Markus Goeppert

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for determining an optical property of an optical imaging...
- Patent number 10,006,807
- Issue date Jun 26, 2018
- Carl Zeiss SMT GmbH
- Albrecht Ehrmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measuring system
- Patent number 9,482,968
- Issue date Nov 1, 2016
- Carl Zeiss SMT GmbH
- Markus Goeppert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for qualifying optics of a projection exposure...
- Patent number 8,908,192
- Issue date Dec 9, 2014
- Carl Zeiss SMT GmbH
- Markus Goeppert
- G01 - MEASURING TESTING
Information Patent Grant
Device and method for the optical measurement of an optical system...
- Patent number 8,836,929
- Issue date Sep 16, 2014
- Carl Zeiss SMT GmbH
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device and method for the optical measurement of an optical system...
- Patent number 8,120,763
- Issue date Feb 21, 2012
- Carl Zeiss SMT GmbH
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for determining at least one optical property...
- Patent number 7,760,345
- Issue date Jul 20, 2010
- Carl Zeiss SMT AG
- Matthias Manger
- G01 - MEASURING TESTING
Information Patent Grant
Device and method for wavefront measurement of an optical imaging s...
- Patent number 7,417,745
- Issue date Aug 26, 2008
- Carl Zeiss SMT AG
- Helmut Haidner
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for measuring the wavefront of an optical system
- Patent number 7,336,371
- Issue date Feb 26, 2008
- Carl Zeiss SMT AG
- Helmut Haidner
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR DETERMINING AN OPTICAL PROPERTY OF AN OPTICAL IMAGING...
- Publication number 20160202118
- Publication date Jul 14, 2016
- Carl Zeiss SMT GMBH
- Albrecht EHRMANN
- G01 - MEASURING TESTING
Information Patent Application
MEASURING SYSTEM
- Publication number 20140118712
- Publication date May 1, 2014
- Carl Zeiss SMT GMBH
- Markus GOEPPERT
- G01 - MEASURING TESTING
Information Patent Application
DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...
- Publication number 20140022524
- Publication date Jan 23, 2014
- Carl Zeiss SMT GMBH
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR QUALIFYING OPTICS OF A PROJECTION EXPOSURE...
- Publication number 20130148105
- Publication date Jun 13, 2013
- Carl Zeiss SMT GMBH
- Markus GOEPPERT
- G01 - MEASURING TESTING
Information Patent Application
DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...
- Publication number 20120113429
- Publication date May 10, 2012
- Carl Zeiss SMT GMBH
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...
- Publication number 20090257049
- Publication date Oct 15, 2009
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...
- Publication number 20090021726
- Publication date Jan 22, 2009
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR DETERMINING AT LEAST ONE OPTICAL PROPERTY...
- Publication number 20080204729
- Publication date Aug 28, 2008
- Carl Zeiss SMT AG
- Matthias Manger
- G01 - MEASURING TESTING
Information Patent Application
Device and method for wavefront measurement of an optical imaging s...
- Publication number 20050007602
- Publication date Jan 13, 2005
- Carl Zeiss SMT AG
- Helmut Haidner
- G01 - MEASURING TESTING

Markus Goeppert

Person

Patents Grantslast 30 patents

Apparatus for determining an optical property of an optical imaging...

Measuring system

Method and apparatus for qualifying optics of a projection exposure...

Device and method for the optical measurement of an optical system...

Device and method for the optical measurement of an optical system...

Method and apparatus for determining at least one optical property...

Device and method for wavefront measurement of an optical imaging s...

Apparatus and method for measuring the wavefront of an optical system

Patents Applicationslast 30 patents

APPARATUS FOR DETERMINING AN OPTICAL PROPERTY OF AN OPTICAL IMAGING...

MEASURING SYSTEM

DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...

METHOD AND APPARATUS FOR QUALIFYING OPTICS OF A PROJECTION EXPOSURE...

DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...

DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...

DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...

METHOD AND APPARATUS FOR DETERMINING AT LEAST ONE OPTICAL PROPERTY...

Device and method for wavefront measurement of an optical imaging s...