Markus Mengel

Person

Heidenheim, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for compensating at least one defect of an opt...
- Patent number 9,798,249
- Issue date Oct 24, 2017
- Carl Zeiss SMT GmbH
- Vladimir Dmitriev
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System for measuring the image quality of an optical imaging system
- Patent number 9,429,495
- Issue date Aug 30, 2016
- Carl Zeiss SMT GmbH
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Grant
Arrangement for and method of characterising the polarization prope...
- Patent number 9,274,440
- Issue date Mar 1, 2016
- Carl Zeiss SMT GmbH
- Uwe Hempelmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Controllable transmission and phase compensation of transparent mat...
- Patent number 9,034,539
- Issue date May 19, 2015
- Carl Zeiss SMS GmbH
- Sergey Oshemkov
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
System for measuring the image quality of an optical imaging system
- Patent number 8,823,948
- Issue date Sep 2, 2014
- Carl Zeiss SMT GmbH
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for modifying a substrate surface of a photoli...
- Patent number 8,735,030
- Issue date May 27, 2014
- Carl Zeiss SMT GmbH
- Sergey Oshemkov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Microlithographic projection exposure apparatus
- Patent number 8,675,178
- Issue date Mar 18, 2014
- Carl Zeiss SMT GmbH
- Markus Mengel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System for measuring the image quality of an optical imaging system
- Patent number 8,488,127
- Issue date Jul 16, 2013
- Carl Zeiss SMT GmbH
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Grant
Method for approximating an influence of an optical system on the s...
- Patent number 7,924,436
- Issue date Apr 12, 2011
- Carl Zeiss SMT GmbH
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Grant
System for measuring the image quality of an optical imaging system
- Patent number 7,796,274
- Issue date Sep 14, 2010
- Carl Zeiss SMT AG
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Grant
System for measuring the image quality of an optical imaging system
- Patent number 7,760,366
- Issue date Jul 20, 2010
- Carl Zeiss SMT AG
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Grant
Method for improving the imaging properties of a projection objecti...
- Patent number 7,456,933
- Issue date Nov 25, 2008
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for spatially resolved polarimetry
- Patent number 7,289,223
- Issue date Oct 30, 2007
- Carl Zeiss SMT AG
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for determining the influencing of the state o...
- Patent number 7,286,245
- Issue date Oct 23, 2007
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for polarization-specific examination, optical imaging sy...
- Patent number 7,277,182
- Issue date Oct 2, 2007
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR COMPENSATING AT LEAST ONE DEFECT OF AN OPT...
- Publication number 20140347646
- Publication date Nov 27, 2014
- Vladimir Dmitriev
- G02 - OPTICS
Information Patent Application
SYSTEM FOR MEASURING THE IMAGE QUALITY OF AN OPTICAL IMAGING SYSTEM
- Publication number 20140347654
- Publication date Nov 27, 2014
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM FOR MEASURING THE IMAGE QUALITY OF AN OPTICAL IMAGING SYSTEM
- Publication number 20130293869
- Publication date Nov 7, 2013
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Application
CONTROLLABLE TRANSMISSION AND PHASE COMPENSATION OF TRANSPARENT MAT...
- Publication number 20130209926
- Publication date Aug 15, 2013
- Sergey Oshemkov
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
ARRANGEMENT FOR AND METHOD OF CHARACTERISING THE POLARISATION PROPE...
- Publication number 20130021592
- Publication date Jan 24, 2013
- Carl Zeiss SMT GMBH
- Uwe HEMPELMANN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR MODIFYING A SUBSTRATE SURFACE OF A PHOTOLI...
- Publication number 20110255065
- Publication date Oct 20, 2011
- Sergey Oshemkov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATU...
- Publication number 20110063597
- Publication date Mar 17, 2011
- Carl Zeiss SMT AG
- Markus Mengel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM FOR MEASURING THE IMAGE QUALITY OF AN OPTICAL IMAGING SYSTEM
- Publication number 20100315651
- Publication date Dec 16, 2010
- Carl Zeiss SMT AG
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Application
MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
- Publication number 20090040498
- Publication date Feb 12, 2009
- Carl Zeiss SMT AG
- Markus Mengel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS FOR POLARIZATION-SPECIFIC EXAMINATION, OPTICAL IMAGING SY...
- Publication number 20080252888
- Publication date Oct 16, 2008
- Carl Zeiss SMT AG
- Ulrich WEGMANN
- G02 - OPTICS
Information Patent Application
System for Measuring the Image Quality of an Optical Imaging System
- Publication number 20080252876
- Publication date Oct 16, 2008
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM FOR MEASURING THE IMAGE QUALITY OF AN OPTICAL IMAGING SYSTEM
- Publication number 20080180688
- Publication date Jul 31, 2008
- Carl Zeiss SMT AG
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR DETERMINING THE INFLUENCING OF THE STATE O...
- Publication number 20080037905
- Publication date Feb 14, 2008
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G02 - OPTICS
Information Patent Application
Method for approximating an influence of an optical system on the s...
- Publication number 20070182969
- Publication date Aug 9, 2007
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Application
Device for polarization-specific examination, an optical imaging sy...
- Publication number 20050146789
- Publication date Jul 7, 2005
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G02 - OPTICS
Information Patent Application
Method and apparatus for spatially resolved polarimetry
- Publication number 20040262500
- Publication date Dec 30, 2004
- Carl Zeiss SMT AG
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for determining the influencing of the state o...
- Publication number 20040114150
- Publication date Jun 17, 2004
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G02 - OPTICS

