Markus Weiss

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Optical system for EUV lithography with a charged-particle source
- Patent number 8,546,776
- Issue date Oct 1, 2013
- Carl Zeiss SMT GmbH
- Dirk Heinrich Ehm
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
EUV illumination system with a system for measuring fluctuations of...
- Patent number 8,513,628
- Issue date Aug 20, 2013
- Carl Zeiss SMT GmbH
- Axel Scholz
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Device for damping vibrations in projection exposure apparatuses fo...
- Patent number 8,212,992
- Issue date Jul 3, 2012
- Carl Zeiss SMT GmbH
- Peter Kloesch
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical element for radiation in the EUV and/or soft X-ray region a...
- Patent number 8,164,077
- Issue date Apr 24, 2012
- Carl Zeiss SMT GmbH
- Marco Wedowski
- B82 - NANO-TECHNOLOGY
Information Patent Grant
EUV illumination system with a system for measuring fluctuations of...
- Patent number 7,875,865
- Issue date Jan 25, 2011
- Carl Zeiss SMT AG
- Axel Scholz
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Faceted mirror apparatus
- Patent number 7,802,891
- Issue date Sep 28, 2010
- Carl Zeiss SMT AG
- Andreas Seifert
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Optical element for radiation in the EUV and/or soft X-ray region a...
- Patent number 7,646,004
- Issue date Jan 12, 2010
- Carl Zeiss SMT AG
- Marco Wedowski
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Lithographic apparatus, system and device manufacturing method
- Patent number 7,491,951
- Issue date Feb 17, 2009
- ASML Netherlands B.V.
- Marc Hubertus Lorenz Van Der Velden
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system for a wavelength of ≦ 193 nm, with sensors for...
- Patent number 7,473,907
- Issue date Jan 6, 2009
- Carl Zeiss SMT AG
- Wolfgang Singer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Collector configured of mirror shells
- Patent number 7,460,212
- Issue date Dec 2, 2008
- Carl Zeiss SMT AG
- Wolfgang Singer
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Optical system having an optical element that can be brought into a...
- Patent number 7,362,414
- Issue date Apr 22, 2008
- Carl Zeiss SMT AG
- Wolfgang Singer
- G02 - OPTICS
Information Patent Grant
Facet mirror having a number of mirror facets
- Patent number 7,354,168
- Issue date Apr 8, 2008
- Carl Zeiss SMT AG
- Hubert Holderer
- G02 - OPTICS
Information Patent Grant
Collector with fastening devices for fastening mirror shells
- Patent number 7,321,126
- Issue date Jan 22, 2008
- Carl Zeiss SMT AG
- Wolfgang Singer
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Illumination system with a grating element
- Patent number 7,248,667
- Issue date Jul 24, 2007
- Carl Zeiss SMT AG
- Markus Weiss
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Method for the production of a facetted mirror
- Patent number 7,246,909
- Issue date Jul 24, 2007
- Carl Zeiss SMT AG
- Andreas Seifert
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Collector having unused region for illumination systems using a wav...
- Patent number 7,244,954
- Issue date Jul 17, 2007
- Carl Zeiss SMT AG
- Wolfgang Singer
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Method for cleaning a surface of a component of a lithographic proj...
- Patent number 7,116,394
- Issue date Oct 3, 2006
- ASML Netherlands B.V.
- Levinus Pieter Bakker
- B08 - CLEANING
Information Patent Grant
Facet mirror having a number of mirror facets
- Patent number 7,090,362
- Issue date Aug 15, 2006
- Carl Zeiss SMT AG
- Hubert Holderer
- G02 - OPTICS
Information Patent Grant
Collector with fastening devices for fastening mirror shells
- Patent number 7,091,505
- Issue date Aug 15, 2006
- Carl Zeiss SMT AG
- Wolfgang Singer
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Collector unit with a reflective element for illumination systems w...
- Patent number 7,084,412
- Issue date Aug 1, 2006
- Carl Zeiss SMT AG
- Markus Weiss
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Collector having unused region for illumination systems using a wav...
- Patent number 7,015,489
- Issue date Mar 21, 2006
- Carl Zeiss SMT AG
- Wolfgang Singer
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Optical system
- Patent number 6,912,077
- Issue date Jun 28, 2005
- Carl Zeiss SMT AG
- Markus Weiss
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system with a plurality of individual gratings
- Patent number 6,836,530
- Issue date Dec 28, 2004
- Carl Zeiss SMT AG
- Wolfgang Singer
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING

Patents Applicationslast 30 patents

Information Patent Application
Reflective Optical Element for the EUV Wavelength Range, Method for...
- Publication number 20140307308
- Publication date Oct 16, 2014
- Carl Zeiss SMT GMBH
- Markus WEISS
- B82 - NANO-TECHNOLOGY
Information Patent Application
OPTICAL SYSTEM FOR EUV LITHOGRAPHY WITH A CHARGED-PARTICLE SOURCE
- Publication number 20130099132
- Publication date Apr 25, 2013
- Carl Zeiss SMT GMBH
- Dirk Heinrich EHM
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
DEVICE FOR DAMPING VIBRATIONS IN PROJECTION EXPOSURE APPARATUSES FO...
- Publication number 20110205507
- Publication date Aug 25, 2011
- Carl Zeiss SMT GMBH
- Peter Kloesch
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EUV ILLUMINATION SYSTEM WITH A SYSTEM FOR MEASURING FLUCTUATIONS OF...
- Publication number 20110079737
- Publication date Apr 7, 2011
- Carl Zeiss SMT AG
- Axel Scholz
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL ELEMENT FOR RADIATION IN THE EUV AND/OR SOFT X-RAY REGION A...
- Publication number 20100067653
- Publication date Mar 18, 2010
- Carl Zeiss SMT AG
- Marco Wedowski
- B82 - NANO-TECHNOLOGY
Information Patent Application
FACETED MIRROR APPARATUS
- Publication number 20090097142
- Publication date Apr 16, 2009
- Andreas Seifert
- G02 - OPTICS
Information Patent Application
Apparatus for the manipulation and/or adjustment of an optical element
- Publication number 20090002670
- Publication date Jan 1, 2009
- Carl Zeiss SMT AG
- Frank Melzer
- G02 - OPTICS
Information Patent Application
EUV ILLUMINATION SYSTEM WITH A SYSTEM FOR MEASURING FLUCTUATIONS OF...
- Publication number 20080258070
- Publication date Oct 23, 2008
- Carl Zeiss SMT AG
- Axel Scholz
- G01 - MEASURING TESTING
Information Patent Application
Collector with fastening devices for fastening mirror shells
- Publication number 20080042079
- Publication date Feb 21, 2008
- Carl Zeiss SMT
- Wolfgang Singer
- G02 - OPTICS
Information Patent Application
EUV-lithography apparatus having a chamber for cleaning an optical...
- Publication number 20070283591
- Publication date Dec 13, 2007
- Carl Zeiss SMT AG
- Wolfgang Singer
- G02 - OPTICS
Information Patent Application
Illumination system
- Publication number 20070242799
- Publication date Oct 18, 2007
- Carl Zeiss SMT AG
- Markus Weiss
- G02 - OPTICS
Information Patent Application
FACETED MIRROR APPARATUS
- Publication number 20070206301
- Publication date Sep 6, 2007
- Andreas Seifert
- G02 - OPTICS
Information Patent Application
Lithographic apparatus, system and device manufacturing method
- Publication number 20070146660
- Publication date Jun 28, 2007
- ASML NETHERLANDS B.V.
- Marc Hubertus Lorenz Van Der Velden
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optical element for radiation in the EUV and/or soft X-ray region a...
- Publication number 20070114466
- Publication date May 24, 2007
- Marco Wedowski
- B82 - NANO-TECHNOLOGY
Information Patent Application
Method for preventing contamination and lithographic device
- Publication number 20070054497
- Publication date Mar 8, 2007
- Markus Weiss
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Collector with fastening devices for fastening mirror shells
- Publication number 20060291062
- Publication date Dec 28, 2006
- Carl Zeiss SMT AG
- Wolfgang Singer
- G02 - OPTICS
Information Patent Application
Collector having unused region for illumination systems using a wav...
- Publication number 20060097202
- Publication date May 11, 2006
- Carl Zeiss SMT AG
- Wolfgang Singer
- G02 - OPTICS
Information Patent Application
Optical system having an optical element that can be brought into a...
- Publication number 20060001854
- Publication date Jan 5, 2006
- Carl Zeiss SMT AG
- Wolfgang Singer
- G02 - OPTICS
Information Patent Application
Illumination system for a wavelength of less than or equal to 193 n...
- Publication number 20050274897
- Publication date Dec 15, 2005
- Carl Zeiss SMT AG and ASML Netherlands
- Wolfgang Singer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for the production of a facetted mirror
- Publication number 20050111067
- Publication date May 26, 2005
- Andreas Seifert
- G02 - OPTICS
Information Patent Application
Collector unit with a reflective element for illumination systems w...
- Publication number 20050094764
- Publication date May 5, 2005
- Carl Zeiss SMT AG
- Markus Weiss
- B82 - NANO-TECHNOLOGY
Information Patent Application
Facet mirror having a number of mirror facets
- Publication number 20050030653
- Publication date Feb 10, 2005
- Hubert Holderer
- G02 - OPTICS
Information Patent Application
Facet mirror having a number of mirror facets
- Publication number 20050030656
- Publication date Feb 10, 2005
- Hubert Holderer
- G02 - OPTICS
Information Patent Application
OPTICAL SYSTEM
- Publication number 20050018269
- Publication date Jan 27, 2005
- Carl Zeiss SMT AG
- Markus Weiss
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Collector with fastening devices for fastening mirror shells
- Publication number 20040227103
- Publication date Nov 18, 2004
- Carl Zeiss SMT AG
- Wolfgang Singer
- G02 - OPTICS
Information Patent Application
Method for cleaning a surface of a component of a lithographic proj...
- Publication number 20040218157
- Publication date Nov 4, 2004
- ASML NETHERLANDS B.V.
- Levinus Pieter Bakker
- B08 - CLEANING
Information Patent Application
Collector having unused region for illumination systems using a wav...
- Publication number 20040065817
- Publication date Apr 8, 2004
- Carl Zeiss SMT AG
- Wolfgang Singer
- G02 - OPTICS
Information Patent Application
Illumination system with a plurality of individual gratings
- Publication number 20030099040
- Publication date May 29, 2003
- Carl Zeiss Cemiconductor Manufacturing Technologies AG
- Wolfgang Singer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination system with a grating element
- Publication number 20020186811
- Publication date Dec 12, 2002
- Markus Weiss
- B82 - NANO-TECHNOLOGY

