Mark A. Meloni

Person

Lewisville, TX, US

People

Patents Grantslast 30 patents

Information Patent Grant
Multiprobe detection system for chemical-mechanical planarization tool
- Patent number 6,960,115
- Issue date Nov 1, 2005
- SpeedFam-IPEC Corporation
- Matthew Weldon
- B24 - GRINDING POLISHING
Information Patent Grant
Multiprobe detection system for chemical-mechanical planarization tool
- Patent number 6,805,613
- Issue date Oct 19, 2004
- SpeedFam-IPEC Corporation
- Matthew Weldon
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing pad window for a chemical mechanical polishing tool
- Patent number 6,685,537
- Issue date Feb 3, 2004
- SpeedFam-IPEC Corporation
- Clinton O. Fruitman
- B24 - GRINDING POLISHING
Information Patent Grant
Workpiece carrier with segmented and floating retaining elements
- Patent number 6,290,584
- Issue date Sep 18, 2001
- SpeedFam-IPEC Corporation
- Inki Kim
- B24 - GRINDING POLISHING
Information Patent Grant
System and method for detecting CMP endpoint via direct chemical mo...
- Patent number 6,287,171
- Issue date Sep 11, 2001
- SpeedFam-IPEC Corporation
- Mark Meloni
- B24 - GRINDING POLISHING
Information Patent Grant
Non-abrasive conditioning for polishing pads
- Patent number 6,283,836
- Issue date Sep 4, 2001
- SpeedFam-IPEC Corporation
- Clinton Fruitman
- B26 - HAND CUTTING TOOLS CUTTING SEVERING
Information Patent Grant
Method and apparatus for in-situ measurement of workpiece displacem...
- Patent number 6,273,792
- Issue date Aug 14, 2001
- SpeedFam-IPEC Corporation
- Mark Meloni
- B24 - GRINDING POLISHING
Information Patent Grant
Ultrasonic methods and apparatus for the in-situ detection of workp...
- Patent number 6,264,532
- Issue date Jul 24, 2001
- SpeedFam-IPEC Corporation
- Mark A. Meloni
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
Multiprobe detection system for chemical-mechanical planarization tool
- Publication number 20040038624
- Publication date Feb 26, 2004
- Matthew Weldon
- B24 - GRINDING POLISHING

Mark A. Meloni

Person

Patents Grantslast 30 patents

Multiprobe detection system for chemical-mechanical planarization tool

Multiprobe detection system for chemical-mechanical planarization tool

Polishing pad window for a chemical mechanical polishing tool

Workpiece carrier with segmented and floating retaining elements

System and method for detecting CMP endpoint via direct chemical mo...

Non-abrasive conditioning for polishing pads

Method and apparatus for in-situ measurement of workpiece displacem...

Ultrasonic methods and apparatus for the in-situ detection of workp...

Patents Applicationslast 30 patents

Multiprobe detection system for chemical-mechanical planarization tool