Masaaki Ueno

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 12,293,930
- Issue date May 6, 2025
- Kokusai Electric Corporation
- Shinobu Sugiura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heater, temperature control system, and processing apparatus
- Patent number 12,085,338
- Issue date Sep 10, 2024
- Kokusai Electric Corporation
- Tetsuya Kosugi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate temperature sensor, substrate retainer and substrate proc...
- Patent number 11,906,367
- Issue date Feb 20, 2024
- Kokusai Electric Corporation
- Tokunobu Akao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and non-transitory computer-readable...
- Patent number 11,761,087
- Issue date Sep 19, 2023
- Kokusai Electric Corporation
- Masashi Sugishita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,049,742
- Issue date Jun 29, 2021
- Kokusai Electric Corporation
- Hideto Yamaguchi
- G01 - MEASURING TESTING
Information Patent Grant
Cooling unit, heat insulating structure, and substrate processing a...
- Patent number 11,043,402
- Issue date Jun 22, 2021
- Kokusai Electric Corporation
- Tetsuya Kosugi
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 10,418,293
- Issue date Sep 17, 2019
- Kokusai Electric Corporation
- Hideto Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus including heating and cooling device...
- Patent number 10,415,136
- Issue date Sep 17, 2019
- Kokusai Electric Corporation
- Motoya Takewaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electric furnace for substrate processing apparatus
- Patent number D860420
- Issue date Sep 17, 2019
- Kokusai Electric Corporation
- Tetsuya Kosugi
- D23 - Environmental heating and cooling
Information Patent Grant
Electric furnace for substrate processing apparatus
- Patent number D860419
- Issue date Sep 17, 2019
- Kokusai Electric Corporation
- Tetsuya Kosugi
- D23 - Environmental heating and cooling
Information Patent Grant
Substrate processing apparatus, heating apparatus, ceiling heat ins...
- Patent number 10,340,151
- Issue date Jul 2, 2019
- Kokusai Electric Corporation
- Tetsuya Kosugi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Protector tube for thermocouple
- Patent number D819463
- Issue date Jun 5, 2018
- Hitachi Kokusai Electric Inc.
- Tokunobu Akao
- D10 - Measuring, testing, or signalling instruments
Information Patent Grant
Protector tube for thermocouple
- Patent number D818850
- Issue date May 29, 2018
- Hitachi Kokusai Electric Inc.
- Tokunobu Akao
- D10 - Measuring, testing, or signalling instruments
Information Patent Grant
Thermometry tool for substrate processing apparatus
- Patent number D803075
- Issue date Nov 21, 2017
- Hitachi Kokusai Electric Inc.
- Tokunobu Akao
- D10 - Measuring, testing, or signalling instruments
Information Patent Grant
Heater supporting device
- Patent number 9,779,970
- Issue date Oct 3, 2017
- Hitachi Kokusai Electric Inc.
- Tetsuya Kosugi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 9,695,511
- Issue date Jul 4, 2017
- Hitachi Kokusai Electric Inc.
- Hitoshi Murata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Insulation structure and method of manufacturing semiconductor device
- Patent number 9,587,884
- Issue date Mar 7, 2017
- Hitachi Kokusai Electric Inc.
- Tetsuya Kosugi
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Substrate processing apparatus capable of switching control mode of...
- Patent number 9,418,881
- Issue date Aug 16, 2016
- Hitachi Kokusai Electric Inc.
- Shinobu Sugiura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature detecting apparatus, substrate processing apparatus and...
- Patent number 9,269,638
- Issue date Feb 23, 2016
- Hitachi Kokusai Electric Inc.
- Tetsuya Kosugi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heating apparatus, substrate processing apparatus employing the sam...
- Patent number 9,184,069
- Issue date Nov 10, 2015
- Hitachi Kokusai Electric Inc.
- Akira Hayashida
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Heating device, substrate processing apparatus, and method of manuf...
- Patent number 9,064,912
- Issue date Jun 23, 2015
- Hitachi Kokusai Electric, Inc.
- Hitoshi Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature detecting apparatus, substrate processing apparatus and...
- Patent number 8,822,240
- Issue date Sep 2, 2014
- Hitachi Kokusai Electric Inc.
- Tetsuya Kosugi
- G01 - MEASURING TESTING
Information Patent Grant
Heat treatment apparatus and method of manufacturing semiconductor...
- Patent number 8,734,148
- Issue date May 27, 2014
- Hitachi Kokusai Electric Inc.
- Keishin Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and film forming method
- Patent number 8,507,296
- Issue date Aug 13, 2013
- Hitachi Kokusai Electric Inc.
- Masaaki Ueno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,501,599
- Issue date Aug 6, 2013
- Hitachi Kokusai Electric Inc.
- Masaaki Ueno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, semiconductor device manufacturing...
- Patent number 8,417,394
- Issue date Apr 9, 2013
- Hitachi Kokusai Electric Inc.
- Masashi Sugishita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature adjustment method
- Patent number 8,367,975
- Issue date Feb 5, 2013
- Hitachi Kokusai Electric Inc.
- Masashi Sugishita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating apparatus, substrate processing apparatus employing the sam...
- Patent number 8,158,911
- Issue date Apr 17, 2012
- Hitachi Kokusai Electric Inc.
- Akira Hayashida
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing apparatus, coolant gas supply nozzle and semic...
- Patent number 8,148,271
- Issue date Apr 3, 2012
- Hitachi Kokusai Electric Inc.
- Masaaki Ueno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heating apparatus, substrate processing apparatus, and method of ma...
- Patent number 8,116,618
- Issue date Feb 14, 2012
- Hitachi Kokusai Electric Inc.
