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Utrecht, NL
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last 30 patents
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
11,003,096
Issue date
May 11, 2021
ASML Netherlands B.V.
Timotheus Franciscus Sengers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,678,139
Issue date
Jun 9, 2020
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,514,618
Issue date
Dec 24, 2019
ASML Netherlands B.V.
Timotheus Franciscus Sengers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,180,629
Issue date
Jan 15, 2019
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,025,204
Issue date
Jul 17, 2018
ASML Netherlands B.V.
Timotheus Franciscus Sengers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,568,841
Issue date
Feb 14, 2017
ASML Netherlands B.V.
Timotheus Franciscus Sengers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method involving a...
Patent number
9,541,843
Issue date
Jan 10, 2017
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,316,919
Issue date
Apr 19, 2016
ASML Netherlands B.V.
Timotheus Franciscus Sengers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method involving a...
Patent number
9,152,058
Issue date
Oct 6, 2015
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method involving re...
Patent number
9,081,299
Issue date
Jul 14, 2015
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,947,637
Issue date
Feb 3, 2015
ASML Netherlands B.V.
Timotheus Franciscus Sengers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,482,845
Issue date
Jul 9, 2013
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,154,708
Issue date
Apr 10, 2012
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of preparing components, prepared component, lithographic ap...
Patent number
8,077,287
Issue date
Dec 13, 2011
ASML Netherlands B.V.
Johannes Adrianus Antonius Theodorus Dams
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,035,798
Issue date
Oct 11, 2011
ASML Netherlands B.V.
Timotheus Franciscus Sengers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,907,255
Issue date
Mar 15, 2011
ASML Netherlands B.V.
Timotheus Franciscus Sengers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Sensor for lithographic apparatus and method of obtaining measureme...
Patent number
7,599,811
Issue date
Oct 6, 2009
ASML Netherlands B.V.
Frits Jurgen Van Hout
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
Patent number
7,459,690
Issue date
Dec 2, 2008
ASML Netherlands B.V.
Jan Evert Van Der Werf
G01 - MEASURING TESTING
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,315,346
Issue date
Jan 1, 2008
ASML Netherlands B.V.
Michael Cornelis Van Beek
B08 - CLEANING
Information
Patent Grant
Radiation system, lithographic apparatus, device manufacturing meth...
Patent number
7,274,432
Issue date
Sep 25, 2007
ASML Netherlands B.V.
Mark Kroon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,230,674
Issue date
Jun 12, 2007
ASML Netherlands B.V.
Mark Kroon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,213,963
Issue date
May 8, 2007
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
Patent number
7,145,641
Issue date
Dec 5, 2006
ASML Netherlands, B.V.
Mark Kroon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
Patent number
7,142,287
Issue date
Nov 28, 2006
ASML Netherlands B.V.
Mark Kroon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
Patent number
7,075,620
Issue date
Jul 11, 2006
ASML Netherlands B.V.
Jan Evert Van Der Werf
G01 - MEASURING TESTING
Information
Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
Patent number
6,888,151
Issue date
May 3, 2005
ASML Netherlands B.V.
Mark Kroon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
Patent number
6,747,282
Issue date
Jun 8, 2004
ASML Netherlands B.V.
Mark Kroon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
Patent number
6,721,389
Issue date
Apr 13, 2004
ASML Netherlands B.V.
Jan E. Van Der Werf
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20200124990
Publication date
Apr 23, 2020
ASLM NETHERLANDS B.V.
Timotheus Franciscus SENGERS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20190250518
Publication date
Aug 15, 2019
ASML NETHERLANDS B.V.
Joeri LOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20180314169
Publication date
Nov 1, 2018
ASML NETHERLANDS B.V.
Timotheus Franciscus Sengers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20170153556
Publication date
Jun 1, 2017
ASML NETHERLANDS B.V.
Timotheus Franciscus Sengers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20170102621
Publication date
Apr 13, 2017
ASML NETHERLANDS B.V.
Joeri LOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20160209761
Publication date
Jul 21, 2016
ASML NETHERLANDS B.V.
Timotheus Franciscus Sengers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20150116683
Publication date
Apr 30, 2015
ASML NETHERLANDS B.V.
Timotheus Franciscus Sengers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20120274911
Publication date
Nov 1, 2012
ASML NETHERLANDS B.V.
Joeri LOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20110317143
Publication date
Dec 29, 2011
ASML NETHERLANDS B.V.
Timotheus Franciscus SENGERS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20110285977
Publication date
Nov 24, 2011
ASML NETHERLANDS B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20110279800
Publication date
Nov 17, 2011
ASML NETHERLANDS B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20110007285
Publication date
Jan 13, 2011
ASML NETHERLANDS B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Sensor for Lithographic Apparatus and Method of Obtaining Measureme...
Publication number
20070273869
Publication date
Nov 29, 2007
ASML NETHERLANDS B.V.
Frits Jurgen Van Hout
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20070132979
Publication date
Jun 14, 2007
ASML NETHERLANDS B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20070132971
Publication date
Jun 14, 2007
ASML NETHERLANDS B.V.
Timotheus Franciscus Sengers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing method, and device man...
Publication number
20060219931
Publication date
Oct 5, 2006
ASML NETHERLANDS B.V.
Jan E. Van Der Werf
G01 - MEASURING TESTING
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060215132
Publication date
Sep 28, 2006
ASML NETHERLANDS B.V.
Mark Kroon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing method, and device man...
Publication number
20060176463
Publication date
Aug 10, 2006
ASML NETHERLANDS B.V.
Mark Kroon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Radiation system, lithographic apparatus, device manufacturing meth...
Publication number
20060091327
Publication date
May 4, 2006
ASML NETHERLANDS B.V.
Mark Kroon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20050264778
Publication date
Dec 1, 2005
ASML NETHERLANDS B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing method, and device man...
Publication number
20050140956
Publication date
Jun 30, 2005
ASML NETHERLANDS B.V.
Mark Kroon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20050078287
Publication date
Apr 14, 2005
ASML NETHERLANDS B.V.
Timotheus Franciscus Sengers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of preparing components, prepared component, lithographic ap...
Publication number
20050008978
Publication date
Jan 13, 2005
ASML NETHERLANDS B.V.
Johannes Adrianus Antonius Theodorus Dams
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing method, and device man...
Publication number
20040211922
Publication date
Oct 28, 2004
ASML NETHERLANDS B.V.
Mark Kroon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing method, and device man...
Publication number
20040190677
Publication date
Sep 30, 2004
ASML NETHERLANDS B.V.
Jan E. Van Der Werf
G01 - MEASURING TESTING
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20040165160
Publication date
Aug 26, 2004
ASML NETHERLANDS B.V.
Michael Cornelis Van Beek
B08 - CLEANING
Information
Patent Application
Lithographic apparatus, device manufacturing method, and device man...
Publication number
20030001107
Publication date
Jan 2, 2003
ASML NETHERLANDS B.V.
Mark Kroon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing method, and device man...
Publication number
20020037461
Publication date
Mar 28, 2002
Jan E. Van Der Werf
G01 - MEASURING TESTING