Markus Hauf

Person

Ichenhausen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method and device for determining the heating state of an optical e...
- Patent number 11,320,314
- Issue date May 3, 2022
- Carl Zeiss SMT GmbH
- Toralf Gruner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for determining properties of an EUV source
- Patent number 11,187,989
- Issue date Nov 30, 2021
- Carl Zeiss SMT GmbH
- Timo Laufer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device for swiveling a mirror element with two degrees of swiveling...
- Patent number 10,761,317
- Issue date Sep 1, 2020
- Carl Zeiss SMT GmbH
- Markus Hauf
- G01 - MEASURING TESTING
Information Patent Grant
EUV exposure apparatus with reflective elements having reduced infl...
- Patent number 10,684,551
- Issue date Jun 16, 2020
- Carl Zeiss SMT GmbH
- Norman Baer
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Sensor device
- Patent number 10,514,276
- Issue date Dec 24, 2019
- Carl Zeiss SMT GmbH
- Ralf Ameling
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device for transmitting electrical signals, and lithography apparatus
- Patent number 10,459,351
- Issue date Oct 29, 2019
- Carl Zeiss SMT GmbH
- Jan Horn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for illuminating an object field of a projection exposure sy...
- Patent number 10,409,167
- Issue date Sep 10, 2019
- Carl Zeiss SMT GmbH
- Martin Endres
- G02 - OPTICS
Information Patent Grant
EUV exposure apparatus with reflective elements having reduced infl...
- Patent number 10,317,802
- Issue date Jun 11, 2019
- Carl Zeiss SMT GmbH
- Norman Baer
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Arrangement for actuating at least one optical element in an optica...
- Patent number 10,303,065
- Issue date May 28, 2019
- Carl Zeiss SMT GmbH
- Markus Hauf
- G02 - OPTICS
Information Patent Grant
Projection exposure apparatus including mechanism to reduce influen...
- Patent number 10,162,267
- Issue date Dec 25, 2018
- Carl Zeiss SMT GmbH
- Toralf Gruner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Arrangement for manipulating the position of an element
- Patent number 10,108,097
- Issue date Oct 23, 2018
- Carl Zeiss SMT GmbH
- Ulrich Schoenhoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mirror device
- Patent number 10,101,507
- Issue date Oct 16, 2018
- Carl Zeiss SMT GmbH
- Yanko Sarov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
EUV exposure apparatus with reflective elements having reduced infl...
- Patent number 10,031,423
- Issue date Jul 24, 2018
- Carl Zeiss SMT GmbH
- Norman Baer
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Lithography device with eddy-current brake
- Patent number 9,887,613
- Issue date Feb 6, 2018
- Carl Zeiss SMT GmbH
- Alexander Vogler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mirror array
- Patent number 9,874,819
- Issue date Jan 23, 2018
- Carl Zeiss SMT GmbH
- Stig Bieling
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Support apparatus for an optical device, optical device and lithogr...
- Patent number 9,846,370
- Issue date Dec 19, 2017
- Carl Zeiss SMT GmbH
- Henner Baitinger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Arrangement for the thermal actuation of a mirror, in particular in...
- Patent number 9,798,254
- Issue date Oct 24, 2017
- Carl Zeiss SMT GmbH
- Markus Hauf
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
EUV exposure apparatus with reflective elements having reduced infl...
- Patent number 9,746,778
- Issue date Aug 29, 2017
- Carl Zeiss SMT GmbH
- Norman Baer
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Arrangement for actuating at least one optical element in an optica...
- Patent number 9,665,011
- Issue date May 30, 2017
- Carl Zeiss SMT GmbH
- Markus Hauf
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Arrangement for the actuation of at least one element in an optical...
- Patent number 9,651,772
- Issue date May 16, 2017
- Carl Zeiss SMT GmbH
- Markus Hauf
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Damping arrangement for dissipating oscillating energy of an elemen...
