Markus Lieberer

Person

Augsburg, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Control system for adaptive control of a thermal processing system
- Patent number 12,174,616
- Issue date Dec 24, 2024
- Beijing E-Town Semiconductor Technology Co. Ltd.
- Michael X. Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Preheat processes for millisecond anneal system
- Patent number 12,027,427
- Issue date Jul 2, 2024
- Mattson Technology, Inc.
- Markus Lieberer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transmission-based temperature measurement of a workpiece in a ther...
- Patent number 11,955,388
- Issue date Apr 9, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Michael Storek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control system for adaptive control of a thermal processing system
- Patent number 11,644,817
- Issue date May 9, 2023
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Michael X. Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transmission-based temperature measurement of a workpiece in a ther...
- Patent number 11,610,824
- Issue date Mar 21, 2023
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Michael Storek
- G01 - MEASURING TESTING
Information Patent Grant
Preheat processes for millisecond anneal system
- Patent number 10,727,140
- Issue date Jul 28, 2020
- Mattson Technology, Inc.
- Markus Lieberer
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
THERMAL PROCESSING SYSTEM FOR PROCESSING WORKPIECES
- Publication number 20250216154
- Publication date Jul 3, 2025
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Dieter Hezler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Control System For Adaptive Control Of A Thermal Processing System
- Publication number 20250093852
- Publication date Mar 20, 2025
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Michael X. Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Preheat Processes for Millisecond Anneal System
- Publication number 20240304502
- Publication date Sep 12, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Markus Lieberer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transmission-Based Temperature Measurement of a Workpiece in a Ther...
- Publication number 20240290664
- Publication date Aug 29, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Michael Storek
- G01 - MEASURING TESTING
Information Patent Application
Control System For Adaptive Control Of A Thermal Processing System
- Publication number 20230273596
- Publication date Aug 31, 2023
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Michael X. Yang
- G05 - CONTROLLING REGULATING
Information Patent Application
Transmission-Based Temperature Measurement of a Workpiece in a Ther...
- Publication number 20230230887
- Publication date Jul 20, 2023
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Michael Storek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transmission-Based Temperature Measurement of a Workpiece in a Ther...
- Publication number 20210272858
- Publication date Sep 2, 2021
- Mattson Technology, Inc.
- Michael Storek
- G01 - MEASURING TESTING
Information Patent Application
Control System For Adaptive Control Of A Thermal Processing System
- Publication number 20210132592
- Publication date May 6, 2021
- Mattson Technology, Inc.
- Michael X. Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Preheat Processes for Millisecond Anneal System
- Publication number 20200350217
- Publication date Nov 5, 2020
- Mattson Technology, Inc.
- Markus Lieberer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems And Methods For Thermal Processing And Temperature Measurem...
- Publication number 20200064198
- Publication date Feb 27, 2020
- Mattson Technology, Inc.
- Rolf Bremensdorfer
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Electrode Tip for ARC Lamp
- Publication number 20170194133
- Publication date Jul 6, 2017
- Mattson Technology, Inc.
- Markus Lieberer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Preheat Processes for Millisecond Anneal System
- Publication number 20170194220
- Publication date Jul 6, 2017
- Mattson Technology, Inc.
- Markus Lieberer
- H01 - BASIC ELECTRIC ELEMENTS

Markus Lieberer

Person

Patents Grantslast 30 patents

Control system for adaptive control of a thermal processing system

Preheat processes for millisecond anneal system

Transmission-based temperature measurement of a workpiece in a ther...

Control system for adaptive control of a thermal processing system

Transmission-based temperature measurement of a workpiece in a ther...

Preheat processes for millisecond anneal system

Patents Applicationslast 30 patents

THERMAL PROCESSING SYSTEM FOR PROCESSING WORKPIECES

Control System For Adaptive Control Of A Thermal Processing System

Preheat Processes for Millisecond Anneal System

Transmission-Based Temperature Measurement of a Workpiece in a Ther...

Control System For Adaptive Control Of A Thermal Processing System

Transmission-Based Temperature Measurement of a Workpiece in a Ther...

Transmission-Based Temperature Measurement of a Workpiece in a Ther...

Control System For Adaptive Control Of A Thermal Processing System

Preheat Processes for Millisecond Anneal System

Systems And Methods For Thermal Processing And Temperature Measurem...

Electrode Tip for ARC Lamp

Preheat Processes for Millisecond Anneal System