Masaaki Itou

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Higashimurayama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Workpiece having alignment marks for positioning a pattern at a dif...
- Patent number 5,408,320
- Issue date Apr 18, 1995
- Hitachi, Ltd.
- Soichi Katagiri
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection type X-ray lithography apparatus
- Patent number 5,305,364
- Issue date Apr 19, 1994
- Hitachi, Ltd.
- Kozo Mochiji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reflection mask
- Patent number 5,272,744
- Issue date Dec 21, 1993
- Hitachi, Ltd.
- Masaaki Itou
- B82 - NANO-TECHNOLOGY
Information Patent Grant
X-ray pattern masking by a reflective reduction projection optical...
- Patent number 5,222,112
- Issue date Jun 22, 1993
- Hitachi, Ltd.
- Tsuneo Terasawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of position detection and the method and apparatus of printi...
- Patent number 5,200,798
- Issue date Apr 6, 1993
- Hitachi, Ltd.
- Soichi Katagiri
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
X-ray exposure apparatus
- Patent number 4,984,259
- Issue date Jan 8, 1991
- Hitachi, Ltd.
- Masaaki Itou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY