Patent Grant
10151031
1. Field of the Invention
The present invention relates to a method for processing a substrate and a substrate processing apparatus.
2. Description of the Related Art
In manufacturing semiconductor devices, a variety of film deposition processes is performed on a semiconductor wafer (hereinafter, “wafer”) by a film deposition method such as an ALD (Atomic Layer Deposition) method.
In recent years, so-called turntable type film deposition apparatuses have been researched and developed as a film deposition apparatus that performs the ALD method. The film deposition apparatus includes a rotatable turntable provided in a vacuum chamber, and the turntable has a plurality of concave portions formed therein with a diameter slightly larger than a wafer, on each of which a wafer is placed. The vacuum chamber includes a supply area of a reaction gas A, a supply area of a reaction gas B, and separation areas separating the supply areas from each other all of which are provided above the turntable so as to be separated from each other.
Moreover, the turntable type film deposition apparatus sometimes includes a plasma generation unit mounted thereon, for example, as disclosed in Japanese Laid-Open Patent Application Publication No. 2013-161874. The film deposition process and the like of a variety of (functional) films are performed on substrates by using plasma generated by the plasma generation unit.
However, in the film deposition process using the substrate processing apparatus as disclosed in Japanese Laid-Open Patent Application Publication No. 2013-161874 and the like, what is called a loading effect is generated in which an amount of film deposition within a surface of a wafer varies depending on a surface area of a pattern formed in the surface of the wafer.
Embodiments of the present invention provide a method for processing a substrate and a substrate processing apparatus solving one or more of the problems discussed above.
More specifically, embodiments of the present invention provide a method for processing a substrate and a substrate processing apparatus that can prevent generation of a loading effect and can deposit a thin film having a desired film quality.
According to one embodiment of the present invention, there is provided a method for processing a substrate using a substrate processing apparatus. The apparatus includes a vacuum chamber, and a turntable having a substrate receiving portion formed in a surface thereof to receive a substrate thereon provided in the vacuum chamber. The apparatus also includes a process gas supply unit configured to supply a process gas that adsorbs on a surface of the substrate, a first plasma processing gas supply unit configured to supply a first plasma processing gas to the surface of the substrate, and a second plasma processing gas supply unit configured to supply a second plasma processing gas to the surface of the substrate. The apparatus further includes a first separation gas supply unit configured to supply a separation gas for separating the first plasma processing gas from the first process gas to the surface of the substrate, and a second separation gas supply unit configured to supply the separation gas for separating the second plasma processing gas from the first process gas to the surface of the substrate. The apparatus also includes a first plasma generation unit configured to convert the first plasma processing gas to first plasma, and a second plasma generation unit configured to convert the second plasma processing gas to second plasma. The process gas supply unit, the first separation gas supply unit, the first plasma processing gas supply unit, the second plasma processing gas supply unit and the second separation gas supply unit are arranged in a rotational direction of the turntable in this order. In the method, the process gas is supplied to the surface of the substrate, and the separation gas is supplied to the surface of the substrate. Moreover, the first plasma processing gas is supplied to the surface of the substrate in a first state in which a distance between the first plasma generation unit and the turntable is set at a first distance, and then the second plasma processing gas is supplied to the surface of the substrate in a second state in which a distance between the second plasma generation unit and the turntable is set at a second distance shorter than the first distance. In addition, the separation gas is supplied to the surface of the substrate.
According to another embodiment of the present invention, there is provided a method for processing a substrate. In the method, a silicon-containing gas is supplied to a surface of a substrate provided in a chamber so as to cause the silicon-containing to adsorb on the surface of the substrate. Next, a first plasma treatment is performed on the surface of the substrate having the silicon-containing gas adsorbing on the surface of the substrate by using first plasma generated from a first plasma processing gas containing hydrogen gas. Moreover, a second plasma treatment is performed on the surface of the substrate subject to the first plasma treatment by using second plasma generated from a second plasma processing gas containing ammonia gas and no hydrogen gas.
