Masahiko Sekimoto

Person

Zushi-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Rinsing bath and substrate cleaning method using such rinsing bath
- Patent number 10,160,013
- Issue date Dec 25, 2018
- Ebara Corporation
- Masahiko Sekimoto
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate transfer method
- Patent number 10,141,211
- Issue date Nov 27, 2018
- Ebara Corporation
- Toshio Yokoyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method of transferring a substrate
- Patent number 9,786,532
- Issue date Oct 10, 2017
- Ebara Corporation
- Toshio Yokoyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holding apparatus, substrate holding method, and substrat...
- Patent number 8,777,198
- Issue date Jul 15, 2014
- Ebara Corporation
- Masahiko Sekimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and apparatus
- Patent number 8,225,803
- Issue date Jul 24, 2012
- Ebara Corporation
- Seiji Katsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate holding apparatus, substrate holding method, and substrat...
- Patent number 8,141,513
- Issue date Mar 27, 2012
- Ebara Corporation
- Masahiko Sekimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holder, plating apparatus, and plating method
- Patent number 8,133,376
- Issue date Mar 13, 2012
- Ebara Corporation
- Junichiro Yoshioka
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Apparatus and method for plating a substrate
- Patent number 8,048,282
- Issue date Nov 1, 2011
- Ebara Corporation
- Masahiko Sekimoto
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Substrate polishing apparatus and method
- Patent number 7,976,362
- Issue date Jul 12, 2011
- Ebara Corporation
- Seiji Katsuoka
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing method and apparatus
- Patent number 7,959,977
- Issue date Jun 14, 2011
- Ebara Corporation
- Seiji Katsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate holding apparatus, substrate holding method, and substrat...
- Patent number 7,886,685
- Issue date Feb 15, 2011
- Ebara Corporation
- Masahiko Sekimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holder, plating apparatus, and plating method
- Patent number 7,807,027
- Issue date Oct 5, 2010
- Ebara Corporation
- Junichiro Yoshioka
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Substrate processing method and apparatus
- Patent number 7,735,451
- Issue date Jun 15, 2010
- Ebara Corporation
- Seiji Katsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate holding apparatus
- Patent number 7,735,450
- Issue date Jun 15, 2010
- Ebara Corporation
- Seiji Katsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Polishing apparatus
- Patent number 7,632,378
- Issue date Dec 15, 2009
- Ebara Corporation
- Kunihiko Sakurai
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate polishing apparatus and method
- Patent number 7,585,205
- Issue date Sep 8, 2009
- Ebara Corporation
- Seiji Katsuoka
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,575,636
- Issue date Aug 18, 2009
- Ebara Corporation
- Seiji Katsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,442,257
- Issue date Oct 28, 2008
- Ebara Corporation
- Seiji Katsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing unit and substrate processing apparatus
- Patent number 7,368,016
- Issue date May 6, 2008
- Ebara Corporation
- Seiji Katsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for and method of processing substrate
- Patent number 7,341,634
- Issue date Mar 11, 2008
- Ebara Corporation
- Toshio Yokoyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,087,117
- Issue date Aug 8, 2006
- Ebara Corporation
- Seiji Katsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Polishing apparatus
- Patent number 7,063,600
- Issue date Jun 20, 2006
- Ebara Corporation
- Masao Yoshida
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,929,529
- Issue date Aug 16, 2005
- Ebara Corporation
- Masao Yoshida
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,878,044
- Issue date Apr 12, 2005
- Ebara Corporation
- Kunihiko Sakurai
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate holder, plating apparatus, and plating method
- Patent number 6,844,274
- Issue date Jan 18, 2005
- Ebara Corporation
- Junichiro Yoshioka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing apparatus
- Patent number 6,682,408
- Issue date Jan 27, 2004
- Ebara Corporation
- Kunihiko Sakurai
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,629,883
- Issue date Oct 7, 2003
- Ebara Corporation
- Seiji Katsuoka
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,358,128
- Issue date Mar 19, 2002
- Ebara Corporation
- Kunihiko Sakurai
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,354,922
- Issue date Mar 12, 2002
- Ebara Corporation
- Kunihiko Sakurai
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,293,855
- Issue date Sep 25, 2001
- Ebara Corporation
- Masao Yoshida
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE ATTACHING/DETACHING UNIT FOR SUBSTRATE HOLDER, WET-TYPE S...
- Publication number 20190214278
- Publication date Jul 11, 2019
- EBARA CORPORATION