Markus Mengel

Person

Patents Grantslast 30 patents

Method and apparatus for compensating at least one defect of an opt...

System for measuring the image quality of an optical imaging system

Arrangement for and method of characterising the polarization prope...

Controllable transmission and phase compensation of transparent mat...

System for measuring the image quality of an optical imaging system

Method and apparatus for modifying a substrate surface of a photoli...

Microlithographic projection exposure apparatus

System for measuring the image quality of an optical imaging system

Method for approximating an influence of an optical system on the s...

System for measuring the image quality of an optical imaging system

System for measuring the image quality of an optical imaging system

Method for improving the imaging properties of a projection objecti...

Method and apparatus for spatially resolved polarimetry

Method and apparatus for determining the influencing of the state o...

Apparatus for polarization-specific examination, optical imaging sy...

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR COMPENSATING AT LEAST ONE DEFECT OF AN OPT...

SYSTEM FOR MEASURING THE IMAGE QUALITY OF AN OPTICAL IMAGING SYSTEM

SYSTEM FOR MEASURING THE IMAGE QUALITY OF AN OPTICAL IMAGING SYSTEM

CONTROLLABLE TRANSMISSION AND PHASE COMPENSATION OF TRANSPARENT MAT...

ARRANGEMENT FOR AND METHOD OF CHARACTERISING THE POLARISATION PROPE...

METHOD AND APPARATUS FOR MODIFYING A SUBSTRATE SURFACE OF A PHOTOLI...

OPTICAL SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATU...

SYSTEM FOR MEASURING THE IMAGE QUALITY OF AN OPTICAL IMAGING SYSTEM

MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

APPARATUS FOR POLARIZATION-SPECIFIC EXAMINATION, OPTICAL IMAGING SY...

System for Measuring the Image Quality of an Optical Imaging System

SYSTEM FOR MEASURING THE IMAGE QUALITY OF AN OPTICAL IMAGING SYSTEM

METHOD AND APPARATUS FOR DETERMINING THE INFLUENCING OF THE STATE O...

Method for approximating an influence of an optical system on the s...

Device for polarization-specific examination, an optical imaging sy...

Method and apparatus for spatially resolved polarimetry

Method and apparatus for determining the influencing of the state o...