According to another embodiment of the present invention, there is provided a substrate processing apparatus. The apparatus includes a vacuum chamber, a turntable having a substrate receiving portion formed in a surface thereof to receive a substrate thereon provided in the vacuum chamber, and a process gas supply unit configured to supply a process gas that adsorbs on a surface of the substrate. The apparatus also includes a first plasma processing gas supply unit configured to supply a first plasma processing gas to the surface of the substrate, and a second plasma processing gas supply unit configured to supply a second plasma processing gas to the surface of the substrate. The apparatus further includes a first separation gas supply unit configured to supply a separation gas for separating the first plasma processing gas from the process gas to the surface of the substrate, and a second separation gas supply unit configured to supply the separation gas for separating the second plasma processing gas from the process gas to the surface of the substrate. The apparatus also includes a first plasma generation unit configured to convert the first plasma processing gas to first plasma, a second plasma generation unit configured to convert the second plasma processing gas to second plasma, and a control unit. The process gas supply unit, the first separation gas supply unit, the first plasma processing gas supply unit, the second plasma processing gas supply unit and the second separation gas supply unit are arranged in a rotational direction of the turntable in this order. The control unit is configured to cause the process gas supply unit to supply the process gas to the surface of the substrate, to cause the first separation gas supply unit to supply the separation gas to the surface of the substrate, to cause the first plasma processing gas supply unit to supply the first plasma processing gas to the surface of the substrate in a first state in which a distance between the first plasma generation unit and the turntable is set at a first distance, to cause the second plasma processing gas supply unit to supply the second plasma processing gas to the surface of the substrate in a second state in which a distance between the second plasma generation unit and the turntable is set at a second distance shorter than the first distance, and to cause the second separation gas supply unit to supply the separation gas to the surface of the substrate.
Additional objects and advantages of the embodiments are set forth in part in the description which follows, and in part will become obvious from the description, or may be learned by practice of the invention. The objects and advantages of the invention will be realized and attained by means of the elements and combinations particularly pointed out in the appended claims. It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are not restrictive of the invention as claimed.
A description is given below of a substrate processing apparatus preferable for implementing a method for processing a substrate according to embodiments of the present invention, with reference to accompanying drawings. The substrate processing apparatus according to the embodiments is configured to deposit a thin film by layering a reaction product on a surface of a wafer W by an ALD method and to perform a plasma treatment on the wafer in the middle of depositing the thin film.
[Configuration of Substrate Processing Apparatus]
As shown in
The vacuum chamber 1 includes a ceiling plate (ceiling part) 11 provided in a position facing concave portions 24 of the turntable 2 described later and a chamber body 12. Moreover, a seal member 13 having a ring-like shape is provided in a periphery in an upper surface of the chamber body 12. The ceiling plate 11 is configured to be detachable and attachable from and to the chamber body 12. A diameter dimension (inner diameter dimension) of the vacuum chamber 1 when seen in a plan view is not limited, but can be, for example, set at about 1100 mm.
A separation gas supply pipe 51 is connected to a central part in an upper surface of the ceiling plate 11 and is further communicated with a central part of an upper surface side in the vacuum chamber 1 through a hole to supply a separation gas for preventing different process gases from mixing with each other in a central area C.
The turntable 2 is fixed to a core portion 21 having an approximately cylindrical shape at the central part, and is configured to be rotatable by a drive unit 23 in a clockwise fashion as illustrated in
The rotational shaft 22 and the drive unit 23 are accommodated in a casing body 20, and a flange portion at an upper surface side of the casing body 20 is hermetically attached to a lower surface of a bottom portion of the vacuum chamber 1. A purge gas supply pipe 72 for supplying nitrogen gas or the like as a purge gas (separation gas) to an area below the turntable 2.
A peripheral side of the core portion 21 in a bottom part 14 of the vacuum chamber 1 forms a protruding part 12a by being formed into a ring-like shape so as to come to close to the lower surface of the turntable 2.
As shown in
Through holes not illustrated in the drawings are formed in a bottom surface of the concave portion 24 to allow, for example, three lifting pins described later to push up the wafer W from below and to lift the wafer W.
As illustrated in
In the example illustrated in
As illustrated in
Here, in the embodiment, although an example of arranging a single nozzle in each process area is illustrated, a configuration of providing a plurality of nozzles in each process area is also possible. For example, the first plasma processing gas nozzle 32 may be constituted of a plurality of plasma processing gas nozzles, each of which is configured to supply argon (Ar) gas, ammonia (NH3) gas, hydrogen (H2) gas or the like, or may be constituted of only a single plasma processing gas nozzle configured to supply a mixed gas of argon gas, ammonia gas and hydrogen gas.
The first process gas nozzle 31 forms a first process gas supply part. Moreover, the first plasma processing gas nozzle 32 forms a first plasma processing gas supply part, and the second plasma processing gas nozzle 34 forms a second plasma processing gas supply part. Furthermore, each of the separation gas nozzles 41 and 42 forms a separation gas supply part.
Each of the nozzles 31, 32, 34, 41 and 42 is connected to each gas supply source not illustrated in the drawings through a flow regulating valve.