- Toshio YOKOYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANFSER METHOD
- Publication number 20170358472
- Publication date Dec 14, 2017
- EBARA CORPORATION
- Toshio YOKOYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RINSING BATH AND SUBSTRATE CLEANING METHOD USING SUCH RINSING BATH
- Publication number 20160059271
- Publication date Mar 3, 2016
- EBARA CORPORATION
- Masahiko SEKIMOTO
- B08 - CLEANING
Information Patent Application
SUBSTRATE ATTACHING/DETACHING UNIT FOR SUBSTRATE HOLDER, WET-TYPE S...
- Publication number 20150357213
- Publication date Dec 10, 2015
- EBARA CORPORATION
- Toshio YOKOYAMA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND RESIST REMOVING UNIT
- Publication number 20150270147
- Publication date Sep 24, 2015
- EBARA CORPORATION
- Kenichi KOBAYASHI
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANFSER METHOD
- Publication number 20150270151
- Publication date Sep 24, 2015
- EBARA CORPORATION
- Toshio YOKOYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLATING APPARATUS AND PLATING METHOD
- Publication number 20130015075
- Publication date Jan 17, 2013
- Masahiko SEKIMOTO
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SUBSTRATE HOLDING APPARATUS, SUBSTRATE HOLDING METHOD, AND SUBSTRAT...
- Publication number 20120141246
- Publication date Jun 7, 2012
- Masahiko Sekimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE POLISHING APPARATUS AND METHOD
- Publication number 20110237163
- Publication date Sep 29, 2011
- Seiji Katsuoka
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND APPARATUS
- Publication number 20110203518
- Publication date Aug 25, 2011
- Seiji Katsuoka
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SUBSTRATE HOLDING APPARATUS, SUBSTRATE HOLDING METHOD, AND SUBSTRAT...
- Publication number 20110094442
- Publication date Apr 28, 2011
- Masahiko Sekimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HOLDER, PLATING APPARATUS, AND PLATING METHOD
- Publication number 20100320090
- Publication date Dec 23, 2010
- Junichiro Yoshioka
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SUBSTRATE PROCESSING METHOD AND APPARATUS
- Publication number 20100221432
- Publication date Sep 2, 2010
- Seiji Katsuoka
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
PLATING APPARATUS AND PLATING METHOD
- Publication number 20090301395
- Publication date Dec 10, 2009
- Masahiko SEKIMOTO
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SUBSTRATE POLISHING APPARATUS AND METHOD
- Publication number 20090291624
- Publication date Nov 26, 2009
- Seiji Katsuoka
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING UNIT, SUBSTRATE TRANSFER METHOD, SUBSTRATE CLE...
- Publication number 20090092469
- Publication date Apr 9, 2009
- EBARA CORPORATION
- Masahiko Sekimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and method for plating a substrate
- Publication number 20090045068
- Publication date Feb 19, 2009
- Masahiko Sekimoto
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Substrate processing unit and substrate processing apparatus
- Publication number 20080178800
- Publication date Jul 31, 2008
- Seiji Katsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate polishing apparatus and method
- Publication number 20080085658
- Publication date Apr 10, 2008
- Seiji Katsuoka
- B24 - GRINDING POLISHING
Information Patent Application
Substrate holding apparatus, substrate holding method, and substrat...
- Publication number 20070070575
- Publication date Mar 29, 2007
- Masahiko Sekimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20060243205
- Publication date Nov 2, 2006
- Seiji Katsuoka
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20060243204
- Publication date Nov 2, 2006
- Seiji Katsuoka
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20060236929
- Publication date Oct 26, 2006
- Seiji Katsuoka
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Plating apparatus and plating method
- Publication number 20060141157
- Publication date Jun 29, 2006
- Masahiko Sekimoto
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Polishing apparatus
- Publication number 20060003672
- Publication date Jan 5, 2006
- Masao Yoshida
- B24 - GRINDING POLISHING
Information Patent Application
Substrate processing unit and substrate processing apparatus
- Publication number 20050281947
- Publication date Dec 22, 2005
- Seiji Katsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Wet processing method and processing apparatus of substrate
- Publication number 20050208774
- Publication date Sep 22, 2005
- Akira Fukunaga
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Polishing apparatus
- Publication number 20050159082
- Publication date Jul 21, 2005
- Kunihiko Sakurai
- B24 - GRINDING POLISHING
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20050158478
- Publication date Jul 21, 2005
- Seiji Katsuoka
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Substrate holder, plating apparatus, and plating method
- Publication number 20050092600
- Publication date May 5, 2005
- Junichiro Yoshioka
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Masahiko Sekimoto

