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Margaret Lecko Gibson
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Underhill Center, VT, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method of stabilizing oxide etch and chamber performance using seas...
Patent number
6,899,785
Issue date
May 31, 2005
International Business Machines Corporation
Kellie L. Dutra
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Self-aligned copper silicide formation for improved adhesion/electr...
Patent number
6,818,992
Issue date
Nov 16, 2004
International Business Machines Corporation
Douglas S. Armbrust
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for fabricating a nitrided silicon-oxide gate dielectric
Patent number
6,780,720
Issue date
Aug 24, 2004
International Business Machines Corporation
Jay S. Burnham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Monitor for verification of ozone reaction
Patent number
6,368,867
Issue date
Apr 9, 2002
International Business Machines Corporation
Margaret Lecko Gibson
G01 - MEASURING TESTING
Information
Patent Grant
Self-aligned copper silicide formation for improved adhesion/electr...
Patent number
6,251,775
Issue date
Jun 26, 2001
International Business Machines Corporation
Douglas S. Armbrust
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Method for fabricating a nitrided silicon-oxide gate dielectric
Publication number
20040002226
Publication date
Jan 1, 2004
International Business Machines Corporation
Jay S. Burnham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of stabilizing oxide etch and chamber performance using seas...
Publication number
20030092272
Publication date
May 15, 2003
Kellie L. Dutra
H01 - BASIC ELECTRIC ELEMENTS