacturing method involving a...

Lithographic apparatus and device manufacturing method

Substrate table, immersion lithographic apparatus and device manufa...

Lithographic apparatus and device manufacturing method involving a...

Lithographic apparatus and device manufacturing method involving a...

Lithographic apparatus and device manufacturing method involving a...

Lithographic apparatus and device manufacturing method involving a...

Immersion liquid, exposure apparatus, and exposure process

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Substrate table, immersion lithographic apparatus and device manufa...

Lithographic apparatus and device manufacturing method

Immersion liquid, exposure apparatus, and exposure process

Lithographic apparatus and device manufacturing method involving a...

Lithographic apparatus and device manufacturing method involving a...

Lithographic apparatus and device manufacturing method involving a...

Lithographic apparatus and a method of operating the apparatus

Immersion liquid, exposure apparatus, and exposure process

Substrate table, immersion lithographic apparatus and device manufa...

Lithographic apparatus and device manufacturing method

Cleaning device, a lithographic apparatus and a lithographic appara...

Lithographic apparatus and device manufacturing method

Cleaning device, a lithographic apparatus and a lithographic appara...

Patents Applicationslast 30 patents

SUBSTRATE TABLE, IMMERSION LITHOGRAPHIC APPARATUS AND DEVICE MANUFA...

LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING THE APPARATUS

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A...

PARTICLE SUPPRESSION SYSTEMS AND METHODS

SUBSTRATE TABLE, IMMERSION LITHOGRAPHIC APPARATUS AND DEVICE MANUFA...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOVLING A...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A...

IMMERSION LIQUID, EXPOSURE APPARATUS, AND EXPOSURE PROCESS

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

SUBSTRATE TABLE, IMMERSION LITHOGRAPHIC APPARATUS AND DEVICE MANUFA...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

IMMERSION LIQUID, EXPOSURE APPARATUS, AND EXPOSURE PROCESS

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A...

IMMERSION LIQUID, EXPOSURE APPARATUS, AND EXPOSURE PROCESS

LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING THE APPARATUS

SUBSTRATE TABLE, IMMERSION LITHOGRAPHIC APPARATUS AND DEVICE MANUFA...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

IMMERSION LIQUID, EXPOSURE APPARATUS, AND EXPOSURE PROCESS

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

METHOD OF PREPARING A SUBSTRATE FOR LITHOGRAPHY, A SUBSTRATE, A DEV...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD