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Malans SG, CH
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last 30 patents
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Patent Grant
Methods of and apparatus for magnetron sputtering
Patent number
11,848,179
Issue date
Dec 19, 2023
EVATEC AG
Hartmut Rohrmann
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods of and apparatus for magnetron sputtering
Patent number
11,476,099
Issue date
Oct 18, 2022
EVATEC AG
Hartmut Rohrmann
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
RF power delivery to vacuum plasma processing
Patent number
11,380,520
Issue date
Jul 5, 2022
EVATEC AG
Stefan Rhyner
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
SOFT MAGNETIC MULTILAYER DESPOSITION APPARATUS, METHODS OF MANUFACT...
Publication number
20240186064
Publication date
Jun 6, 2024
Evatec AG
Claudiu Valentin FALUB
C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information
Patent Application
METHODS OF AND APPARATUS FOR MAGNETRON SPUTTERING
Publication number
20230014186
Publication date
Jan 19, 2023
Evatec AG
Hartmut Rohrmann
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VACUUM TREATMENT APPARATUS AND METHOD OF VACUUM TREATING SUBSTRATES
Publication number
20210381100
Publication date
Dec 9, 2021
Evatec AG
Martin Bless
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
RF POWER DELIVERY TO VACUUM PLASMA PROCESSING
Publication number
20210358718
Publication date
Nov 18, 2021
Evatec AG
Stefan Rhyner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF AND APPARATUS FOR MAGNETRON SPUTTERING
Publication number
20210050193
Publication date
Feb 18, 2021
Evatec AG
Hartmut Rohrmann
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SOFT MAGNETIC MULTILAYER DESPOSITION APPARATUS, METHODS OF MANUFACT...
Publication number
20200203071
Publication date
Jun 25, 2020
Evatec AG
Claudiu Valentin FALUB
B32 - LAYERED PRODUCTS