Martin Rath

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Adelmannsfelden, DE

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Patents Grantslast 30 patents

Information Patent Grant
Optical membrane element having a longitudinally adjustable connect...
- Patent number 10,254,655
- Issue date Apr 9, 2019
- Carl Zeiss SMT GmbH
- Ulrich Mueller
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical membrane element having a longitudinally adjustable connect...
- Patent number 9,075,321
- Issue date Jul 7, 2015
- Carl Zeiss SMT GmbH
- Ulrich Mueller
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for arranging an optical module in a measuring apparatus and...
- Patent number 8,400,618
- Issue date Mar 19, 2013
- Carl Zeiss SMT GmbH
- Martin Rath
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL MEMBRANE ELEMENT HAVING A LONGITUDINALLY ADJUSTABLE CONNECT...
- Publication number 20150277230
- Publication date Oct 1, 2015
- Carl Zeiss SMT GMBH
- Ulrich Mueller
- G02 - OPTICS
Information Patent Application
SHUTTER DEVICE FOR A LITHOGRAPHY APPARATUS AND LITHOGRAPHY APPARATUS
- Publication number 20120162626
- Publication date Jun 28, 2012
- Carl Zeiss SMT GMBH
- Marten Krebs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR ARRANGING AN OPTICAL MODULE IN A MEASURING APPARATUS AND...
- Publication number 20100208230
- Publication date Aug 19, 2010
- Carl Zeiss SMT AG
- Martin Rath
- G02 - OPTICS
Information Patent Application
OPTICAL MEMBRANE ELEMENT
- Publication number 20100195076
- Publication date Aug 5, 2010
- Carl Zeiss SMT AG
- Ulrich Mueller
- G02 - OPTICS