Masahiro MURATA

Person

  • Iwate, JP

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    FILM DEPOSITION METHOD AND FILM DEPOSITION APPARATUS

    • Publication number 20180237912
    • Publication date Aug 23, 2018
    • TOKYO ELECTRON LIMITED
    • Yutaka TAKAHASHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PROTECTIVE FILM FORMING METHOD

    • Publication number 20180204716
    • Publication date Jul 19, 2018
    • TOKYO ELECTRON LIMITED
    • Yutaka TAKAHASHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM-FORMING APPARATUS, FILM-FORMING METHOD, AND STORAGE MEDIUM

    • Publication number 20180051374
    • Publication date Feb 22, 2018
    • TOKYO ELECTRON LIMITED
    • Hitoshi KATO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR DEPOSITING A SILICON NITRIDE FILM

    • Publication number 20180019114
    • Publication date Jan 18, 2018
    • TOKYO ELECTRON LIMITED
    • Hitoshi KATO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR PROCESSING A SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS

    • Publication number 20170268104
    • Publication date Sep 21, 2017
    • TOKYO ELECTRON LIMITED
    • Hitoshi KATO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM DEPOSITION METHOD

    • Publication number 20170253964
    • Publication date Sep 7, 2017
    • TOKYO ELECTRON LIMITED
    • Hitoshi KATO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM DEPOSITION METHOD

    • Publication number 20170218510
    • Publication date Aug 3, 2017
    • TOKYO ELECTRON LIMITED
    • Hitoshi KATO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD AND APPARATUS FOR DEPOSITING A SILICON-CONTAINING FILM

    • Publication number 20160379868
    • Publication date Dec 29, 2016
    • TOKYO ELECTRON LIMITED
    • Jun SATO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR PROCESSING A SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS

    • Publication number 20150225849
    • Publication date Aug 13, 2015
    • TOKYO ELECTRON LIMITED
    • Hitoshi KATO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF DEPOSITING A FILM, RECORDING MEDIUM, AND FILM DEPOSITION...

    • Publication number 20150004332
    • Publication date Jan 1, 2015
    • TOKYO ELECTRON LIMITED
    • Hitoshi KATO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...