Markus Weiss

Person

Patents Grantslast 30 patents

Optical system for EUV lithography with a charged-particle source

EUV illumination system with a system for measuring fluctuations of...

Device for damping vibrations in projection exposure apparatuses fo...

Optical element for radiation in the EUV and/or soft X-ray region a...

EUV illumination system with a system for measuring fluctuations of...

Faceted mirror apparatus

Optical element for radiation in the EUV and/or soft X-ray region a...

Lithographic apparatus, system and device manufacturing method

Illumination system for a wavelength of ≦ 193 nm, with sensors for...

Collector configured of mirror shells

Optical system having an optical element that can be brought into a...

Facet mirror having a number of mirror facets

Collector with fastening devices for fastening mirror shells

Illumination system with a grating element

Method for the production of a facetted mirror

Collector having unused region for illumination systems using a wav...

Method for cleaning a surface of a component of a lithographic proj...

Facet mirror having a number of mirror facets

Collector with fastening devices for fastening mirror shells

Collector unit with a reflective element for illumination systems w...

Collector having unused region for illumination systems using a wav...

Optical system

Illumination system with a plurality of individual gratings

Patents Applicationslast 30 patents

Reflective Optical Element for the EUV Wavelength Range, Method for...

OPTICAL SYSTEM FOR EUV LITHOGRAPHY WITH A CHARGED-PARTICLE SOURCE

DEVICE FOR DAMPING VIBRATIONS IN PROJECTION EXPOSURE APPARATUSES FO...

EUV ILLUMINATION SYSTEM WITH A SYSTEM FOR MEASURING FLUCTUATIONS OF...

OPTICAL ELEMENT FOR RADIATION IN THE EUV AND/OR SOFT X-RAY REGION A...

FACETED MIRROR APPARATUS

Apparatus for the manipulation and/or adjustment of an optical element

EUV ILLUMINATION SYSTEM WITH A SYSTEM FOR MEASURING FLUCTUATIONS OF...

Collector with fastening devices for fastening mirror shells

EUV-lithography apparatus having a chamber for cleaning an optical...

Illumination system

FACETED MIRROR APPARATUS

Lithographic apparatus, system and device manufacturing method

Optical element for radiation in the EUV and/or soft X-ray region a...

Method for preventing contamination and lithographic device

Collector with fastening devices for fastening mirror shells

Collector having unused region for illumination systems using a wav...

Optical system having an optical element that can be brought into a...

Illumination system for a wavelength of less than or equal to 193 n...

Method for the production of a facetted mirror

Collector unit with a reflective element for illumination systems w...

Facet mirror having a number of mirror facets

Facet mirror having a number of mirror facets

OPTICAL SYSTEM

Collector with fastening devices for fastening mirror shells

Method for cleaning a surface of a component of a lithographic proj...

Collector having unused region for illumination systems using a wav...

Illumination system with a plurality of individual gratings

Illumination system with a grating element