- Patent number 9,593,733
- Issue date Mar 14, 2017
- Carl Zeiss SMT GmbH
- Markus Hauf
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Model-based control of an optical imaging device
- Patent number 9,581,912
- Issue date Feb 28, 2017
- Carl Zeiss SMT GmbH
- Markus Hauf
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
EUV lithography system
- Patent number 9,448,490
- Issue date Sep 20, 2016
- Carl Zeiss SMT GmbH
- Udo Dinger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device for controlling temperature of an optical element
- Patent number 9,442,397
- Issue date Sep 13, 2016
- Carl Zeiss SMT GmbH
- Markus Hauf
- G05 - CONTROLLING REGULATING
Information Patent Grant
EUV exposure apparatus with reflective elements having reduced infl...
- Patent number 9,316,929
- Issue date Apr 19, 2016
- Carl Zeiss SMT GmbH
- Norman Baer
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Multi facet mirror of a microlithographic projection exposure appar...
- Patent number 9,298,101
- Issue date Mar 29, 2016
- Carl Zeiss SMT GmbH
- Thorsten Rassel
- G02 - OPTICS
Information Patent Grant
Arrangement for mirror temperature measurement and/or thermal actua...
- Patent number 9,207,541
- Issue date Dec 8, 2015
- Carl Zeiss SMT GmbH
- Markus Hauf
- G01 - MEASURING TESTING
Information Patent Grant
Device for controlling temperature of an optical element
- Patent number 9,195,151
- Issue date Nov 24, 2015
- Carl Zeiss SMT GmbH
- Markus Hauf
- G05 - CONTROLLING REGULATING
Information Patent Grant
Support structure and related assemblies and methods
- Patent number 9,146,002
- Issue date Sep 29, 2015
- Carl Zeiss SMT GmbH
- Markus Hauf
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Optical module for guiding a radiation beam
- Patent number 9,116,440
- Issue date Aug 25, 2015
- Carl Zeiss SMT GmbH
- Markus Hauf
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
TEMPERATURE-INSENSITIVE ACTUATOR AND DEFORMATION MIRROR
- Publication number 20250044711
- Publication date Feb 6, 2025
- Carl Zeiss SMT GMBH
- Andreas Raba
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ARRANGEMENT, METHOD AND COMPUTER PROGRAM PRODUCT FOR CALIBRATING FA...
- Publication number 20250028250
- Publication date Jan 23, 2025
- Carl Zeiss SMT GMBH
- Florian Baumer
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND DEVICE FOR DETERMINING THE HEATING STATE OF AN OPTICAL E...
- Publication number 20210148762
- Publication date May 20, 2021
- Carl Zeiss SMT GMBH
- Toralf Gruner
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR DETERMINING PROPERTIES OF AN EUV SOURCE
- Publication number 20200218159
- Publication date Jul 9, 2020
- Carl Zeiss SMT GMBH
- Timo Laufer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EUV EXPOSURE APPARATUS WITH REFLECTIVE ELEMENTS HAVING REDUCED INFL...
- Publication number 20190310555
- Publication date Oct 10, 2019
- Carl Zeiss SMT GMBH
- Norman Baer
- G02 - OPTICS
Information Patent Application
SENSOR DEVICE
- Publication number 20190195659
- Publication date Jun 27, 2019
- Carl Zeiss SMT GMBH
- Ralf Ameling
- G02 - OPTICS
Information Patent Application
DEVICE FOR TRANSMITTING ELECTRICAL SIGNALS, AND LITHOGRAPHY APPARATUS
- Publication number 20190196343
- Publication date Jun 27, 2019
- Carl Zeiss SMT GMBH
- Jan Horn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EUV EXPOSURE APPARATUS WITH REFLECTIVE ELEMENTS HAVING REDUCED INFL...
- Publication number 20180299784
- Publication date Oct 18, 2018
- Carl Zeiss SMT GMBH
- Norman Baer
- B82 - NANO-TECHNOLOGY
Information Patent Application
DEVICE FOR SWIVELING A MIRROR ELEMENT WITH TWO DEGREES OF SWIVELING...
- Publication number 20170363861
- Publication date Dec 21, 2017
- Carl Zeiss SMT GMBH
- Markus Hauf
- G02 - OPTICS
Information Patent Application
ARRANGEMENT FOR MANIPULATING THE POSITION OF AN ELEMENT
- Publication number 20170329238
- Publication date Nov 16, 2017
- Carl Zeiss SMT GMBH
- Ulrich Schoenhoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EUV EXPOSURE APPARATUS WITH REFLECTIVE ELEMENTS HAVING REDUCED INFL...
- Publication number 20170315449
- Publication date Nov 2, 2017
- Carl Zeiss SMT GMBH
- Norman Baer
- B82 - NANO-TECHNOLOGY
Information Patent Application
MIRROR DEVICE
- Publication number 20170276842
- Publication date Sep 28, 2017
- Carl Zeiss SMT GMBH
- Yanko Sarov
- G02 - OPTICS
Information Patent Application
ARRANGEMENT FOR ACTUATING AT LEAST ONE OPTICAL ELEMENT IN AN OPTICA...
- Publication number 20170261859
- Publication date Sep 14, 2017
- Carl Zeiss SMT GMBH
- Markus Hauf
- G02 - OPTICS
Information Patent Application
METHOD FOR ILLUMINATING AN OBJECT FIELD OF A PROJECTION EXPOSURE SY...
- Publication number 20160342094
- Publication date Nov 24, 2016
- Carl Zeiss SMT GMBH
- Martin Endres
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MIRROR ARRAY
- Publication number 20160342095
- Publication date Nov 24, 2016
- Carl Zeiss SMT GMBH
- Stig Bieling
- G02 - OPTICS
Information Patent Application
SUPPORT APPARATUS FOR AN OPTICAL DEVICE, OPTICAL DEVICE AND LITHOGR...
- Publication number 20160259249
- Publication date Sep 8, 2016
- Carl Zeiss SMT GMBH
- Henner Baitinger
- G02 - OPTICS
Information Patent Application
EUV EXPOSURE APPARATUS WITH REFLECTIVE ELEMENTS HAVING REDUCED INFL...
- Publication number 20160195818
- Publication date Jul 7, 2016
- Carl Zeiss SMT GMBH
- Norman Baer
- G02 - OPTICS
Information Patent Application
DEVICE FOR CONTROLLING TEMPERATURE OF AN OPTICAL ELEMENT
- Publication number 20160048088
- Publication date Feb 18, 2016
- Carl Zeiss SMT GMBH
- Markus Hauf
- G02 - OPTICS
Information Patent Application
ARRANGEMENT FOR THE THERMAL ACTUATION OF A MIRROR, IN PARTICULAR IN...
- Publication number 20160041480
- Publication date Feb 11, 2016
- Carl Zeiss SMT GMBH
- Markus Hauf
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MODEL-BASED CONTROL OF AN OPTICAL IMAGING DEVICE
- Publication number 20160026093
- Publication date Jan 28, 2016
- Carl Zeiss SMT GMBH
- Markus Hauf
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION EXPOSURE APPARATUS INCLUDING MECHANISM TO REDUCE INFLUEN...
- Publication number 20150316854
- Publication date Nov 5, 2015
- Carl Zeiss SMT GMBH
- Toralf Gruner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ARRANGEMENT FOR THE ACTUATION OF AT LEAST ONE ELEMENT IN AN OPTICAL...
- Publication number 20150309305
- Publication date Oct 29, 2015
- Carl Zeiss SMT GMBH
- Markus Hauf
- G02 - OPTICS
Information Patent Application
MULTI FACET MIRROR OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPAR...
- Publication number 20150227053
- Publication date Aug 13, 2015
- Carl Zeiss SMT GMBH
- Thorsten Rassel
- G02 - OPTICS
Information Patent Application
ARRANGEMENT FOR ACTUATING AT LEAST ONE OPTICAL ELEMENT IN AN OPTICA...
- Publication number 20150198892
- Publication date Jul 16, 2015
- Carl Zeiss SMT GMBH
- Markus Hauf
- G02 - OPTICS
Information Patent Application
DEVICE FOR CONTROLLING TEMPERATURE OF AN OPTICAL ELEMENT
- Publication number 20150098068
- Publication date Apr 9, 2015
- Carl Zeiss SMT GMBH
- Markus Hauf
- G02 - OPTICS
Information Patent Application
LITHOGRAPHY DEVICE WITH EDDY-CURRENT BRAKE
- Publication number 20140346909
- Publication date Nov 27, 2014
- Alexander Vogler
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
SUPPORT STRUCTURE AND RELATED ASSEMBLIES AND METHODS
- Publication number 20140217257
- Publication date Aug 7, 2014
- Carl Zeiss SMT GMBH
- Markus Hauf
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
OPTICAL MODULE FOR GUIDING A RADIATION BEAM
- Publication number 20140211187
- Publication date Jul 31, 2014
- Carl Zeiss SMT GMBH
- Markus Hauf
- G02 - OPTICS
Information Patent Application
DAMPING ARRANGEMENT FOR DISSIPATING OSCILLATING ENERGY OF AN ELEMEN...
- Publication number 20140202812
- Publication date Jul 24, 2014
- Markus Hauf
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE FOR CONTROLLING TEMPERATURE OF AN OPTICAL ELEMENT
- Publication number 20140098352
- Publication date Apr 10, 2014
- Carl Zeiss SMT GMBH
- Markus Hauf
- G02 - OPTICS

