Mark Saly

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods for depositing blocking layers on metal surfaces
- Patent number 12,131,900
- Issue date Oct 29, 2024
- Applied Materials, Inc.
- Bhaskar Jyoti Bhuyan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature growth of transition metal chalcogenides
- Patent number 12,110,584
- Issue date Oct 8, 2024
- Applied Materials, Inc.
- Chandan Das
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective blocking of metal surfaces using bifunctional self-assemb...
- Patent number 12,094,766
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Michael L. McSwiney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rhenium complexes and methods of use
- Patent number 12,084,464
- Issue date Sep 10, 2024
- Applied Materials, Inc.
- Thomas Knisley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor phase photoresists deposition
- Patent number 12,084,764
- Issue date Sep 10, 2024
- Applied Materials, Inc.
- Lakmal Charidu Kalutarage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor phase thermal etch solutions for metal oxo photoresists
- Patent number 12,068,170
- Issue date Aug 20, 2024
- Applied Materials, Inc.
- Lakmal Charidu Kalutarage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Molybdenum (0) precursors for deposition of molybdenum films
- Patent number 12,060,370
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Andrea Leoncini
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Preclean and encapsulation of microLED features
- Patent number 12,040,427
- Issue date Jul 16, 2024
- Applied Materials, Inc.
- Thomas Knisley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reducing agents for atomic layer deposition
- Patent number 12,031,209
- Issue date Jul 9, 2024
- Applied Materials, Inc.
- Bhaskar Jyoti Bhuyan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor phase thermal etch solutions for metal oxo photoresists
- Patent number 12,033,866
- Issue date Jul 9, 2024
- Applied Materials, Inc.
- Lakmal Charidu Kalutarage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gap-fill with aluminum-containing films
- Patent number 12,018,363
- Issue date Jun 25, 2024
- Applied Materials, Inc.
- Mark Saly
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal-doped carbon hardmasks
- Patent number 12,014,925
- Issue date Jun 18, 2024
- Applied Materials, Inc.
- Eswaranand Venkatasubramanian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for deposition of low-k films
- Patent number 11,990,332
- Issue date May 21, 2024
- Applied Materials, Inc.
- Bhaskar Jyoti Bhuyan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Area selective carbon-based film deposition
- Patent number 11,972,940
- Issue date Apr 30, 2024
- Applied Materials, Inc.
- Xinke Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of low-k films
- Patent number 11,970,777
- Issue date Apr 30, 2024
- Applied Materials, Inc.
- Shuaidi Zhang
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Methods for selective dry etching gallium oxide
- Patent number 11,942,330
- Issue date Mar 26, 2024
- Applied Materials, Inc.
- Feng Q. Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Corrosion resistant film on a chamber component and methods of depo...
- Patent number 11,932,938
- Issue date Mar 19, 2024
- Applied Materials, Inc.
- Lisa J. Enman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silyl pseudohalides for silicon containing films
- Patent number 11,932,940
- Issue date Mar 19, 2024
- Applied Materials, Inc.
- Keenan N. Woods
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Molybdenum thin films by oxidation-reduction
- Patent number 11,891,690
- Issue date Feb 6, 2024
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of semiconductor integration films
- Patent number 11,886,120
- Issue date Jan 30, 2024
- Applied Materials, Inc.
- Lakmal Charidu Kalutarage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Homoleptic lanthanide deposition precursors
- Patent number 11,866,824
- Issue date Jan 9, 2024
- Applied Materials, Inc.
- Thomas Knisley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Molecular layer deposition of amorphous carbon films
- Patent number 11,859,278
- Issue date Jan 2, 2024
- Applied Materials, Inc.
- Bhaskar Jyoti Bhuyan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective blocking of metal surfaces using bifunctional self-assemb...
- Patent number 11,848,229
- Issue date Dec 19, 2023
- Applied Materials, Inc.
- Michael L. McSwiney
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Methods of selective atomic layer deposition
- Patent number 11,821,085
- Issue date Nov 21, 2023
- Applied Materials, Inc.
- Bhaskar Jyoti Bhuyan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of depositing SiCON with C, O, and N compositional control
- Patent number 11,823,893
- Issue date Nov 21, 2023
- Applied Materials, Inc.
- Mark Saly
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Molybdenum(0) precursors for deposition of molybdenum films
- Patent number 11,760,768
- Issue date Sep 19, 2023
- Applied Materials, Inc.
- Chandan Kr Barik
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Multilayer encapsulation stacks by atomic layer deposition
- Patent number 11,732,356
- Issue date Aug 22, 2023
- Applied Materials, Inc.
- Cong Trinh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing blocking layers on conductive surfaces
- Patent number 11,702,733
- Issue date Jul 18, 2023
- Applied Materials, Inc.
- Lakmal C. Kalutarage
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for depositing sacrificial coatings on aerospace components
- Patent number 11,697,879
- Issue date Jul 11, 2023
- Applied Materials, Inc.
- Sukti Chatterjee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming silicon-phosphorous materials
- Patent number 11,649,560
- Issue date May 16, 2023
- Applied Materials, Inc.
- Errol Antonio C Sanchez
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
LOW-TEMPERATURE DEPOSITION PROCESSES TO FORM MOLYBDENUM-BASED MATER...
- Publication number 20240360549