A silicon-containing gas may be used as an example of the first process gas supplied from the first process gas nozzle 31 such as DCS [dichlorosilane], HCD [hexachlorodisilane], DIPAS [diisopropylamino-silane], 3DMAS [tris(dimethylamino)silane] gas, BTBAS [bis(tertiary-butyl-amino)silane] or the like. Also, a metal-containing gas may be used as an example of the first process gas supplied from the first process gas nozzle 31 such as TiCl4 [titanium tetrachloride], Ti (MPD) (THD)2 [titanium methylpentanedionato, bis(tetramethylheptanedionato)], TMA [trimethylaluminium], TEMAZ [Tetrakis(ethylmethylamino)zirconium], TEMHF [tetrakis (ethylmethylamino)hafnium], Sr(THD)2 [strontium bis(tetramethylheptanedionato)] or the like.
The plasma processing gases supplied from the first plasma processing gas nozzle 32 and the second plasma processing gas nozzle 34 can be properly selected depending on intended purpose of the plasma. For example, argon gas or helium (He) gas mainly used for plasma generation, and a mixed gas of ammonia gas and hydrogen gas for nitrizing the first process gas adsorbing on the wafer W and modifying the obtained nitrized film are cited as examples. Here, the plasma processing gases discharged from the first plasma processing gas nozzle 32 and the second plasma processing gas nozzle 34 may be the same gas species, or may be different gas species from each other. Each of the plasma processing gases can be selected depending on a desired plasma treatment.
For example, nitrogen (N2) gas or the like is cited as an example of the separation gas supplied from the separation gas nozzles 41 and 42.
As discussed above, in the example illustrated in
Gas discharge holes 33 for discharging each of the above-mentioned gases are formed in each lower surface (the surface facing the turntable 2) of the gas nozzles 31, 32, 34, 41 and 42 along a radial direction of the turntable 2 at a plurality of locations, for example, at regular intervals. Each of the nozzles 31, 32, 34, 41 and 42 is arranged so that a distance between a lower end surface of each of the nozzles 31, 32, 34, 41 and 42 and an upper surface of the turntable 2 is set at, for example, about 1 to 5 mm.
An area under the first process gas nozzle 31 is a first process area P1 to allow the first process gas to adsorb on the wafer W. An area under the first plasma processing gas nozzle 32 is a second process area P2 to treat a thin film on the wafer W by first plasma, and an area under the second plasma processing gas nozzle 34 is a third process area P3 to treat the thin film on the wafer W by second plasma.
As shown in
As illustrated in
As illustrated in
Next, a detailed description is given below of the first plasma generation unit 81a and the second plasma generation unit 81b provided above the first and second plasma processing gas nozzles 32 and 34, respectively. Here, in the embodiment, although each of the first plasma generation unit 81a and the second plasma generation unit 81b can perform an independent plasma treatment, each specific configuration can be similar to each other.
The plasma generation units 81a and 81b are configured to wind an antenna 83 constituted of a metal wire or the like, for example, triply around the vertical axis. Moreover, as illustrated in
The antenna 83 is, for example, connected to a high frequency power source 85 having a frequency of 13.56 MHz and an output power of 5000 W by way of a matching box 84. Then, the antenna 83 is provided to be hermetically separated from an inner area of the vacuum chamber 1. Here, a connection electrode 86 is provided to electrically connect the antenna 83 with the matching box 84 and the high frequency power source 85.
As illustrated in
As illustrated in
Moreover, as illustrated in
As illustrated in
The housing 90 is arranged to cross the diameter of the wafer W in the radial direction of the turntable 2 when the wafer W is located under the housing 90. Here, as illustrated in
An internal atmosphere of the vacuum chamber 1 is sealed by the annular member 82 and the housing 90. More specifically, the annular member 82 and the housing 90 are set in the opening 11a, and then the housing 90 is pressed downward through the whole circumference by a pressing member 91 formed into a frame-like shape along the contact portion of the annular member 82 and the housing 90. Furthermore, the pressing member 91 is fixed to the ceiling plate 11 by volts and the like not illustrated in the drawings. This causes the internal atmosphere of the vacuum chamber 1 to be sealed. Here, in
As illustrated in
As illustrated in
A grounded Faraday shield 95 that is formed so as to approximately fit along an inner shape of the housing 90 and is made of a conductive plate-like body, for example, a metal plate such as a copper plate and the like, is installed in the housing 90. The Faraday shield 95 includes a horizontal surface 95a horizontally formed so as to be along the bottom surface of the housing 90 and a vertical surface 95b extending upward from the outer edge of the horizontal surface 95a through the whole circumference, and may be configured to be approximately hexagon when seen in a plan view.
