Martin J. Seamons

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method of dielectric material fill and treatment
- Patent number 12,046,508
- Issue date Jul 23, 2024
- Applied Materials, Inc.
- Shi You
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas delivery systems and methods
- Patent number 11,798,820
- Issue date Oct 24, 2023
- Applied Materials, Inc.
- Diwakar Kedlaya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Techniques for improved low dielectric constant film processing
- Patent number 11,756,796
- Issue date Sep 12, 2023
- Applied Materials, Inc.
- Rajesh Prasad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of dielectric material fill and treatment
- Patent number 11,615,984
- Issue date Mar 28, 2023
- Applied Materials, Inc.
- Shi You
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of post treating dielectric films with microwave radiation
- Patent number 11,469,100
- Issue date Oct 11, 2022
- Applied Materials, Inc.
- Yong Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing using multiple radio frequency power feeds for im...
- Patent number 11,276,562
- Issue date Mar 15, 2022
- Applied Materials, Inc.
- Zheng John Ye
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Oxidation reduction for SiOC film
- Patent number 11,133,177
- Issue date Sep 28, 2021
- APPLIED MATERIALS, INC.
- Martin Jay Seamons
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cure method for cross-linking Si-hydroxyl bonds
- Patent number 11,090,683
- Issue date Aug 17, 2021
- Applied Materials, Inc.
- Martin Jay Seamons
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Plasma processing using multiple radio frequency power feeds for im...
- Patent number 10,580,623
- Issue date Mar 3, 2020
- Applied Materials, Inc.
- Zheng John Ye
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of dry stripping boron-carbon films
- Patent number 10,510,518
- Issue date Dec 17, 2019
- Applied Materials, Inc.
- Kwangduk Douglas Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Gas flow profile modulated control of overlay in plasma CVD films
- Patent number 10,373,822
- Issue date Aug 6, 2019
- Applied Materials, Inc.
- Prashant Kumar Kulshreshtha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Edge hump reduction faceplate by plasma modulation
- Patent number 10,100,408
- Issue date Oct 16, 2018
- Applied Materials, Inc.
- Sungwon Ha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas flow profile modulated control of overlay in plasma CVD films
- Patent number 9,837,265
- Issue date Dec 5, 2017
- Applied Materials, Inc.
- Prashant Kumar Kulshreshtha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of removing a material layer from a substrate using water v...
- Patent number 9,653,327
- Issue date May 16, 2017
- Applied Materials, Inc.
- Kwangduk Douglas Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas flow profile modulated control of overlay in plasma CVD films
- Patent number 9,390,910
- Issue date Jul 12, 2016
- Applied Materials, Inc.
- Prashant Kumar Kulshreshtha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for substrate clamping in a plasma chamber
- Patent number 9,337,072
- Issue date May 10, 2016
- Applied Materials, Inc.
- Ganesh Balasubramanian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of dry stripping boron-carbon films
- Patent number 9,299,581
- Issue date Mar 29, 2016
- Applied Materials, Inc.
- Kwangduk Douglas Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultra high selectivity doped amorphous carbon strippable hardmask d...
- Patent number 8,993,454
- Issue date Mar 31, 2015
- Applied Materials, Inc.
- Martin Jay Seamons
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ultra high selectivity doped amorphous carbon strippable hardmask d...
- Patent number 8,536,065
- Issue date Sep 17, 2013
- Applied Materials, Inc.
- Martin Jay Seamons
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Planarizing etch hardmask to increase pattern density and aspect ratio
- Patent number 8,513,129
- Issue date Aug 20, 2013
- Applied Materials, Inc.
- Martin Jay Seamons
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultra high selectivity ashable hard mask film