- Akira Hayashida
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
HEATER, TEMPERATURE CONTROL SYSTEM, AND PROCESSING APPARATUS
- Publication number 20240393050
- Publication date Nov 28, 2024
- Kokusai Electric Corporation
- Tetsuya KOSUGI
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
SUBSTRATE SUPPORTER, SUBSTRATE PROCESSING APPARATUS, METHOD OF MEAS...
- Publication number 20240234187
- Publication date Jul 11, 2024
- Kokusai Electric Corporation
- Hitoshi MURATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TEMPERATURE SENSOR, SUBSTRATE RETAINER AND SUBSTRATE PROC...
- Publication number 20240151591
- Publication date May 9, 2024
- Kokusai Electric Corporation
- Tokunobu AKAO
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE...
- Publication number 20230383411
- Publication date Nov 30, 2023
- Kokusai Electric Corporation
- Masashi SUGISHITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, RECORDING MEDIUM, AND METHOD OF MAN...
- Publication number 20230257883
- Publication date Aug 17, 2023
- Kokusai Electric Corporation
- Hideto YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROL METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR D...
- Publication number 20230221700
- Publication date Jul 13, 2023
- Kokusai Electric Corporation
- Hideto YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND APPARATUS FOR MANU...
- Publication number 20220122858
- Publication date Apr 21, 2022
- Kokusai Electric Corporation
- Hitoshi MURATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND APPARATUS FOR MANU...
- Publication number 20220122859
- Publication date Apr 21, 2022
- Kokusai Electric Corporation
- Hitoshi MURATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Manufacturing Semiconductor Device, Substrate Processing...
- Publication number 20210407865
- Publication date Dec 30, 2021
- Kokusai Electric Corporation
- Kenji SHINOZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
- Publication number 20210313205
- Publication date Oct 7, 2021
- Kokusai Electric Corporation
- Shinobu SUGIURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Temperature Sensor, Substrate Retainer and Substrate Proc...
- Publication number 20210181033
- Publication date Jun 17, 2021
- Kokusai Electric Corporation
- Tokunobu AKAO
- G01 - MEASURING TESTING
Information Patent Application
HEATER, TEMPERATURE CONTROL SYSTEM, AND PROCESSING APPARATUS
- Publication number 20200393197
- Publication date Dec 17, 2020
- KOKUSAI ELECTRIC CORPORATION
- Tetsuya KOSUGI
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, SEMICO...
- Publication number 20200333766
- Publication date Oct 22, 2020
- Kokusai Electric Corporation
- Masashi SUGISHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20190355630
- Publication date Nov 21, 2019
- Kokusai Electric Corporation
- Hideto YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus and Non-transitory Computer-readable...
- Publication number 20190276938
- Publication date Sep 12, 2019
- Kokusai Electric Corporation
- Masashi SUGISHITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COOLING UNIT, HEAT INSULATING STRUCTURE, AND SUBSTRATE PROCESSING A...
- Publication number 20190080941
- Publication date Mar 14, 2019
- Kokusai Electric Corporation
- Tetsuya KOSUGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20180040520
- Publication date Feb 8, 2018
- Hitachi Kokusai Electric, Inc.
- Hideto YAMAGUCHI
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20170186634
- Publication date Jun 29, 2017
- Hitachi Kokusai Electric Inc.
- Yoshihiko YANAGISAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND CEILING PART
- Publication number 20160376701
- Publication date Dec 29, 2016
- Hitachi Kokusai Electric Inc.
- Motoya TAKEWAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, SEMICO...
- Publication number 20150370245
- Publication date Dec 24, 2015
- Hitachi Kokusai Electric Inc.
- Masashi SUGISHITA
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, HEATING APPARATUS, CEILING HEAT INS...
- Publication number 20150221532
- Publication date Aug 6, 2015
- Hitachi Kokusai Electric Inc.
- Tetsuya KOSUGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
- Publication number 20150093909
- Publication date Apr 2, 2015
- Hitachi Kokusai Electric Inc.
- Hitoshi MURATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE DETECTING APPARATUS, SUBSTRATE PROCESSING APPARATUS AND...
- Publication number 20140342474
- Publication date Nov 20, 2014
- Hitachi Kokusai Electric Inc.
- Tetsuya KOSUGI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INSULATION STRUCTURE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20140287375
- Publication date Sep 25, 2014
- Hitachi Kokusai Electric Inc.
- Tetsuya KOSUGI
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20140120636
- Publication date May 1, 2014
- Hitachi Kokusai Electric Inc.
- Hideto YAMAGUCHI
- G01 - MEASURING TESTING
Information Patent Application
TEMPERATURE DETECTING APPARATUS, SUBSTRATE PROCESSING APPARATUS AND...
- Publication number 20130017628
- Publication date Jan 17, 2013
- Hitachi Kokusai Electric Inc.
- Tetsuya KOSUGI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, TEMPERATURE CONTROLLING METHOD OF S...
- Publication number 20120094010
- Publication date Apr 19, 2012
- Hitachi Kokusai Electric Inc.
- Shinobu SUGIURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATER SUPPORTING DEVICE
- Publication number 20110281226
- Publication date Nov 17, 2011
- Hitachi Kokusai Electric Inc.
- Tetsuya KOSUGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR...
- Publication number 20110207339
- Publication date Aug 25, 2011
- Hitachi Kokusai Electric Inc.
- Keishin YAMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUF...
- Publication number 20110021039
- Publication date Jan 27, 2011
- Hitachi Kokusai Electric Inc.
- Hitoshi MURATA
- H01 - BASIC ELECTRIC ELEMENTS

