MARTIN JEFF SALINAS

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Abatement and strip process chamber in a load lock configuration
- Patent number 12,094,715
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Martin Jeffrey Salinas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cluster tools, systems, and methods having one or more pressure sta...
- Patent number 11,965,241
- Issue date Apr 23, 2024
- Applied Materials, Inc.
- Saurabh Chopra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma erosion resistant thin film coating for high temperature app...
- Patent number 11,773,479
- Issue date Oct 3, 2023
- Applied Materials, Inc.
- Vahid Firouzdor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for substrate transfer and radical confinement
- Patent number 11,574,831
- Issue date Feb 7, 2023
- Applied Materials, Inc.
- Jared Ahmad Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Abatement and strip process chamber in a dual loadlock configuration
- Patent number 11,177,136
- Issue date Nov 16, 2021
- APPLIED MATERIALS, INC.
- Jared Ahmad Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Abatement and strip process chamber in a dual load lock configuration
- Patent number 11,171,008
- Issue date Nov 9, 2021
- Applied Materials, Inc.
- Jared Ahmad Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cooling mechanism utilized in a plasma reactor with enhanced temper...
- Patent number 10,991,552
- Issue date Apr 27, 2021
- Applied Materials, Inc.
- Aniruddha Pal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Abatement and strip process chamber in a load lock configuration
- Patent number 10,943,788
- Issue date Mar 9, 2021
- Applied Materials, Inc.
- Martin Jeffrey Salinas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma erosion resistant thin film coating for high temperature app...
- Patent number 10,815,562
- Issue date Oct 27, 2020
- Applied Materials, Inc.
- Vahid Firouzdor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Inductively coupled plasma apparatus
- Patent number 10,573,493
- Issue date Feb 25, 2020
- Applied Materials, Inc.
- Valentin N. Todorow
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Abatement and strip process chamber in a load lock configuration
- Patent number 10,566,205
- Issue date Feb 18, 2020
- Applied Materials, Inc.
- Martin Jeffrey Salinas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for substrate transfer and radical confinement
- Patent number 10,468,282
- Issue date Nov 5, 2019
- Applied Materials, Inc.
- Jared Ahmad Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Abatement and strip process chamber in a dual loadlock configuration
- Patent number 10,453,694
- Issue date Oct 22, 2019
- Applied Materials, Inc.
- Jared Ahmad Lee
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Cooling mechanism utlized in a plasma reactor with enhanced tempera...
- Patent number 10,249,475
- Issue date Apr 2, 2019
- Applied Materials, Inc.
- Aniruddha Pal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin heated substrate support
- Patent number 10,204,805
- Issue date Feb 12, 2019
- Applied Materials, Inc.
- Imad Yousif
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for substrate transfer and radical confinement
- Patent number 10,090,181
- Issue date Oct 2, 2018
- Applied Materials, Inc.
- Jared Ahmad Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Particle reduction via throttle gate valve purge
- Patent number 10,010,912
- Issue date Jul 3, 2018
- Applied Materials, Inc.
- Jared Ahmad Lee
- B08 - CLEANING
Information Patent Grant
Plasma erosion resistant thin film coating for high temperature app...
- Patent number 9,976,211
- Issue date May 22, 2018
- Applied Materials, Inc.
- Vahid Firouzdor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal management of edge ring in semiconductor processing
- Patent number 9,947,559
- Issue date Apr 17, 2018
- Applied Materials, Inc.
- Aniruddha Pal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate placement detection in semiconductor equipment using ther...
- Patent number 9,885,567
- Issue date Feb 6, 2018
- Applied Materials, Inc.
- Jared Ahmad Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for self-regulating fluid chemical delivery