- Patent number 8,361,906
- Issue date Jan 29, 2013
- Applied Materials, Inc.
- Kwangduk Douglas Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods to improve the in-film defectivity of PECVD amorphous carbo...
- Patent number 8,282,734
- Issue date Oct 9, 2012
- Applied Materials, Inc.
- Deenesh Padhi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Graded ARC for high NA and immersion lithography
- Patent number 8,125,034
- Issue date Feb 28, 2012
- Applied Materials, Inc.
- Wendy H. Yeh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for depositing conformal amorphous carbon film by plasma-enh...
- Patent number 8,105,465
- Issue date Jan 31, 2012
- Applied Materials, Inc.
- Kwangduk Douglas Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing an amorphous carbon film with improved densit...
- Patent number 7,867,578
- Issue date Jan 11, 2011
- Applied Materials, Inc.
- Deenesh Padhi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Graded ARC for high NA and immersion lithography
- Patent number 7,776,516
- Issue date Aug 17, 2010
- Applied Materials, Inc.
- Wendy H. Yeh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods to improve the in-film defectivity of PECVD amorphous carbo...
- Patent number 7,514,125
- Issue date Apr 7, 2009
- Applied Materials, Inc.
- Deenesh Padhi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid precursors for the CVD deposition of amorphous carbon films
- Patent number 7,407,893
- Issue date Aug 5, 2008
- Applied Materials, Inc.
- Martin Jay Seamons
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for the reduction and elimination of particulate contaminat...
- Patent number 7,094,442
- Issue date Aug 22, 2006
- Applied Materials, Inc.
- Martin Jay Seamons
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Feedback control of plasma-enhanced chemical vapor deposition proce...
- Patent number 6,913,938
- Issue date Jul 5, 2005
- Applied Materials, Inc.
- Arulkumar P. Shanmugasundram
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF DIELECTRIC MATERIAL FILL AND TREATMENT
- Publication number 20240379420
- Publication date Nov 14, 2024
- Applied Materials, Inc.
- Shi YOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROTECTION TREATMENTS FOR SURFACES OF SEMICONDUCTOR FABRICATION EQU...
- Publication number 20240153745
- Publication date May 9, 2024
- Applied Materials, Inc.
- Katherine Woo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TECHNIQUES FOR IMPROVED LOW DIELECTRIC CONSTANT FILM PROCESSING
- Publication number 20220367205
- Publication date Nov 17, 2022
- Applied Materials, Inc.
- Rajesh Prasad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS, METHODS, AND APPARATUS FOR APPLYING A BIAS VOLTAGE TO AN I...
- Publication number 20220333245
- Publication date Oct 20, 2022
- Applied Materials, Inc.
- Xiaopu LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI COLOR STACK FOR SELF ALIGNED DUAL PATTERN FORMATION FOR MULTI...
- Publication number 20220130722
- Publication date Apr 28, 2022
- Applied Materials, Inc.
- Suketu Arun PARIKH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED FLOWABLE LOW-K GAP-FILL AND PLASMA TREATMENT
- Publication number 20220037147
- Publication date Feb 3, 2022
- Applied Materials, Inc.
- Myungsun Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF DIELECTRIC MATERIAL FILL AND TREATMENT
- Publication number 20210317580
- Publication date Oct 14, 2021
- Applied Materials, Inc.
- Shi YOU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS DELIVERY SYSTEMS AND METHODS
- Publication number 20210143029
- Publication date May 13, 2021
- Applied Materials, Inc.
- Diwakar Kedlaya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF POST TREATING DIELECTRIC FILMS WITH MICROWAVE RADIATION
- Publication number 20200381248
- Publication date Dec 3, 2020
- Applied Materials, Inc.
- Yong SUN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OXIDATION REDUCTION FOR SIOC FILM
- Publication number 20200203154
- Publication date Jun 25, 2020
- Applied Materials, Inc.
- Martin Jay SEAMONS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING USING MULTIPLE RADIO FREQUENCY POWER FEEDS FOR IM...
- Publication number 20200203132
- Publication date Jun 25, 2020