Masaaki Ueno

Person

Patents Grantslast 30 patents

Substrate processing apparatus, method of manufacturing semiconduct...

Heater, temperature control system, and processing apparatus

Substrate temperature sensor, substrate retainer and substrate proc...

Substrate processing apparatus and non-transitory computer-readable...

Substrate processing apparatus, method of manufacturing semiconduct...

Cooling unit, heat insulating structure, and substrate processing a...

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus including heating and cooling device...

Electric furnace for substrate processing apparatus

Electric furnace for substrate processing apparatus

Substrate processing apparatus, heating apparatus, ceiling heat ins...

Protector tube for thermocouple

Protector tube for thermocouple

Thermometry tool for substrate processing apparatus

Heater supporting device

Substrate processing apparatus, method of manufacturing semiconduct...

Insulation structure and method of manufacturing semiconductor device

Substrate processing apparatus capable of switching control mode of...

Temperature detecting apparatus, substrate processing apparatus and...

Heating apparatus, substrate processing apparatus employing the sam...

Heating device, substrate processing apparatus, and method of manuf...

Temperature detecting apparatus, substrate processing apparatus and...

Heat treatment apparatus and method of manufacturing semiconductor...

Substrate processing method and film forming method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus, semiconductor device manufacturing...

Temperature adjustment method

Heating apparatus, substrate processing apparatus employing the sam...

Substrate processing apparatus, coolant gas supply nozzle and semic...

Heating apparatus, substrate processing apparatus, and method of ma...

Patents Applicationslast 30 patents

HEATER, TEMPERATURE CONTROL SYSTEM, AND PROCESSING APPARATUS

SUBSTRATE SUPPORTER, SUBSTRATE PROCESSING APPARATUS, METHOD OF MEAS...

SUBSTRATE TEMPERATURE SENSOR, SUBSTRATE RETAINER AND SUBSTRATE PROC...

SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE...

SUBSTRATE PROCESSING APPARATUS, RECORDING MEDIUM, AND METHOD OF MAN...

TEMPERATURE CONTROL METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR D...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND APPARATUS FOR MANU...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND APPARATUS FOR MANU...

Method of Manufacturing Semiconductor Device, Substrate Processing...

Substrate Processing Apparatus, Method of Manufacturing Semiconduct...

Substrate Temperature Sensor, Substrate Retainer and Substrate Proc...

HEATER, TEMPERATURE CONTROL SYSTEM, AND PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, SEMICO...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

Substrate Processing Apparatus and Non-transitory Computer-readable...

COOLING UNIT, HEAT INSULATING STRUCTURE, AND SUBSTRATE PROCESSING A...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND CEILING PART

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, SEMICO...

SUBSTRATE PROCESSING APPARATUS, HEATING APPARATUS, CEILING HEAT INS...

Substrate Processing Apparatus, Method of Manufacturing Semiconduct...

TEMPERATURE DETECTING APPARATUS, SUBSTRATE PROCESSING APPARATUS AND...

INSULATION STRUCTURE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

TEMPERATURE DETECTING APPARATUS, SUBSTRATE PROCESSING APPARATUS AND...

SUBSTRATE PROCESSING APPARATUS, TEMPERATURE CONTROLLING METHOD OF S...

HEATER SUPPORTING DEVICE

HEAT TREATMENT APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR...

HEATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUF...