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Markus Lieberer
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Augsburg, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Transmission-based temperature measurement of a workpiece in a ther...
Patent number
11,955,388
Issue date
Apr 9, 2024
Beijing E-Town Semiconductor Technology Co., Ltd.
Michael Storek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Control system for adaptive control of a thermal processing system
Patent number
11,644,817
Issue date
May 9, 2023
Beijing E-Town Semiconductor Technology Co., Ltd.
Michael X. Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Transmission-based temperature measurement of a workpiece in a ther...
Patent number
11,610,824
Issue date
Mar 21, 2023
Beijing E-Town Semiconductor Technology Co., Ltd.
Michael Storek
G01 - MEASURING TESTING
Information
Patent Grant
Preheat processes for millisecond anneal system
Patent number
10,727,140
Issue date
Jul 28, 2020
Mattson Technology, Inc.
Markus Lieberer
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Control System For Adaptive Control Of A Thermal Processing System
Publication number
20230273596
Publication date
Aug 31, 2023
Beijing E-Town Semiconductor Technology Co., Ltd.
Michael X. Yang
G05 - CONTROLLING REGULATING
Information
Patent Application
Transmission-Based Temperature Measurement of a Workpiece in a Ther...
Publication number
20230230887
Publication date
Jul 20, 2023
Beijing E-Town Semiconductor Technology Co., Ltd.
Michael Storek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Transmission-Based Temperature Measurement of a Workpiece in a Ther...
Publication number
20210272858
Publication date
Sep 2, 2021
Mattson Technology, Inc.
Michael Storek
G01 - MEASURING TESTING
Information
Patent Application
Control System For Adaptive Control Of A Thermal Processing System
Publication number
20210132592
Publication date
May 6, 2021
Mattson Technology, Inc.
Michael X. Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Preheat Processes for Millisecond Anneal System
Publication number
20200350217
Publication date
Nov 5, 2020
Mattson Technology, Inc.
Markus Lieberer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Systems And Methods For Thermal Processing And Temperature Measurem...
Publication number
20200064198
Publication date
Feb 27, 2020
Mattson Technology, Inc.
Rolf Bremensdorfer
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Electrode Tip for ARC Lamp
Publication number
20170194133
Publication date
Jul 6, 2017
Mattson Technology, Inc.
Markus Lieberer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Preheat Processes for Millisecond Anneal System
Publication number
20170194220
Publication date
Jul 6, 2017
Mattson Technology, Inc.
Markus Lieberer
H01 - BASIC ELECTRIC ELEMENTS