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF FORMING INTERCONNECT STRUCTURES
- Publication number 20240355675
- Publication date Oct 24, 2024
- Applied Materials, Inc.
- Muthukumar Kaliappan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Molybdenum (0) Precursors For Deposition Of Molybdenum Films
- Publication number 20240343748
- Publication date Oct 17, 2024
- Applied Materials, Inc.
- Andrea Leoncini
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING A METAL LINER FOR INTERCONNECT STRUCTURES
- Publication number 20240339358
- Publication date Oct 10, 2024
- Applied Materials, Inc.
- Jesus Candelario Mendoza-Gutierrez
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DOPING BY MOLECULAR LAYER DEPOSITION
- Publication number 20240332014
- Publication date Oct 3, 2024
- Applied Materials, Inc.
- Xinke Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER DEPOSITION OF SILICON-CARBON-AND-NITROGEN-CONTAINING M...
- Publication number 20240332001
- Publication date Oct 3, 2024
- Applied Materials, Inc.
- Lakmal C. Kalutarage
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRECLEAN AND ENCAPSULATION OF MICROLED FEATURES
- Publication number 20240322073
- Publication date Sep 26, 2024
- Applied Materials, Inc.
- Thomas Joseph Knisley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL ORGANONITRILE PRECURSORS FOR THIN FILM DEPOSITION
- Publication number 20240301549
- Publication date Sep 12, 2024
- Applied Materials, Inc.
- Thomas Joseph Knisley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF FORMING INTERCONNECT STRUCTURES
- Publication number 20240297073
- Publication date Sep 5, 2024
- Applied Materials, Inc.
- Muthukumar Kaliappan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRONIC DEVICE FABRICATION USING AREA-SELECTIVE DEPOSITION
- Publication number 20240282632
- Publication date Aug 22, 2024
- Applied Materials, Inc.
- Zachary J. Devereaux
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTIPLE-METAL-CONTAINING METAL-OXO PHOTORESIST FILMS BY CVD AND AL...
- Publication number 20240271276
- Publication date Aug 15, 2024
- Applied Materials, Inc.
- LAKMAL KALUTARAGE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ENHANCED ETCH SELECTIVITY USING HALIDES
- Publication number 20240266180
- Publication date Aug 8, 2024
- Applied Materials, Inc.
- David Knapp
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRAVIOLET PELLICLES AND METHOD OF MANUFACTURING
- Publication number 20240248391
- Publication date Jul 25, 2024
- Applied Mateials, Inc.
- Thomas Joseph Knisley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
AREA SELECTIVE CARBON-BASED FILM DEPOSITION
- Publication number 20240234127
- Publication date Jul 11, 2024
- Applied Materials, Inc.
- Xinke Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method to Deposit Metal Cap for Interconnect
- Publication number 20240186181
- Publication date Jun 6, 2024
- Applied Materials, Inc.
- Ge QU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED SOLUTION WITH LOW TEMPERATURE DRY DEVELOP FOR EUV PHOTOR...
- Publication number 20240160100
- Publication date May 16, 2024
- Applied Materials, Inc.
- Tzu Shun Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BENZYL COMPOUND PASSIVATION FOR SELECTIVE DEPOSITION AND SELECTIVE...
- Publication number 20240145232
- Publication date May 2, 2024
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DRY ETCHING WITH ETCH BYPRODUCT SELF-CLEANING
- Publication number 20240128091
- Publication date Apr 18, 2024
- Applied Materials, Inc.
- Zhonghua Yao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF SELECTIVE ATOMIC LAYER DEPOSITION
- Publication number 20240052487
- Publication date Feb 15, 2024
- Applied Materials, Inc.
- Bhaskar Jyoti Bhuyan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods of Depositing SiCON with C, O, and N Compositional Control
- Publication number 20240047193
- Publication date Feb 8, 2024
- Applied Materials, Inc.
- Mark Saly
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD TO REDUCE LINE EDGE ROUGHNESS FOR EUV PHOTORESIST PATTERN
- Publication number 20240027912
- Publication date Jan 25, 2024
- Applied Materials, Inc.
- Xinke Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CORROSION RESISTANT FILM ON A CHAMBER COMPONENT AND METHODS OF DEPO...
- Publication number 20240003003
- Publication date Jan 4, 2024
- Applied Materials, Inc.
- Lisa J. Enman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE ETCH OF A SUBSTRATE
- Publication number 20230420259
- Publication date Dec 28, 2023
- Applied Materials, Inc.
- David Thompson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING CARBON-BASED SPACER FOR EUV PHOTORESIST PATTERNS
- Publication number 20230402285
- Publication date Dec 14, 2023
- Applied Materials, Inc.
- Xinke Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOLYBDENUM(0) PRECURSORS FOR DEPOSITION OF MOLYBDENUM FILMS
- Publication number 20230382933
- Publication date Nov 30, 2023
- Applied Materials, Inc.
- Chandan Kr Barik
- C07 - ORGANIC CHEMISTRY
Information Patent Application
DEPOSITION OF SEMICONDUCTOR INTEGRATION FILMS
- Publication number 20230386839
- Publication date Nov 30, 2023
- Applied Materials, Inc.
- Lakmal Charidu Kalutarage
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE METAL REMOVAL WITH FLOWABLE POLYMER
- Publication number 20230386833
- Publication date Nov 30, 2023
- Applied Materials, Inc.
- Liqi Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Area Selective Carbon-Based Film Deposition
- Publication number 20230335391
- Publication date Oct 19, 2023
- Applied Materials, Inc.
- Xinke Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING SACRIFICIAL COATINGS ON AEROSPACE COMPONENTS
- Publication number 20230313380
- Publication date Oct 5, 2023
- Applied Materials, Inc.
- Sukti CHATTERJEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Metal Surface Blocking Molecules for Selective Deposition
- Publication number 20230317516
- Publication date Oct 5, 2023
- Applied Materials, Inc.
- Muthukumar Kaliappan
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Methods for depositing blocking layers on metal surfaces

