Marcus Schumacher

Person

Kerpen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for high-throughput chemical vapor deposition
- Patent number 8,906,456
- Issue date Dec 9, 2014
- Aixtron, Inc.
- Piotr Strzyzewski
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Process for depositing layers containing silicon and germanium
- Patent number 7,732,308
- Issue date Jun 8, 2010
- Aixtron, Inc.
- Marcus Schumacher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process and apparatus for depositing single-component or multi-comp...
- Patent number 7,410,670
- Issue date Aug 12, 2008
- Aixtron AG
- Marcus Schumacher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device and method for depositing one or more layers on a substrate
- Patent number 6,849,241
- Issue date Feb 1, 2005
- Aixtron AG
- Martin Dauelsberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR HIGH-THROUGHPUT CHEMICAL VAPOR DEPOSITION
- Publication number 20140030434
- Publication date Jan 30, 2014
- AIXTRON INC.
- Piotr Strzyzewski
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
PROCESS FOR DEPOSITING LAYERS CONTAINING SILICON AND GERMANIUM
- Publication number 20090081853
- Publication date Mar 26, 2009
- Marcus Schumacher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for Depositing in Particular Metal Oxides by Means of Discon...
- Publication number 20080274278
- Publication date Nov 6, 2008
- Peter Baumann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and method for high-throughput chemical vapor deposition
- Publication number 20080096369
- Publication date Apr 24, 2008
- Piotr Strzyzewski
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Process for the self-limiting deposition of one or more monolayers
- Publication number 20070009659
- Publication date Jan 11, 2007
- Peter Baumann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Process and apparatus for depositing single-component or multi-comp...
- Publication number 20060249081
- Publication date Nov 9, 2006
- Marcus Schumacher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Device for depositing thin layers with a wireless detection of proc...
- Publication number 20050092246
- Publication date May 5, 2005
- Peter Baumann
- C30 - CRYSTAL GROWTH
Information Patent Application
Device and method for feeding a liquid starting material, which has...
- Publication number 20040013800
- Publication date Jan 22, 2004
- Gerhard Karl Strauch
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Device and method for depositing one or more layers on a substrate
- Publication number 20030056720
- Publication date Mar 27, 2003
- Martin Dauelsberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and device for depositing at least one precursor, which is i...
- Publication number 20030056728
- Publication date Mar 27, 2003
- Johannes Lindner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Marcus Schumacher

Person

Patents Grantslast 30 patents

Apparatus and method for high-throughput chemical vapor deposition

Process for depositing layers containing silicon and germanium

Process and apparatus for depositing single-component or multi-comp...

Device and method for depositing one or more layers on a substrate

Patents Applicationslast 30 patents

APPARATUS AND METHOD FOR HIGH-THROUGHPUT CHEMICAL VAPOR DEPOSITION

PROCESS FOR DEPOSITING LAYERS CONTAINING SILICON AND GERMANIUM

Method for Depositing in Particular Metal Oxides by Means of Discon...

Apparatus and method for high-throughput chemical vapor deposition

Process for the self-limiting deposition of one or more monolayers

Process and apparatus for depositing single-component or multi-comp...

Device for depositing thin layers with a wireless detection of proc...

Device and method for feeding a liquid starting material, which has...

Device and method for depositing one or more layers on a substrate

Method and device for depositing at least one precursor, which is i...