Upper end edges of the Faraday shield 95 on the right side and the left side extend rightward and leftward, respectively, when seen from the rotational center of the turntable 2 horizontally, and form supports 96. As illustrated in
When an electric field generated by the antenna 83 reaches the wafer W, a pattern (electrical wiring and the like) formed inside the wafer W may be damaged. Because of this, as illustrated in
As illustrated in
As illustrated in
A description is given below of other components of the substrate processing apparatus of the embodiment again.
As illustrated in
In the present specification, one of the exhaust openings 61 and 62 is called a first opening 61 and the other of the exhaust openings 61 and 62 is called a second opening 62. Here, the first exhaust opening 61 is formed between the separation gas nozzle 42 and the first plasma generation unit 81a located on the downstream side of the separation gas nozzle 42 in the rotational direction of the turntable 2. Furthermore, the second exhaust opening 62 is formed between the second plasma generation unit 81b and the separation area D on the downstream side of the plasma generation unit 81b in the rotational direction of the turntable 2.
The first exhaust opening 61 is to evacuate the first process gas and the separation gas, and the second exhaust opening 62 is to evacuate the plasma processing gas and the separation gas. Each of the first exhaust opening 61 and the second exhaust opening 62 is, as shown in
As described above, because the housings 90 are arranged from the central area C side to the outer peripheral side, a gas flowing from the upstream side in the rotational direction of the turntable 2 to the plasma treatment area P2 and P3 may be blocked from going to the evacuation opening 62 by the housings 90. In response to this, a groove-like gas flow passage 101 (see
As shown in
As discussed above, because the housings 90 are formed at the location close to the central area C, the core portion 21 supporting the central portion of the turntable 2 is formed at the rotational center side so that a location above the turntable 2 avoids the housing 90. Due to this, the various gases are more likely to mix with each other at the central area C side than at the outer peripheral side. Hence, by forming the labyrinth structure 110 above the core portion 21, a flow path can be made longer to be able to prevent the gases from mixing with each other.
More specifically, the labyrinth structure 110 has a wall part vertically extending from the turntable 2 toward the ceiling plate 11 and a wall part vertically extending from the ceiling plate 11 toward the turntable 2 that are formed along the circumferential direction, respectively, and are arranged alternately in the radial direction of the turntable 2. In the labyrinth structure 110, for example, a first process gas discharged from the first process gas nozzle 31 and heading for the central area C needs to go through the labyrinth structure 110. Due to this, the first process gas decreases in speed with the decreasing the distance from the central area C and becomes unlikely to diffuse. As a result, the first process gas is pushed back by the separation gas supplied to the central area C before reaching the central area C. Moreover, other gases likely to head for the central area C are difficult to reach the central area C by the labyrinth structure 110 in a similar way. This prevents the process gases from mixing with each other in the central area C.
On the other hand, the separation gas supplied from the separation gas supply pipe 51 is likely to diffuse swiftly in the circumferential direction at first, but decreases in speed as going through the labyrinth structure 110. In this case, nitrogen gas is likely to intrude into a very narrow area such as a gap between the turntable 2 and the projection portion 92, but flows to a relatively large area such as an area where the transfer arm 10 moves in and out of the vacuum chamber 1 because the labyrinth structure 110 decreases the flowing speed thereof. Because of this, nitrogen gas is prevented from flowing into a space under the housing 90.
As illustrated in
As illustrated in
The wafer W is transferred between the concave portion 24 of the turntable 2 and the transfer arm 10 at a position where the concave portion 24 of the turntable 2 faces the transfer opening 15. Accordingly, lift pins and an elevating mechanism that are not illustrated in the drawings are provided at a position under the turntable 2 corresponding to the transferring position to lift the wafer W from the back surface by penetrating through the concave portion 24.
Moreover, as illustrated in
[Method for Processing a Substrate]
Next, a description is given below of a method for processing a substrate using the substrate processing apparatus according to an embodiment of the present invention.
In the ALD method using a turntable type substrate processing apparatus utilizing plasma, in general, film deposition of a predetermined film and the film quality enhancement thereof are performed at a relatively low temperature by utilizing the energy of radicals and ions generated by the plasma after causing a predetermined process gas to adsorb on a wafer W. However, when depositing a nitride film such as a silicon nitride film on a wafer W, although the adsorption of the process gas on the wafer W is readily performed on a relatively short time, nitriding the adsorbed process gas needs a large amount of nitriding gas and a long reaction time. In the turntable type substrate processing apparatus, because there are limitations of a number of plasma generation units capable of being installed and a range of plasma treatment area (which depends on the electrode size and the like thereof) due to the apparatus size and the apparatus cost, a desired film quality needs to be acquired by the limited number of plasma generation units and the limited plasma treatment area with desired productivity.