Low temperature growth of transition metal chalcogenides

Selective blocking of metal surfaces using bifunctional self-assemb...

Rhenium complexes and methods of use

Vapor phase photoresists deposition

Vapor phase thermal etch solutions for metal oxo photoresists

Molybdenum (0) precursors for deposition of molybdenum films

Preclean and encapsulation of microLED features

Reducing agents for atomic layer deposition

Vapor phase thermal etch solutions for metal oxo photoresists

Gap-fill with aluminum-containing films

Metal-doped carbon hardmasks

Methods and apparatus for deposition of low-k films

Area selective carbon-based film deposition

Deposition of low-k films

Methods for selective dry etching gallium oxide

Corrosion resistant film on a chamber component and methods of depo...

Silyl pseudohalides for silicon containing films

Molybdenum thin films by oxidation-reduction

Deposition of semiconductor integration films

Homoleptic lanthanide deposition precursors

Molecular layer deposition of amorphous carbon films

Selective blocking of metal surfaces using bifunctional self-assemb...

Methods of selective atomic layer deposition

Methods of depositing SiCON with C, O, and N compositional control

Molybdenum(0) precursors for deposition of molybdenum films

Multilayer encapsulation stacks by atomic layer deposition

Methods for depositing blocking layers on conductive surfaces

Methods for depositing sacrificial coatings on aerospace components

Method for forming silicon-phosphorous materials

Patents Applicationslast 30 patents

LOW-TEMPERATURE DEPOSITION PROCESSES TO FORM MOLYBDENUM-BASED MATER...

METHODS OF FORMING INTERCONNECT STRUCTURES

Molybdenum (0) Precursors For Deposition Of Molybdenum Films

METHOD OF FORMING A METAL LINER FOR INTERCONNECT STRUCTURES

DOPING BY MOLECULAR LAYER DEPOSITION

ATOMIC LAYER DEPOSITION OF SILICON-CARBON-AND-NITROGEN-CONTAINING M...

PRECLEAN AND ENCAPSULATION OF MICROLED FEATURES

METAL ORGANONITRILE PRECURSORS FOR THIN FILM DEPOSITION

METHODS OF FORMING INTERCONNECT STRUCTURES

ELECTRONIC DEVICE FABRICATION USING AREA-SELECTIVE DEPOSITION

MULTIPLE-METAL-CONTAINING METAL-OXO PHOTORESIST FILMS BY CVD AND AL...

ENHANCED ETCH SELECTIVITY USING HALIDES

EXTREME ULTRAVIOLET PELLICLES AND METHOD OF MANUFACTURING

AREA SELECTIVE CARBON-BASED FILM DEPOSITION

Method to Deposit Metal Cap for Interconnect

INTEGRATED SOLUTION WITH LOW TEMPERATURE DRY DEVELOP FOR EUV PHOTOR...

BENZYL COMPOUND PASSIVATION FOR SELECTIVE DEPOSITION AND SELECTIVE...

DRY ETCHING WITH ETCH BYPRODUCT SELF-CLEANING

METHODS OF SELECTIVE ATOMIC LAYER DEPOSITION

Methods of Depositing SiCON with C, O, and N Compositional Control

METHOD TO REDUCE LINE EDGE ROUGHNESS FOR EUV PHOTORESIST PATTERN

CORROSION RESISTANT FILM ON A CHAMBER COMPONENT AND METHODS OF DEPO...

SELECTIVE ETCH OF A SUBSTRATE

METHOD OF FORMING CARBON-BASED SPACER FOR EUV PHOTORESIST PATTERNS

MOLYBDENUM(0) PRECURSORS FOR DEPOSITION OF MOLYBDENUM FILMS

DEPOSITION OF SEMICONDUCTOR INTEGRATION FILMS

SELECTIVE METAL REMOVAL WITH FLOWABLE POLYMER

Area Selective Carbon-Based Film Deposition

METHODS FOR DEPOSITING SACRIFICIAL COATINGS ON AEROSPACE COMPONENTS

Metal Surface Blocking Molecules for Selective Deposition