-
Micromechanical component
-
Patent number 5,939,171
-
Issue date Aug 17, 1999
-
Siemens Aktiengesellschaft
-
Markus Biebl
-
B81 - MICRO-STRUCTURAL TECHNOLOGY
-
Tunnel effect sensor
-
Patent number 5,911,157
-
Issue date Jun 8, 1999
-
Siemens Aktiengesellschaft
-
Markus Biebl
-
G01 - MEASURING TESTING
-
Acceleration sensor
-
Patent number 5,877,421
-
Issue date Mar 2, 1999
-
Siemens Aktiengesellschaft
-
Markus Biebl
-
G01 - MEASURING TESTING
-
-
-
-
-
-
-
Pressure sensor
-
Patent number 5,450,754
-
Issue date Sep 19, 1995
-
Siemens Aktiengesellschaft
-
Markus Biebl
-
G01 - MEASURING TESTING
-
-
-