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Martin Weber
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Elzach, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Device and method for the treatment of substrates in a fluid container
Patent number
6,647,641
Issue date
Nov 18, 2003
STEAG MicroTech GmbH
Martin Weber
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and device for drying substrates
Patent number
6,539,956
Issue date
Apr 1, 2003
STEAG MicroTech GmbH
Klaus Wolke
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Installation for wet-treating substrates
Patent number
6,269,822
Issue date
Aug 7, 2001
STEAG MicroTech GmbH
Jurgen Funkhanel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treatment device
Patent number
6,244,282
Issue date
Jun 12, 2001
STEAG MicroTech GmbH
Martin Weber
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for drying substrates
Patent number
6,128,829
Issue date
Oct 10, 2000
Steag MicroTech GmbH
Klaus Wolke
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device for treating substrates in a fluid container
Patent number
5,992,431
Issue date
Nov 30, 1999
Steag MicroTech GmbH
Martin Weber
B08 - CLEANING
Information
Patent Grant
Device and method for treating substrates in a fluid container
Patent number
5,954,068
Issue date
Sep 21, 1999
Steag MicroTech GmbH
Martin Weber
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device for treating substrates in a fluid container
Patent number
5,921,257
Issue date
Jul 13, 1999
Steag MicroTech GmbH
Martin Weber
B08 - CLEANING
Patents Applications
last 30 patents
Information
Patent Application
Device for cleaning wafers after a cmp process
Publication number
20060219275
Publication date
Oct 5, 2006
RENA Sondermaschinen GmbH
Martin Weber
H01 - BASIC ELECTRIC ELEMENTS