Markus Hauf

Person

Patents Grantslast 30 patents

Method and device for determining the heating state of an optical e...

Method for determining properties of an EUV source

Device for swiveling a mirror element with two degrees of swiveling...

EUV exposure apparatus with reflective elements having reduced infl...

Sensor device

Device for transmitting electrical signals, and lithography apparatus

Method for illuminating an object field of a projection exposure sy...

EUV exposure apparatus with reflective elements having reduced infl...

Arrangement for actuating at least one optical element in an optica...

Projection exposure apparatus including mechanism to reduce influen...

Arrangement for manipulating the position of an element

Mirror device

EUV exposure apparatus with reflective elements having reduced infl...

Lithography device with eddy-current brake

Mirror array

Support apparatus for an optical device, optical device and lithogr...

Arrangement for the thermal actuation of a mirror, in particular in...

EUV exposure apparatus with reflective elements having reduced infl...

Arrangement for actuating at least one optical element in an optica...

Arrangement for the actuation of at least one element in an optical...

Damping arrangement for dissipating oscillating energy of an elemen...

Model-based control of an optical imaging device

EUV lithography system

Device for controlling temperature of an optical element

EUV exposure apparatus with reflective elements having reduced infl...

Multi facet mirror of a microlithographic projection exposure appar...

Arrangement for mirror temperature measurement and/or thermal actua...

Device for controlling temperature of an optical element

Support structure and related assemblies and methods

Optical module for guiding a radiation beam

Patents Applicationslast 30 patents

TEMPERATURE-INSENSITIVE ACTUATOR AND DEFORMATION MIRROR

ARRANGEMENT, METHOD AND COMPUTER PROGRAM PRODUCT FOR CALIBRATING FA...

METHOD AND DEVICE FOR DETERMINING THE HEATING STATE OF AN OPTICAL E...

METHOD FOR DETERMINING PROPERTIES OF AN EUV SOURCE

EUV EXPOSURE APPARATUS WITH REFLECTIVE ELEMENTS HAVING REDUCED INFL...

SENSOR DEVICE

DEVICE FOR TRANSMITTING ELECTRICAL SIGNALS, AND LITHOGRAPHY APPARATUS

EUV EXPOSURE APPARATUS WITH REFLECTIVE ELEMENTS HAVING REDUCED INFL...

DEVICE FOR SWIVELING A MIRROR ELEMENT WITH TWO DEGREES OF SWIVELING...

ARRANGEMENT FOR MANIPULATING THE POSITION OF AN ELEMENT

EUV EXPOSURE APPARATUS WITH REFLECTIVE ELEMENTS HAVING REDUCED INFL...

MIRROR DEVICE

ARRANGEMENT FOR ACTUATING AT LEAST ONE OPTICAL ELEMENT IN AN OPTICA...

METHOD FOR ILLUMINATING AN OBJECT FIELD OF A PROJECTION EXPOSURE SY...

MIRROR ARRAY

SUPPORT APPARATUS FOR AN OPTICAL DEVICE, OPTICAL DEVICE AND LITHOGR...

EUV EXPOSURE APPARATUS WITH REFLECTIVE ELEMENTS HAVING REDUCED INFL...

DEVICE FOR CONTROLLING TEMPERATURE OF AN OPTICAL ELEMENT

ARRANGEMENT FOR THE THERMAL ACTUATION OF A MIRROR, IN PARTICULAR IN...

MODEL-BASED CONTROL OF AN OPTICAL IMAGING DEVICE

PROJECTION EXPOSURE APPARATUS INCLUDING MECHANISM TO REDUCE INFLUEN...

ARRANGEMENT FOR THE ACTUATION OF AT LEAST ONE ELEMENT IN AN OPTICAL...

MULTI FACET MIRROR OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPAR...

ARRANGEMENT FOR ACTUATING AT LEAST ONE OPTICAL ELEMENT IN AN OPTICA...

DEVICE FOR CONTROLLING TEMPERATURE OF AN OPTICAL ELEMENT

LITHOGRAPHY DEVICE WITH EDDY-CURRENT BRAKE

SUPPORT STRUCTURE AND RELATED ASSEMBLIES AND METHODS

OPTICAL MODULE FOR GUIDING A RADIATION BEAM

DAMPING ARRANGEMENT FOR DISSIPATING OSCILLATING ENERGY OF AN ELEMEN...

DEVICE FOR CONTROLLING TEMPERATURE OF AN OPTICAL ELEMENT