Mario Stella

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Bedlington, GB

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for controlling CMP pad surface finish
- Patent number 6,939,207
- Issue date Sep 6, 2005
- Lam Research Corporation
- Alan J. Jensen
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for controlling CMP pad surface finish
- Patent number 6,645,052
- Issue date Nov 11, 2003
- Lam Research Corporation
- Alan J. Jensen
- B24 - GRINDING POLISHING
Information Patent Grant
Double-sided wafer edge scrubbing apparatus and method for using th...
- Patent number 6,550,091
- Issue date Apr 22, 2003
- Lam Research Corporation
- Allan Radman
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for controlling CMP pad surface finish
- Publication number 20040127144
- Publication date Jul 1, 2004
- Lam Research Corporation
- Alan J. Jensen
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for controlling CMP pad surface finish
- Publication number 20030082997
- Publication date May 1, 2003
- Alan J. Jensen
- B24 - GRINDING POLISHING