Marvin Farley

Person

Ipswich, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Ion source with multiple bias electrodes
- Patent number 11,545,330
- Issue date Jan 3, 2023
- Axcelis Technologies, Inc.
- Wilhelm Platow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stepped indirectly heated cathode with improved shielding
- Patent number 11,244,800
- Issue date Feb 8, 2022
- Axcelis Technologies, Inc.
- Wilhelm Platow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer cooling system and method
- Patent number 10,403,503
- Issue date Sep 3, 2019
- Axcelis Technologies, Inc.
- Marvin Farley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer cooling apparatus and method
- Patent number 9,978,599
- Issue date May 22, 2018
- Axcelis Technologies, Inc.
- Marvin Farley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Optical heat source with restricted wavelengths for process heating
- Patent number 9,842,752
- Issue date Dec 12, 2017
- Axcelis Technologies, Inc.
- David Bernhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bipolar wafer charge monitor system and ion implantation system com...
- Patent number 9,558,914
- Issue date Jan 31, 2017
- Axcelis Technologies, Inc.
- Marvin Farley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation system and method with variable energy control
- Patent number 9,218,941
- Issue date Dec 22, 2015
- Axcelis Technologies, Inc.
- Causon Ko-Chuan Jen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low-inertia multi-axis multi-directional mechanically scanned ion i...
- Patent number 8,227,768
- Issue date Jul 24, 2012
- Axcelis Technologies, Inc.
- Theodore Smick
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Ion beam angle calibration and emittance measurement system for rib...
- Patent number 8,168,941
- Issue date May 1, 2012
- Axcelis Technologies, Inc.
- Marvin Farley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Post-decel magnetic energy filter for ion implantation systems
- Patent number 8,124,946
- Issue date Feb 28, 2012
- Axcelis Technologies. Inc.
- Geoffrey Ryding
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam guide tube
- Patent number 7,872,247
- Issue date Jan 18, 2011
- Applied Materials, Inc.
- Geoffrey Ryding
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of implanting a substrate and an ion implanter for performin...
- Patent number 7,611,975
- Issue date Nov 3, 2009
- Applied Materials, Inc.
- Adrian Murrell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of scanning a substrate in an ion implanter
- Patent number 7,582,883
- Issue date Sep 1, 2009
- Applied Materials, Inc.
- Geoffrey Ryding
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam diagnostics
- Patent number 7,479,644
- Issue date Jan 20, 2009
- Applied Materials, Inc.
- Geoffrey Ryding
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of implanting a substrate and an ion implanter for performin...
- Patent number 7,282,427
- Issue date Oct 16, 2007
- Applied Materials, Inc.
- Adrian Murrell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of implanting a substrate and an ion implanter for performin...
- Patent number 7,253,424
- Issue date Aug 7, 2007
- Applied Materials, Inc.
- Adrian Murrell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of implanting a substrate and an ion implanter for performin...
- Patent number 7,235,797
- Issue date Jun 26, 2007
- Applied Materials, Inc.
- Adrian Murrell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of implanting a substrate and an ion implanter for performin...
- Patent number 7,049,210
- Issue date May 23, 2006
- Applied Materials, Inc.
- Adrian Murrell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
SIMOX using controlled water vapor for oxygen implants
- Patent number 6,989,315
- Issue date Jan 24, 2006
- Ibis Technology, Inc.
- Robert Dolan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-directional scanning of movable member and ion beam monitorin...
- Patent number 6,956,223
- Issue date Oct 18, 2005
- Applied Materials, Inc.
- Theodore H. Smick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of implanting a substrate and an ion implanter for performin...
- Patent number 6,908,836
- Issue date Jun 21, 2005
- Applied Materials, Inc.
- Adrian Murrell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Indirectly heated button cathode for an ion source
- Patent number 6,878,946
- Issue date Apr 12, 2005
- Applied Materials, Inc.
- Marvin Farley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implant dose control
- Patent number 6,870,170
- Issue date Mar 22, 2005
- Applied Materials, Inc.
- Marvin Farley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Determining beam alignment in ion implantation using Rutherford Bac...
- Patent number 6,555,832
- Issue date Apr 29, 2003
- Applied Materials, Inc.
- Geoffrey Ryding
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum bearing structure and a method of supporting a movable member
- Patent number 6,515,288
- Issue date Feb 4, 2003
- Applied Materials, Inc.
- Geoffrey Ryding
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Ion extraction assembly
- Patent number 6,501,078
- Issue date Dec 31, 2002
- Applied Materials, Inc.
- Geoffrey Ryding
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for controlling a workpiece in a vacuum chamber
- Patent number 6,437,351
- Issue date Aug 20, 2002
- Applied Materials, Inc.
- Theodore H. Smick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Movable ion source assembly
- Patent number 6,331,713
- Issue date Dec 18, 2001
- Applied Materials, Inc.
- Theodore H. Smick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implant dose control
- Patent number 6,297,510
- Issue date Oct 2, 2001
- Applied Materials, Inc.
- Marvin Farley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fluid bearing vacuum seal assembly
- Patent number 6,274,875
- Issue date Aug 14, 2001
- Applied Materials, Inc.
- Theodore H. Smick
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Patents Applicationslast 30 patents

