TREA

Martin Mahlmann

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  • Tuebingen, DE
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Patents Grantslast 30 patents

  • Information Patent Grant

    Optical projection system
    • Patent number 9,891,535
    • Issue date Feb 13, 2018
    • Carl Zeiss SMT GmbH
    • Johannes Rau
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Optical projection system
    • Patent number 9,557,653
    • Issue date Jan 31, 2017
    • Carl Zeiss SMT GmbH
    • Johannes Rau
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Optical projection system
    • Patent number 9,104,016
    • Issue date Aug 11, 2015
    • Carl Zeiss SMT GmbH
    • Johannes Rau
    • G02 - OPTICS
  • Information Patent Grant

    Projection exposure apparatus for semiconductor lithography includi...
    • Patent number 9,030,644
    • Issue date May 12, 2015
    • Carl Zeiss SMT GmbH
    • Benjamin Sigel
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Optical projection system
    • Patent number 8,300,210
    • Issue date Oct 30, 2012
    • Carl Zeiss SMT GmbH
    • Johannes Rau
    • G02 - OPTICS
  • Information Patent Grant

    Optical imaging device
    • Patent number 7,548,387
    • Issue date Jun 16, 2009
    • Carl Zeiss SMT AG
    • Thorsten Rassel
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Flange assembly of an optical system
    • Patent number 7,265,919
    • Issue date Sep 4, 2007
    • Carl Zeiss SMT AG
    • Johannes Rau
    • G02 - OPTICS

Patents Applicationslast 30 patents