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Santa Clara, CA, US
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last 30 patents
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Patent Grant
Methods for stripping photoresist and/or cleaning metal regions
Patent number
8,435,895
Issue date
May 7, 2013
Novellus Systems, Inc.
David Chen
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
METHODS FOR STRIPPING PHOTORESIST AND/OR CLEANING METAL REGIONS
Publication number
20130157465
Publication date
Jun 20, 2013
David Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR STRIPPING PHOTORESIST AND/OR CLEANING METAL REGIONS
Publication number
20080248656
Publication date
Oct 9, 2008
Novellus Systems, Inc.
David Chen
H01 - BASIC ELECTRIC ELEMENTS