Masahiko Yasuda

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Position measurement method, position control method, measurement m...
- Patent number 10,222,708
- Issue date Mar 5, 2019
- Nikon Corporation
- Masahiko Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and method for producing device
- Patent number 10,209,623
- Issue date Feb 19, 2019
- Nikon Corporation
- Masahiko Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position measurement method, position control method, measurement m...
- Patent number 9,857,692
- Issue date Jan 2, 2018
- Nikon Corporation
- Masahiko Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and method for producing device
- Patent number 9,383,656
- Issue date Jul 5, 2016
- Nikon Corporation
- Masahiko Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position measurement method, position control method, measurement m...
- Patent number 9,348,238
- Issue date May 24, 2016
- NIKO CORPORATION
- Masahiko Yasuda
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Position measurement method, position control method, measurement m...
- Patent number 9,298,108
- Issue date Mar 29, 2016
- Nikon Corporation
- Masahiko Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position measurement method, position control method, measurement m...
- Patent number 9,223,231
- Issue date Dec 29, 2015
- Nikon Corporation
- Masahiko Yasuda
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Position measurement method, position control method, measurement m...
- Patent number 9,223,230
- Issue date Dec 29, 2015
- Nikon Corporation
- Masahiko Yasuda
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Exposure apparatus, exposure method, and method for producing device
- Patent number 9,063,438
- Issue date Jun 23, 2015
- Nikon Corporation
- Masahiko Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measurement method, measurement apparatus, exposure method, and exp...
- Patent number 8,947,665
- Issue date Feb 3, 2015
- Nikon Corporation
- Mitsuru Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position measurement method, position control method, measurement m...
- Patent number 8,576,379
- Issue date Nov 5, 2013
- Nikon Corporation
- Masahiko Yasuda
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Measurement method, measurement apparatus, exposure method, and exp...
- Patent number 8,477,310
- Issue date Jul 2, 2013
- Nikon Corporation
- Mitsuru Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and method for producing device
- Patent number 8,130,361
- Issue date Mar 6, 2012
- Nikon Corporation
- Masahiko Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position measurement method, position control method, measurement m...
- Patent number 8,072,578
- Issue date Dec 6, 2011
- Nikon Corporation
- Masahiko Yasuda
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Position measurement method, position control method, measurement m...
- Patent number 8,059,260
- Issue date Nov 15, 2011
- Nikon Corporation
- Masahiko Yasuda
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Position measurement method
- Patent number 8,054,465
- Issue date Nov 8, 2011
- Nikon Corporation
- Masahiko Yasuda
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Mask-holding apparatus for a light exposure apparatus and related s...
- Patent number 6,888,621
- Issue date May 3, 2005
- Nikon Corporation
- Yasuo Araki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment method and apparatus therefor
- Patent number 6,876,946
- Issue date Apr 5, 2005
- Nikon Corporation
- Masahiko Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Micro devices manufacturing method utilizing concave and convex ali...
- Patent number 6,641,962
- Issue date Nov 4, 2003
- Nikon Corporation
- Shinji Mizutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Micro devices manufacturing method and apparatus therefor
- Patent number 6,566,022
- Issue date May 20, 2003
- Nikon Corporation
- Shinji Mizutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method
- Patent number 6,549,271
- Issue date Apr 15, 2003
- Nikon Corporation
- Masahiko Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Polyurethane adhesive, method for use in bonding, and use of mixture
- Patent number 6,353,078
- Issue date Mar 5, 2002
- Kyowa Yuka Co., Ltd.
- Shigeru Murata
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Micro devices manufacturing method and apparatus therefor
- Patent number 6,306,548
- Issue date Oct 23, 2001
- Nikon Corporation
- Shinji Mizutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment method and apparatus therefor
- Patent number 6,278,957
- Issue date Aug 21, 2001
- Nikon Corporation
- Masahiko Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Micro devices manufacturing method and apparatus therefor
- Patent number 6,110,021
- Issue date Aug 29, 2000
- Nikon Corporation
- Kazuya Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Polyurethane and polyester polyol
- Patent number 6,087,466
- Issue date Jul 11, 2000
- Kyowa Yuka Co., Ltd.
- Shigeru Murata
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Projection exposure method and alignment
- Patent number 5,795,687
- Issue date Aug 18, 1998
- Nikon Corporation
- Masahiko Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Micro devices manufacturing method comprising the use of a second p...
- Patent number 5,601,957
- Issue date Feb 11, 1997
- Nikon Corporation
- Shinji Mizutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Magnetic coating formulations
- Patent number 5,330,669
- Issue date Jul 19, 1994
- Kyowa Hakko Kogyo Co., Ltd.