Information Patent Application
ION SOURCE WITH MULTIPLE BIAS ELECTRODES
- Publication number 20220367138
- Publication date Nov 17, 2022
- Axcelis Technologies, Inc.
- Wilhelm Platow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STEPPED INDIRECTLY HEATED CATHODE WITH IMPROVED SHIELDING
- Publication number 20210398765
- Publication date Dec 23, 2021
- Axcelis Technologies, Inc.
- Wilhelm Platow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER COOLING METHOD
- Publication number 20180233367
- Publication date Aug 16, 2018
- Axcelis Technologies, Inc.
- Marvin Farley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER COOLING METHOD
- Publication number 20170352544
- Publication date Dec 7, 2017
- Axcelis Technologies, Inc.
- Marvin Farley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BIPOLAR WAFER CHARGE MONITOR SYSTEM AND ION IMPLANTATION SYSTEM COM...
- Publication number 20160247664
- Publication date Aug 25, 2016
- Axcelis Technologies, Inc.
- Marvin Farley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion Implantation System and Method with Variable Energy Control
- Publication number 20150200073
- Publication date Jul 16, 2015
- Axcelis Technologies, Inc.
- Causon Ko-Chuan Jen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL HEAT SOURCE WITH RESTRICTED WAVELENGTHS FOR PROCESS HEATING
- Publication number 20150037983
- Publication date Feb 5, 2015
- David Bernhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dose Measurement Method using Calorimeter
- Publication number 20120161037
- Publication date Jun 28, 2012
- Axcelis Technologies, Inc.
- Marvin Farley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Post Implant Wafer Heating Using Light
- Publication number 20110291022
- Publication date Dec 1, 2011
- Axcelis Technologies, Inc.
- William D. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion beam monitoring arrangement
- Publication number 20110042578
- Publication date Feb 24, 2011
- Adrian Murrell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM ANGLE CALIBRATION AND EMITTANCE MEASUREMENT SYSTEM FOR RIB...
- Publication number 20100181470
- Publication date Jul 22, 2010
- Axcelis Technologies, Inc.
- Marvin Farley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW-INERTIA MULTI-AXIS MULTI-DIRECTIONAL MECHANICALLY SCANNED ION I...
- Publication number 20090321631
- Publication date Dec 31, 2009
- Axcelis Technologies, Inc.
- Theodore Smick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POST-DECEL MAGNETIC ENERGY FILTER FOR ION IMPLANTATION SYSTEMS
- Publication number 20090321630
- Publication date Dec 31, 2009
- Axcelis Technologies, Inc.
- Geoffrey Ryding
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion beam guide tube
- Publication number 20090095916
- Publication date Apr 16, 2009
- APPLIED MATERIALS, INC.
- Geoffrey Ryding
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of scanning a substrate in an ion implanter
- Publication number 20080169434
- Publication date Jul 17, 2008
- APPLIED MATERIALS, INC.
- Geoffrey Ryding
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion beam monitoring arrangement
- Publication number 20080169435
- Publication date Jul 17, 2008
- APPLIED MATERIALS, INC.
- Takao Sakase
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion beam diagnostics
- Publication number 20080142727
- Publication date Jun 19, 2008
- APPLIED MATERIALS, INC.
- Geoffrey Ryding
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Shaped apertures in an ion implanter
- Publication number 20080099696
- Publication date May 1, 2008
- APPLIED MATERIALS, INC.
- Geoffrey Ryding
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF IMPLANTING A SUBSTRATE AND AN ION IMPLANTER FOR PERFORMIN...
- Publication number 20070259511
- Publication date Nov 8, 2007
- Adrian Murrell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of implanting a substrate and an ion implanter for performin...
- Publication number 20070105355
- Publication date May 10, 2007
- Applied Materials, Inc.
- Adrian Murrell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of implanting a substrate and an ion implanter for performin...
- Publication number 20060197016
- Publication date Sep 7, 2006
- Adrian Murrell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of implanting a substrate and an ion implanter for performin...
- Publication number 20050269527
- Publication date Dec 8, 2005
- APPLIED MATERIALS, INC.
- Adrian Murrell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion beam monitoring arrangement
- Publication number 20050191409
- Publication date Sep 1, 2005
- Adrian Murrell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion implantation
- Publication number 20050181584
- Publication date Aug 18, 2005
- APPLIED MATERIALS, INC.
- Majeed Foad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of implanting a substrate and an ion implanter for performin...
- Publication number 20040191931
- Publication date Sep 30, 2004
- Applied Materials Inc.
- Adrian Murrell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Indirectly heated button cathode for an ion source
- Publication number 20040061068
- Publication date Apr 1, 2004
- APPLIED MATERIALS, INC.
- Marvin Farley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of implanting a substrate and an ion implanter for performin...
- Publication number 20040058513
- Publication date Mar 25, 2004
- Adrian Murrell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-directional scanning of movable member and ion beam monitorin...
- Publication number 20030192474
- Publication date Oct 16, 2003
- Theodore H. Smick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Indirectly heated button cathode for an ion source
- Publication number 20030168609
- Publication date Sep 11, 2003
- Marvin Farley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Simox using controlled water vapor for oxygen implants
- Publication number 20020016046
- Publication date Feb 7, 2002
- Robert Dolan
- H01 - BASIC ELECTRIC ELEMENTS

