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Martin N. Scales
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San Jose, CA, US
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last 30 patents
Information
Patent Grant
Article for polishing semiconductor substrates
Patent number
7,014,538
Issue date
Mar 21, 2006
Applied Materials, Inc.
James V. Tietz
B24 - GRINDING POLISHING
Information
Patent Grant
Platen for retaining polishing material
Patent number
6,592,439
Issue date
Jul 15, 2003
Applied Materials, Inc.
Shijian Li
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus and methods for chemical mechanical polishing with an inc...
Patent number
6,520,841
Issue date
Feb 18, 2003
Applied Materials, Inc.
Manoocher Birang
B24 - GRINDING POLISHING
Information
Patent Grant
System for chemical mechanical planarization
Patent number
6,413,873
Issue date
Jul 2, 2002
Applied Materials, Inc.
Shijian Li
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus for aligning substrate to chuck in processing chamber
Patent number
6,126,382
Issue date
Oct 3, 2000
Novellus Systems, Inc.
Martin N. Scales
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Fixed abrasive articles
Publication number
20040082288
Publication date
Apr 29, 2004
APPLIED MATERIALS, INC.
James V. Tietz
B24 - GRINDING POLISHING
Information
Patent Application
Apparatus and methods for chemical mechanical polishing with an inc...
Publication number
20020052171
Publication date
May 2, 2002
Manoocher Birang
B24 - GRINDING POLISHING