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Mark Schattenburg
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Wayland, MA, US
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last 30 patents
Information
Patent Grant
Hybrid transmission-reflection grating
Patent number
7,492,989
Issue date
Feb 17, 2009
Massachusetts Institute of Technology
Ralf Heilmann
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Method and system for interference lithography utilizing phase-lock...
Patent number
6,882,477
Issue date
Apr 19, 2005
Massachusetts Institute of Technology
Mark Schattenburg
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Spatial phase locking with shaped electron beam lithography
Patent number
6,822,248
Issue date
Nov 23, 2004
International Business Machines Corporation
Juan Ferrera
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
X-ray lithography masking
Patent number
5,809,103
Issue date
Sep 15, 1998
Massachusetts Institute of Technology
Henry I. Smith
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Holographic lithography
Patent number
5,142,385
Issue date
Aug 25, 1992
Massachusetts Institute of Technology
Erik H. Anderson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Energy beam locating
Patent number
5,136,169
Issue date
Aug 4, 1992
Massachusetts Institute of Technology
Henry I. Smith
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Lithography mask with a .pi.-phase shifting attenuator
Patent number
4,890,309
Issue date
Dec 26, 1989
Massachusetts Institute of Technology
Henry I. Smith
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Spatial phase locking with shaped electron beam lithography
Publication number
20020130274
Publication date
Sep 19, 2002
International Busines Machines Corporation
Juan Ferrera
B82 - NANO-TECHNOLOGY