- Applied Materials, Inc.
- Zheng John YE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CURE METHOD FOR CROSS-LINKING SI-HYDROXYL BONDS
- Publication number 20200171536
- Publication date Jun 4, 2020
- Applied Materials, Inc.
- Martin Jay SEAMONS
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHOD AND APPARATUS OF REMOTE PLASMAS FLOWABLE CVD CHAMBER
- Publication number 20180230597
- Publication date Aug 16, 2018
- Applied Materials, Inc.
- Ying MA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS FLOW PROFILE MODULATED CONTROL OF OVERLAY IN PLASMA CVD FILMS
- Publication number 20180096843
- Publication date Apr 5, 2018
- Applied Materials, Inc.
- Prashant Kumar KULSHRESHTHA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS FLOW PROFILE MODULATED CONTROL OF OVERLAY IN PLASMA CVD FILMS
- Publication number 20160307752
- Publication date Oct 20, 2016
- Applied Materials, Inc.
- Prashant Kumar KULSHRESHTHA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF DRY STRIPPING BORON-CARBON FILMS
- Publication number 20160133443
- Publication date May 12, 2016
- Applied Materials, Inc.
- Kwangduk Douglas LEE
- B08 - CLEANING
Information Patent Application
GAS FLOW PROFILE MODULATED CONTROL OF OVERLAY IN PLASMA CVD FILMS
- Publication number 20160099147
- Publication date Apr 7, 2016
- Applied Materials, Inc.
- Prashant Kumar KULSHRESHTHA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF DRY STRIPPING BORON-CARBON FILMS
- Publication number 20160064209
- Publication date Mar 3, 2016
- Applied Materials, Inc.
- Kwangduk Douglas LEE
- B08 - CLEANING
Information Patent Application
INTEGRATED PRE-CLEAN AND DEPOSITION OF LOW-DAMAGE LAYERS
- Publication number 20160017487
- Publication date Jan 21, 2016
- Applied Materials, Inc.
- Yihong CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA-ENHANCED AND RADICAL-BASED CVD OF POROUS CARBON-DOPED OXIDE...
- Publication number 20160017495
- Publication date Jan 21, 2016
- Applied Materials, Inc.
- Yihong CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AMORPHOUS CARBON DEPOSITION PROCESS USING DUAL RF BIAS FREQUENCY AP...
- Publication number 20150371851
- Publication date Dec 24, 2015
- Applied Materials, Inc.
- Kwangduk Douglas LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EDGE HUMP REDUCTION FACEPLATE BY PLASMA MODULATION
- Publication number 20150247237
- Publication date Sep 3, 2015
- Applied Materials, Inc.
- Sungwon HA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEANING PROCESS FOR CLEANING AMORPHOUS CARBON DEPOSITION RESIDUALS...
- Publication number 20150228463
- Publication date Aug 13, 2015
- Applied Materials, Inc.
- Pramit MANNA
- B08 - CLEANING
Information Patent Application
PLASMA PROCESSING USING MULTIPLE RADIO FREQUENCY POWER FEEDS FOR IM...
- Publication number 20150136325
- Publication date May 21, 2015
- Applied Materials, Inc.
- Zheng John YE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CARBON FILM HARDMASK STRESS REDUCTION BY HYDROGEN ION IMPLANTATION
- Publication number 20140273461
- Publication date Sep 18, 2014
- Applied Materials, Inc.
- Kwangduk Douglas LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF DRY STRIPPING BORON-CARBON FILMS
- Publication number 20140216498
- Publication date Aug 7, 2014
- Kwangduk Douglas LEE
- B08 - CLEANING
Information Patent Application
LOW REFRACTIVE INDEX COATING DEPOSITED BY REMOTE PLASMA CVD
- Publication number 20140091417
- Publication date Apr 3, 2014
- Applied Materials, Inc.
- Sum-Yee Betty TANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLUOROCARBON COATING HAVING LOW REFRACTIVE INDEX
- Publication number 20140091379
- Publication date Apr 3, 2014
- Applied Materials, Inc.
- Sum-Yee Betty TANG
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
ULTRA HIGH SELECTIVITY DOPED AMORPHOUS CARBON STRIPPABLE HARDMASK D...
- Publication number 20140017897
- Publication date Jan 16, 2014
- Applied Materials, Inc.
- Martin Jay SEAMONS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPENSATING CONCENTRATION UNCERTAINITY
- Publication number 20130284090
- Publication date Oct 31, 2013
- Ganesh BALASUBRAMANIAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Martin J. Seamons

Person

Patents Grantslast 30 patents

Method of dielectric material fill and treatment

Gas delivery systems and methods

Techniques for improved low dielectric constant film processing

Method of dielectric material fill and treatment

Methods of post treating dielectric films with microwave radiation

Plasma processing using multiple radio frequency power feeds for im...

Oxidation reduction for SiOC film

Cure method for cross-linking Si-hydroxyl bonds

Plasma processing using multiple radio frequency power feeds for im...

Methods of dry stripping boron-carbon films

Gas flow profile modulated control of overlay in plasma CVD films

Edge hump reduction faceplate by plasma modulation

Gas flow profile modulated control of overlay in plasma CVD films

Methods of removing a material layer from a substrate using water v...

Gas flow profile modulated control of overlay in plasma CVD films

Apparatus and method for substrate clamping in a plasma chamber

Methods of dry stripping boron-carbon films

Ultra high selectivity doped amorphous carbon strippable hardmask d...

Ultra high selectivity doped amorphous carbon strippable hardmask d...

Planarizing etch hardmask to increase pattern density and aspect ratio

Ultra high selectivity ashable hard mask film

Methods to improve the in-film defectivity of PECVD amorphous carbo...

Graded ARC for high NA and immersion lithography

Method for depositing conformal amorphous carbon film by plasma-enh...

Method for depositing an amorphous carbon film with improved densit...

Graded ARC for high NA and immersion lithography

Methods to improve the in-film defectivity of PECVD amorphous carbo...

Liquid precursors for the CVD deposition of amorphous carbon films

Methods for the reduction and elimination of particulate contaminat...

Feedback control of plasma-enhanced chemical vapor deposition proce...

Patents Applicationslast 30 patents

METHOD OF DIELECTRIC MATERIAL FILL AND TREATMENT

PROTECTION TREATMENTS FOR SURFACES OF SEMICONDUCTOR FABRICATION EQU...

TECHNIQUES FOR IMPROVED LOW DIELECTRIC CONSTANT FILM PROCESSING

SYSTEMS, METHODS, AND APPARATUS FOR APPLYING A BIAS VOLTAGE TO AN I...

MULTI COLOR STACK FOR SELF ALIGNED DUAL PATTERN FORMATION FOR MULTI...

INTEGRATED FLOWABLE LOW-K GAP-FILL AND PLASMA TREATMENT

METHOD OF DIELECTRIC MATERIAL FILL AND TREATMENT

GAS DELIVERY SYSTEMS AND METHODS

METHODS OF POST TREATING DIELECTRIC FILMS WITH MICROWAVE RADIATION

OXIDATION REDUCTION FOR SIOC FILM

PLASMA PROCESSING USING MULTIPLE RADIO FREQUENCY POWER FEEDS FOR IM...

CURE METHOD FOR CROSS-LINKING SI-HYDROXYL BONDS

METHOD AND APPARATUS OF REMOTE PLASMAS FLOWABLE CVD CHAMBER

GAS FLOW PROFILE MODULATED CONTROL OF OVERLAY IN PLASMA CVD FILMS

GAS FLOW PROFILE MODULATED CONTROL OF OVERLAY IN PLASMA CVD FILMS

METHODS OF DRY STRIPPING BORON-CARBON FILMS

GAS FLOW PROFILE MODULATED CONTROL OF OVERLAY IN PLASMA CVD FILMS

METHODS OF DRY STRIPPING BORON-CARBON FILMS

INTEGRATED PRE-CLEAN AND DEPOSITION OF LOW-DAMAGE LAYERS

PLASMA-ENHANCED AND RADICAL-BASED CVD OF POROUS CARBON-DOPED OXIDE...

AMORPHOUS CARBON DEPOSITION PROCESS USING DUAL RF BIAS FREQUENCY AP...

EDGE HUMP REDUCTION FACEPLATE BY PLASMA MODULATION

CLEANING PROCESS FOR CLEANING AMORPHOUS CARBON DEPOSITION RESIDUALS...

PLASMA PROCESSING USING MULTIPLE RADIO FREQUENCY POWER FEEDS FOR IM...

CARBON FILM HARDMASK STRESS REDUCTION BY HYDROGEN ION IMPLANTATION

METHODS OF DRY STRIPPING BORON-CARBON FILMS

LOW REFRACTIVE INDEX COATING DEPOSITED BY REMOTE PLASMA CVD

FLUOROCARBON COATING HAVING LOW REFRACTIVE INDEX

ULTRA HIGH SELECTIVITY DOPED AMORPHOUS CARBON STRIPPABLE HARDMASK D...

COMPENSATING CONCENTRATION UNCERTAINITY