Person

Patents Grantslast 30 patents

Rinsing bath and substrate cleaning method using such rinsing bath

Substrate processing apparatus and substrate transfer method

Substrate processing apparatus and method of transferring a substrate

Substrate holding apparatus, substrate holding method, and substrat...

Substrate processing method and apparatus

Substrate holding apparatus, substrate holding method, and substrat...

Substrate holder, plating apparatus, and plating method

Apparatus and method for plating a substrate

Substrate polishing apparatus and method

Substrate processing method and apparatus

Substrate holding apparatus, substrate holding method, and substrat...

Substrate holder, plating apparatus, and plating method

Substrate processing method and apparatus

Substrate holding apparatus

Polishing apparatus

Substrate polishing apparatus and method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing unit and substrate processing apparatus

Apparatus for and method of processing substrate

Substrate processing apparatus and substrate processing method

Polishing apparatus

Polishing apparatus

Polishing apparatus

Substrate holder, plating apparatus, and plating method

Polishing apparatus

Polishing apparatus

Polishing apparatus

Polishing apparatus

Polishing apparatus

Patents Applicationslast 30 patents

SUBSTRATE ATTACHING/DETACHING UNIT FOR SUBSTRATE HOLDER, WET-TYPE S...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANFSER METHOD

RINSING BATH AND SUBSTRATE CLEANING METHOD USING SUCH RINSING BATH

SUBSTRATE ATTACHING/DETACHING UNIT FOR SUBSTRATE HOLDER, WET-TYPE S...

SUBSTRATE PROCESSING APPARATUS AND RESIST REMOVING UNIT

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANFSER METHOD

PLATING APPARATUS AND PLATING METHOD

SUBSTRATE HOLDING APPARATUS, SUBSTRATE HOLDING METHOD, AND SUBSTRAT...

SUBSTRATE POLISHING APPARATUS AND METHOD

SUBSTRATE PROCESSING METHOD AND APPARATUS

SUBSTRATE HOLDING APPARATUS, SUBSTRATE HOLDING METHOD, AND SUBSTRAT...

SUBSTRATE HOLDER, PLATING APPARATUS, AND PLATING METHOD

SUBSTRATE PROCESSING METHOD AND APPARATUS

PLATING APPARATUS AND PLATING METHOD

SUBSTRATE POLISHING APPARATUS AND METHOD

SUBSTRATE PROCESSING UNIT, SUBSTRATE TRANSFER METHOD, SUBSTRATE CLE...

Apparatus and method for plating a substrate

Substrate processing unit and substrate processing apparatus

Substrate polishing apparatus and method

Substrate holding apparatus, substrate holding method, and substrat...

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Plating apparatus and plating method

Polishing apparatus

Substrate processing unit and substrate processing apparatus

Wet processing method and processing apparatus of substrate

Polishing apparatus

Substrate processing apparatus and substrate processing method

Substrate holder, plating apparatus, and plating method