- Patent number 9,857,027
- Issue date Jan 2, 2018
- Applied Materials, Inc.
- Martin Jeff Salinas
- G05 - CONTROLLING REGULATING
Information Patent Grant
Methods and apparatus for providing a gas mixture to a pair of proc...
- Patent number 9,587,789
- Issue date Mar 7, 2017
- Applied Materials, Inc.
- Jared Ahmad Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film deposition using spatial atomic layer deposition or pulsed che...
- Patent number 9,514,933
- Issue date Dec 6, 2016
- Applied Materials, Inc.
- Yu Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for uniform pumping within a substrate process chamber
- Patent number 9,464,732
- Issue date Oct 11, 2016
- Applied Materials, Inc.
- Paul Benjamin Reuter
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Plasma reactor with tiltable overhead RF inductive source
- Patent number 9,330,887
- Issue date May 3, 2016
- Applied Materials, Inc.
- Kenneth S. Collins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for providing a gas mixture to a pair of proc...
- Patent number 8,616,224
- Issue date Dec 31, 2013
- Applied Materials, Inc.
- Jared Ahmad Lee
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Plasma reactor with minimal D.C. coils for cusp, solenoid and mirro...
- Patent number 8,617,351
- Issue date Dec 31, 2013
- Applied Materials, Inc.
- Daniel J. Hoffman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for radial delivery of gas to a chamber and methods of us...
- Patent number 8,562,742
- Issue date Oct 22, 2013
- Applied Materials, Inc.
- Jared Ahmad Lee
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Plasma reactor with tiltable overhead RF inductive source
- Patent number 8,414,736
- Issue date Apr 9, 2013
- Applied Materials, Inc.
- Kenneth S. Collins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for removing polymer from the wafer backside a...
- Patent number 8,329,593
- Issue date Dec 11, 2012
- Applied Materials, Inc.
- Imad Yousif
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SHOWERHEAD ASSEMBLY FOR CYCLIC VAPOR DEPOSITION WITH ENHANCED GAS M...
- Publication number 20240384413
- Publication date Nov 21, 2024
- EUGENUS, INC.
- Martin J. Salinas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INJECTORS, LINERS, PROCESS KITS, PROCESSING CHAMBERS, AND RELATED M...
- Publication number 20240254627
- Publication date Aug 1, 2024
- Applied Materials, Inc.
- Raja Murali DHAMODHARAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LIFT ASSEMBLIES, AND RELATED METHODS AND COMPONENTS, FOR SUBSTRATE...
- Publication number 20240198468
- Publication date Jun 20, 2024
- Applied Materials, Inc.
- Aniketnitin PATIL
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHODS OF CORRELATING ZONES OF PROCESSING CHAMBERS, AND RELATED SY...
- Publication number 20240141498
- Publication date May 2, 2024
- Applied Materials, Inc.
- Zuoming ZHU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE-CONTROLLED SHOWERHEAD ASSEMBLY FOR CYCLIC VAPOR DEPOSITION
- Publication number 20240062993
- Publication date Feb 22, 2024
- EUGENUS, INC.
- Martin J. Salinas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR AUTO CORRECTION OF SUBSTRATE MISALIGNMENT
- Publication number 20240035162
- Publication date Feb 1, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BATCH PROCESSING APPARATUS, SYSTEMS, AND RELATED METHODS AND STRUCT...
- Publication number 20240021444
- Publication date Jan 18, 2024
- Applied Materials, Inc.
- Manjunath SUBBANNA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLOW GUIDE STRUCTURES AND HEAT SHIELD STRUCTURES, AND RELATED METHO...
- Publication number 20240018658
- Publication date Jan 18, 2024
- Applied Materials, Inc.
- Zuoming ZHU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BATCH PROCESSING APPARATUS, SYSTEMS, AND RELATED METHODS AND STRUCT...
- Publication number 20240018688
- Publication date Jan 18, 2024
- Applied Materials, Inc.
- Errol Antonio C. SANCHEZ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PRECLEAN SYSTEM FOR CLUSTER TOOL
- Publication number 20230402268
- Publication date Dec 14, 2023
- Applied Materials, Inc.
- Songjae LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ABATEMENT AND STRIP PROCESS CHAMBER IN A LOAD LOCK CONFIGURATION
- Publication number 20230162984
- Publication date May 25, 2023
- Applied Materials, Inc.
- Martin Jeffrey SALINAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLUSTER TOOLS, SYSTEMS, AND METHODS HAVING ONE OR MORE PRESSURE STA...
- Publication number 20230075715
- Publication date Mar 9, 2023
- Applied Materials, Inc.
- Saurabh CHOPRA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSOR DELIVERY SYSTEM AND METHOD FOR HIGH SPEED CYCLIC DEPOSITION
- Publication number 20220267898
- Publication date Aug 25, 2022
- EUGENUS, INC.
- Martin J. Salinas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSOR DELIVERY SYSTEM AND METHOD FOR CYCLIC DEPOSITION
- Publication number 20220251704
- Publication date Aug 11, 2022
- EUGENUS, INC.
- Martin J. Salinas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA EROSION RESISTANT THIN FILM COATING FOR HIGH TEMPERATURE APP...
- Publication number 20210010126
- Publication date Jan 14, 2021
- Applied Materials, Inc.
- Vahid Firouzdor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR SUBSTRATE TRANSFER AND RADICAL CONFINEMENT
- Publication number 20200411350
- Publication date Dec 31, 2020
- Applied Materials, Inc.
- Jared Ahmad LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ABATEMENT AND STRIP PROCESS CHAMBER IN A LOAD LOCK CONFIGURATION
- Publication number 20200144067
- Publication date May 7, 2020
- Applied Materials, Inc.
- Martin Jeffrey SALINAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ABATEMENT AND STRIP PROCESS CHAMBER IN A DUAL LOADLOCK CONFIGURATION
- Publication number 20200126802
- Publication date Apr 23, 2020
- Appled Materials, Inc.
- Jared Ahmad LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR SUBSTRATE TRANSFER AND RADICAL CONFINEMENT
- Publication number 20200066563
- Publication date Feb 27, 2020
- Applied Materials, Inc.
- Jared Ahmad LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ABATEMENT AND STRIP PROCESS CHAMBER IN A LOAD LOCK CONFIGURATION
- Publication number 20200051825
- Publication date Feb 13, 2020
- Applied Materials, Inc.
- Martin Jeffrey SALINAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ABATEMENT AND STRIP PROCESS CHAMBER IN A DUAL LOADLOCK CONFIGURATION
- Publication number 20200027742
- Publication date Jan 23, 2020
- Applied Materials, Inc.
- Jared Ahmad Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COOLING MECHANISM UTLIZED IN A PLASMA REACTOR WITH ENHANCED TEMPERA...
- Publication number 20190198295
- Publication date Jun 27, 2019
- Applied Materials, Inc.
- Aniruddha PAL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR SUBSTRATE TRANSFER AND RADICAL CONFINEMENT
- Publication number 20180247850
- Publication date Aug 30, 2018
- Applied Materials, Inc.
- Jared Ahmad LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA EROSION RESISTANT THIN FILM COATING FOR HIGH TEMPERATURE APP...
- Publication number 20180230587
- Publication date Aug 16, 2018
- Applied Materials, Inc.
- Vahid Firouzdor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN HEATED SUBSTRATE SUPPORT
- Publication number 20170040192
- Publication date Feb 9, 2017
- Applied Materials, Inc.
- Imad Yousif
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INDUCTIVELY COUPLED PLASMA APPARATUS
- Publication number 20160196953
- Publication date Jul 7, 2016
- Applied Materials, Inc.
- VALENTIN N. TODOROW
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR SELF-REGULATING FLUID CHEMICAL DELIVERY
- Publication number 20160004259
- Publication date Jan 7, 2016
- Applied Materials, Inc.
- MARTIN JEFF SALINAS
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
PLASMA EROSION RESISTANT THIN FILM COATING FOR HIGH TEMPERATURE APP...
- Publication number 20150307982
- Publication date Oct 29, 2015
- Applied Materials, Inc.
- Vahid Firouzdor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COOLING MECHANISM UTLIZED IN A PLASMA REACTOR WITH ENHANCED TEMPERA...
- Publication number 20150279634
- Publication date Oct 1, 2015
- Applied Materials, Inc.
- Aniruddha PAL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Film Deposition Using Spatial Atomic Layer Deposition Or Pulsed Che...
- Publication number 20150194298
- Publication date Jul 9, 2015
- Applied Materials, Inc.
- Yu Lei
- H01 - BASIC ELECTRIC ELEMENTS

MARTIN JEFF SALINAS

Person

Patents Grantslast 30 patents

Abatement and strip process chamber in a load lock configuration

Cluster tools, systems, and methods having one or more pressure sta...

Plasma erosion resistant thin film coating for high temperature app...

Method and apparatus for substrate transfer and radical confinement

Abatement and strip process chamber in a dual loadlock configuration

Abatement and strip process chamber in a dual load lock configuration

Cooling mechanism utilized in a plasma reactor with enhanced temper...

Abatement and strip process chamber in a load lock configuration

Plasma erosion resistant thin film coating for high temperature app...

Inductively coupled plasma apparatus

Abatement and strip process chamber in a load lock configuration

Method and apparatus for substrate transfer and radical confinement

Abatement and strip process chamber in a dual loadlock configuration

Cooling mechanism utlized in a plasma reactor with enhanced tempera...

Thin heated substrate support

Method and apparatus for substrate transfer and radical confinement

Particle reduction via throttle gate valve purge

Plasma erosion resistant thin film coating for high temperature app...

Thermal management of edge ring in semiconductor processing

Substrate placement detection in semiconductor equipment using ther...

Apparatus and method for self-regulating fluid chemical delivery

Methods and apparatus for providing a gas mixture to a pair of proc...

Film deposition using spatial atomic layer deposition or pulsed che...

Apparatus for uniform pumping within a substrate process chamber

Plasma reactor with tiltable overhead RF inductive source

Methods and apparatus for providing a gas mixture to a pair of proc...

Plasma reactor with minimal D.C. coils for cusp, solenoid and mirro...

Apparatus for radial delivery of gas to a chamber and methods of us...

Plasma reactor with tiltable overhead RF inductive source

Method and apparatus for removing polymer from the wafer backside a...

Patents Applicationslast 30 patents

SHOWERHEAD ASSEMBLY FOR CYCLIC VAPOR DEPOSITION WITH ENHANCED GAS M...

INJECTORS, LINERS, PROCESS KITS, PROCESSING CHAMBERS, AND RELATED M...

LIFT ASSEMBLIES, AND RELATED METHODS AND COMPONENTS, FOR SUBSTRATE...

METHODS OF CORRELATING ZONES OF PROCESSING CHAMBERS, AND RELATED SY...

TEMPERATURE-CONTROLLED SHOWERHEAD ASSEMBLY FOR CYCLIC VAPOR DEPOSITION

SYSTEM AND METHOD FOR AUTO CORRECTION OF SUBSTRATE MISALIGNMENT

BATCH PROCESSING APPARATUS, SYSTEMS, AND RELATED METHODS AND STRUCT...

FLOW GUIDE STRUCTURES AND HEAT SHIELD STRUCTURES, AND RELATED METHO...

BATCH PROCESSING APPARATUS, SYSTEMS, AND RELATED METHODS AND STRUCT...

PLASMA PRECLEAN SYSTEM FOR CLUSTER TOOL

ABATEMENT AND STRIP PROCESS CHAMBER IN A LOAD LOCK CONFIGURATION

CLUSTER TOOLS, SYSTEMS, AND METHODS HAVING ONE OR MORE PRESSURE STA...

PRECURSOR DELIVERY SYSTEM AND METHOD FOR HIGH SPEED CYCLIC DEPOSITION

PRECURSOR DELIVERY SYSTEM AND METHOD FOR CYCLIC DEPOSITION

PLASMA EROSION RESISTANT THIN FILM COATING FOR HIGH TEMPERATURE APP...

METHOD AND APPARATUS FOR SUBSTRATE TRANSFER AND RADICAL CONFINEMENT

ABATEMENT AND STRIP PROCESS CHAMBER IN A LOAD LOCK CONFIGURATION

ABATEMENT AND STRIP PROCESS CHAMBER IN A DUAL LOADLOCK CONFIGURATION

METHOD AND APPARATUS FOR SUBSTRATE TRANSFER AND RADICAL CONFINEMENT

ABATEMENT AND STRIP PROCESS CHAMBER IN A LOAD LOCK CONFIGURATION

ABATEMENT AND STRIP PROCESS CHAMBER IN A DUAL LOADLOCK CONFIGURATION

COOLING MECHANISM UTLIZED IN A PLASMA REACTOR WITH ENHANCED TEMPERA...

METHOD AND APPARATUS FOR SUBSTRATE TRANSFER AND RADICAL CONFINEMENT

PLASMA EROSION RESISTANT THIN FILM COATING FOR HIGH TEMPERATURE APP...

THIN HEATED SUBSTRATE SUPPORT

INDUCTIVELY COUPLED PLASMA APPARATUS

APPARATUS AND METHOD FOR SELF-REGULATING FLUID CHEMICAL DELIVERY

PLASMA EROSION RESISTANT THIN FILM COATING FOR HIGH TEMPERATURE APP...

COOLING MECHANISM UTLIZED IN A PLASMA REACTOR WITH ENHANCED TEMPERA...

Film Deposition Using Spatial Atomic Layer Deposition Or Pulsed Che...