Marvin Farley

Person

Patents Grantslast 30 patents

Ion source with multiple bias electrodes

Stepped indirectly heated cathode with improved shielding

Wafer cooling system and method

Wafer cooling apparatus and method

Optical heat source with restricted wavelengths for process heating

Bipolar wafer charge monitor system and ion implantation system com...

Ion implantation system and method with variable energy control

Low-inertia multi-axis multi-directional mechanically scanned ion i...

Ion beam angle calibration and emittance measurement system for rib...

Post-decel magnetic energy filter for ion implantation systems

Ion beam guide tube

Method of implanting a substrate and an ion implanter for performin...

Method of scanning a substrate in an ion implanter

Ion beam diagnostics

Method of implanting a substrate and an ion implanter for performin...

Method of implanting a substrate and an ion implanter for performin...

Method of implanting a substrate and an ion implanter for performin...

Method of implanting a substrate and an ion implanter for performin...

SIMOX using controlled water vapor for oxygen implants

Multi-directional scanning of movable member and ion beam monitorin...

Method of implanting a substrate and an ion implanter for performin...

Indirectly heated button cathode for an ion source

Ion implant dose control

Determining beam alignment in ion implantation using Rutherford Bac...

Vacuum bearing structure and a method of supporting a movable member

Ion extraction assembly

Method and apparatus for controlling a workpiece in a vacuum chamber

Movable ion source assembly

Ion implant dose control

Fluid bearing vacuum seal assembly

Patents Applicationslast 30 patents

ION SOURCE WITH MULTIPLE BIAS ELECTRODES

STEPPED INDIRECTLY HEATED CATHODE WITH IMPROVED SHIELDING

WAFER COOLING METHOD

WAFER COOLING METHOD

BIPOLAR WAFER CHARGE MONITOR SYSTEM AND ION IMPLANTATION SYSTEM COM...

Ion Implantation System and Method with Variable Energy Control

OPTICAL HEAT SOURCE WITH RESTRICTED WAVELENGTHS FOR PROCESS HEATING

Dose Measurement Method using Calorimeter

Post Implant Wafer Heating Using Light

Ion beam monitoring arrangement

ION BEAM ANGLE CALIBRATION AND EMITTANCE MEASUREMENT SYSTEM FOR RIB...

LOW-INERTIA MULTI-AXIS MULTI-DIRECTIONAL MECHANICALLY SCANNED ION I...

POST-DECEL MAGNETIC ENERGY FILTER FOR ION IMPLANTATION SYSTEMS

Ion beam guide tube

Method of scanning a substrate in an ion implanter

Ion beam monitoring arrangement

Ion beam diagnostics

Shaped apertures in an ion implanter

METHOD OF IMPLANTING A SUBSTRATE AND AN ION IMPLANTER FOR PERFORMIN...

Method of implanting a substrate and an ion implanter for performin...

Method of implanting a substrate and an ion implanter for performin...

Method of implanting a substrate and an ion implanter for performin...

Ion beam monitoring arrangement

Ion implantation

Method of implanting a substrate and an ion implanter for performin...

Indirectly heated button cathode for an ion source

Method of implanting a substrate and an ion implanter for performin...

Multi-directional scanning of movable member and ion beam monitorin...

Indirectly heated button cathode for an ion source

Simox using controlled water vapor for oxygen implants