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Masahiro MURATA
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Iwate, JP
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Patents Grants
last 30 patents
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Patent Grant
Film deposition method and film deposition apparatus
Patent number
10,844,487
Issue date
Nov 24, 2020
Tokyo Electron Limited
Yutaka Takahashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film deposition method
Patent number
10,480,067
Issue date
Nov 19, 2019
Tokyo Electron Limited
Hitoshi Kato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Protective film forming method
Patent number
10,431,452
Issue date
Oct 1, 2019
Tokyo Electron Limited
Yutaka Takahashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for processing a substrate and substrate processing apparatus
Patent number
10,151,031
Issue date
Dec 11, 2018
Tokyo Electron Limited
Hitoshi Kato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for depositing a silicon nitride film
Patent number
10,026,606
Issue date
Jul 17, 2018
Tokyo Electron Limited
Hitoshi Kato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for gap fill using deposition and etch processes
Patent number
9,865,499
Issue date
Jan 9, 2018
Tokyo Electron Limited
Jun Sato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of depositing a film, recording medium, and film deposition...
Patent number
9,777,369
Issue date
Oct 3, 2017
Tokyo Electron Limited
Hitoshi Kato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for processing a substrate and substrate processing apparatus
Patent number
9,714,467
Issue date
Jul 25, 2017
Tokyo Electron Limited
Hitoshi Kato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
FILM DEPOSITION METHOD AND FILM DEPOSITION APPARATUS
Publication number
20180237912
Publication date
Aug 23, 2018
TOKYO ELECTRON LIMITED
Yutaka TAKAHASHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PROTECTIVE FILM FORMING METHOD
Publication number
20180204716
Publication date
Jul 19, 2018
TOKYO ELECTRON LIMITED
Yutaka TAKAHASHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM-FORMING APPARATUS, FILM-FORMING METHOD, AND STORAGE MEDIUM
Publication number
20180051374
Publication date
Feb 22, 2018
TOKYO ELECTRON LIMITED
Hitoshi KATO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR DEPOSITING A SILICON NITRIDE FILM
Publication number
20180019114
Publication date
Jan 18, 2018
TOKYO ELECTRON LIMITED
Hitoshi KATO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR PROCESSING A SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS
Publication number
20170268104
Publication date
Sep 21, 2017
TOKYO ELECTRON LIMITED
Hitoshi KATO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM DEPOSITION METHOD
Publication number
20170253964
Publication date
Sep 7, 2017
TOKYO ELECTRON LIMITED
Hitoshi KATO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM DEPOSITION METHOD
Publication number
20170218510
Publication date
Aug 3, 2017
TOKYO ELECTRON LIMITED
Hitoshi KATO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND APPARATUS FOR DEPOSITING A SILICON-CONTAINING FILM
Publication number
20160379868
Publication date
Dec 29, 2016
TOKYO ELECTRON LIMITED
Jun SATO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR PROCESSING A SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS
Publication number
20150225849
Publication date
Aug 13, 2015
TOKYO ELECTRON LIMITED
Hitoshi KATO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF DEPOSITING A FILM, RECORDING MEDIUM, AND FILM DEPOSITION...
Publication number
20150004332
Publication date
Jan 1, 2015
TOKYO ELECTRON LIMITED
Hitoshi KATO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...