- Masahiko Yasuda
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Polyurethane resin containing a phosphoric acid group
- Patent number 5,292,853
- Issue date Mar 8, 1994
- Kyowa Hakko Kogyo Co., Ltd.
- Masahiko Yasuda
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE
- Publication number 20190155168
- Publication date May 23, 2019
- Nikon Corporation
- Masahiko YASUDA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITION MEASUREMENT METHOD, POSITION CONTROL METHOD, MEASUREMENT M...
- Publication number 20180081283
- Publication date Mar 22, 2018
- Nikon Corporation
- Masahiko YASUDA
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE
- Publication number 20160313650
- Publication date Oct 27, 2016
- Nikon Corporation
- Masahiko YASUDA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITION MEASUREMENT METHOD, POSITION CONTROL METHOD, MEASUREMENT M...
- Publication number 20160161861
- Publication date Jun 9, 2016
- Nikon Corporation
- Masahiko YASUDA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITION MEASUREMENT METHOD, POSITION CONTROL METHOD, MEASUREMENT M...
- Publication number 20160018745
- Publication date Jan 21, 2016
- Nikon Corporation
- Masahiko YASUDA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE
- Publication number 20150227058
- Publication date Aug 13, 2015
- Nikon Corporation
- Masahiko YASUDA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITION MEASUREMENT METHOD, POSITION CONTROL METHOD, MEASUREMENT M...
- Publication number 20130329201
- Publication date Dec 12, 2013
- Nikon Corporation
- Masahiko YASUDA
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
POSITION MEASUREMENT METHOD, POSITION CONTROL METHOD, MEASUREMENT M...
- Publication number 20130329208
- Publication date Dec 12, 2013
- Nikon Corporation
- Masahiko YASUDA
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
POSITION MEASUREMENT METHOD, POSITION CONTROL METHOD, MEASUREMENT M...
- Publication number 20130329200
- Publication date Dec 12, 2013
- Nikon Corporation
- Masahiko Yasuda
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
MEASUREMENT METHOD, MEASUREMENT APPARATUS, EXPOSURE METHOD, AND EXP...
- Publication number 20130027680
- Publication date Jan 31, 2013
- Nikon Corporation
- Mitsuru KOBAYASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE
- Publication number 20120120381
- Publication date May 17, 2012
- Nikon Corporation
- Masahiko Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITION MEASUREMENT METHOD, POSITION CONTROL METHOD, MEASUREMENT M...
- Publication number 20100134779
- Publication date Jun 3, 2010
- Nikon Corporation
- Masahiko Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Position measurement method, position control method, measurement m...
- Publication number 20080151267
- Publication date Jun 26, 2008
- Nikon Corporation
- Masahiko Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Position measurement method, position control method, measurement m...
- Publication number 20080151214
- Publication date Jun 26, 2008
- Nikon Corporation
- Masahiko Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Position measurement method, position control method, measurement m...
- Publication number 20080151257
- Publication date Jun 26, 2008
- Nikon Corporation
- Masahiko Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Measurement Method, Measurement Apparatus, Exposure Method, and Exp...
- Publication number 20080013073
- Publication date Jan 17, 2008
- Mitsuru Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Position measurement method, position control method, measurement m...
- Publication number 20070216893
- Publication date Sep 20, 2007
- Nikon Corporation
- Masahiko Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, exposure method, and method for producing device
- Publication number 20060187432
- Publication date Aug 24, 2006
- Nikon Corporation
- Masahiko Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Position measurement method, position control method, measurement m...
- Publication number 20060158632
- Publication date Jul 20, 2006
- Nikon Corporation
- Masahiko Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Mask-holding apparatus for a light exposure apparatus and related s...
- Publication number 20030197841
- Publication date Oct 23, 2003
- Nikon Corporation
- Yasuo Araki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Mask-holding apparatus for a light exposure apparatus and related s...
- Publication number 20030179354
- Publication date Sep 25, 2003
- Nikon Corporation
- Yasuo Araki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Alignment method and apparatus therefor
- Publication number 20030158701
- Publication date Aug 21, 2003
- NIKON CORPORATION
- Masahiko Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MICRO DEVICES MANUFACTURING METHOD UTILIZING CONCAVE AND CONVEX ALI...
- Publication number 20030157416
- Publication date Aug 21, 2003
- Nikon Corporation
- Shinji Mizutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and method
- Publication number 20030016338
- Publication date Jan 23, 2003
- Nikon Corporation
- Masahiko Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Micro devices manufacturing method and apparatus therefor
- Publication number 20020001761
- Publication date Jan 3, 2002
- Nikon Corporation
- Shinji Mizutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Alignment method and apparatus therefor
- Publication number 20010049589
- Publication date Dec 6, 2001
- NIKON CORPORATION
- Masahiko Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Masahiko Yasuda

Person

Patents Grantslast 30 patents

Position measurement method, position control method, measurement m...

Exposure apparatus, exposure method, and method for producing device

Position measurement method, position control method, measurement m...

Exposure apparatus, exposure method, and method for producing device

Position measurement method, position control method, measurement m...

Position measurement method, position control method, measurement m...

Position measurement method, position control method, measurement m...

Position measurement method, position control method, measurement m...

Exposure apparatus, exposure method, and method for producing device

Measurement method, measurement apparatus, exposure method, and exp...

Position measurement method, position control method, measurement m...

Measurement method, measurement apparatus, exposure method, and exp...

Exposure apparatus, exposure method, and method for producing device

Position measurement method, position control method, measurement m...

Position measurement method, position control method, measurement m...

Position measurement method

Mask-holding apparatus for a light exposure apparatus and related s...

Alignment method and apparatus therefor

Micro devices manufacturing method utilizing concave and convex ali...

Micro devices manufacturing method and apparatus therefor

Exposure apparatus and method

Polyurethane adhesive, method for use in bonding, and use of mixture

Micro devices manufacturing method and apparatus therefor

Alignment method and apparatus therefor

Micro devices manufacturing method and apparatus therefor

Polyurethane and polyester polyol

Projection exposure method and alignment

Micro devices manufacturing method comprising the use of a second p...

Magnetic coating formulations

Polyurethane resin containing a phosphoric acid group

Patents Applicationslast 30 patents

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE

POSITION MEASUREMENT METHOD, POSITION CONTROL METHOD, MEASUREMENT M...

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE

POSITION MEASUREMENT METHOD, POSITION CONTROL METHOD, MEASUREMENT M...

POSITION MEASUREMENT METHOD, POSITION CONTROL METHOD, MEASUREMENT M...

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE

POSITION MEASUREMENT METHOD, POSITION CONTROL METHOD, MEASUREMENT M...

POSITION MEASUREMENT METHOD, POSITION CONTROL METHOD, MEASUREMENT M...

POSITION MEASUREMENT METHOD, POSITION CONTROL METHOD, MEASUREMENT M...

MEASUREMENT METHOD, MEASUREMENT APPARATUS, EXPOSURE METHOD, AND EXP...

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE

POSITION MEASUREMENT METHOD, POSITION CONTROL METHOD, MEASUREMENT M...

Position measurement method, position control method, measurement m...

Position measurement method, position control method, measurement m...

Position measurement method, position control method, measurement m...

Measurement Method, Measurement Apparatus, Exposure Method, and Exp...

Position measurement method, position control method, measurement m...

Exposure apparatus, exposure method, and method for producing device

Position measurement method, position control method, measurement m...

Mask-holding apparatus for a light exposure apparatus and related s...

Mask-holding apparatus for a light exposure apparatus and related s...

Alignment method and apparatus therefor

MICRO DEVICES MANUFACTURING METHOD UTILIZING CONCAVE AND CONVEX ALI...

Exposure apparatus and method

Micro devices manufacturing method and apparatus therefor

Alignment method and apparatus therefor