Moreover, in the film deposition process, a phenomenon is caused that a film deposition rate varies depending on a surface area of an electrical wiring pattern preliminarily formed in the wafer W (i.e., loading effect). In particular, in order to respond to a demand of miniaturization of the electrical wiring pattern of semiconductor devices in recent years, a substrate processing apparatus is needed that can prevent the generation of the loading effect and can form a thin film having a desired film quality. It is known that the loading effect in a reaction system for forming a nitride film is likely to occur when a pressure of the nitriding part is high and is unlikely to occur as the pressure of the nitriding part becomes low. However, in the turntable type substrate processing apparatus, when the pressure of the nitriding part is reduced, a pressure of an adsorption part where the adsorption of a process gas occurs decreases at the same time, which decreases an adsorption efficiency of the process gas and the productivity, and increases the productive cost. Furthermore, because increasing the vacuum pump in size, installing a high vacuum pump and the like are needed, the apparatus cost increases.
Therefore, the substrate processing method according to the embodiment is implemented by using a substrate processing apparatus including:
a vacuum chamber;
a turntable having a substrate receiving portion to receive a substrate on a surface thereof provided in the vacuum chamber;
a first process gas supply unit configured to supply a first process gas that adsorbs to a surface of the substrate;
a first plasma processing gas supply unit and a second plasma processing gas supply unit configured to supply a first plasma processing gas and a second plasma processing gas to the surface of the substrate, respectively;
a first separation gas supply unit configured to supply a separation gas to separate the first plasma processing gas from the first process gas and;
a second separation gas supply unit configured to supply the separation gas to separate the second plasma processing gas from the first process gas; and
a first plasma generation unit and a second plasma generation unit configured to convert the first plasma processing gas and the second plasma processing gas to first plasma and second plasma, respectively,
wherein the first process gas supply unit, the first separation gas supply unit, the first plasma processing gas supply unit, the second plasma processing gas supply unit and the second separation gas supply unit are arranged in this order in a rotational direction of the turntable.
More specifically, a method for processing a substrate of the embodiments includes steps of:
supplying the first process gas to the substrate (S100);
supplying the separation gas to the substrate to which the first process gas was supplied (S110);
supplying the first plasma processing gas to the substrate to which the separation gas was supplied in a first state in which a distance between the first plasma generation unit and the turntable is a first distance (S120);
supplying the second plasma processing gas to the substrate to which the first plasma processing gas was supplied in a second state in which a distance between the second plasma generation unit and the turntable is a second distance shorter than the first distance (S130); and
supplying the separation gas to the substrate to which the second plasma processing gas was supplied.
The method for processing the substrate according to the embodiments causes the substrate to pass a first plasma treatment area in which the distance between the first plasma generation unit and the turntable is the first distance, and subsequently to pass a second plasma treatment area in which the distance between the second plasma generation unit and the turntable is the second distance shorter than the first distance. In other words, the substrate is caused to pass an area in which ion energy is low and a radical concentration is low (second process area P2) and then to pass an area in which the ion energy is high and the radical concentration is high (third process area P3). This enables the generation of the loading effect to be prevented, and makes it possible to form a thin film having a desired film quality.
A detailed description is given below of each of the steps starting from the carry-in of the wafers W by citing specified embodiments.
To begin with, in carrying wafers W in the vacuum chamber 1, the gate valve G is opened. Then, the wafers W are placed on the turntable 2 by the transfer arm 10 through the transfer opening 15 while rotating the turntable 2 intermittently.
Next, the gate valve G is closed and the wafers W are heated to a predetermined temperature by the heater unit 7. Subsequently, the first process gas is discharged from the first process gas nozzle 31 at a predetermined flow rate, and plasma processing gases are supplied from the first plasma processing gas nozzle 32 and the second plasma processing gas nozzle 34 at predetermined flow rates, respectively.
Next, a distance between the first plasma generation unit 81a and the turntable 2 is set at a predetermined first distance. Then, a distance between the second plasma generation unit 81b and the turntable 2 is set at a second distance shorter than the first distance.
The inside of the vacuum chamber 1 is adjusted to a predetermined pressure by the pressure controller 65. The plasma generation units 81a and 81b supply high frequency power of predetermined outputs to antennas 83 thereof, respectively.
The first process gas adsorbs on each surface of the wafers W in the first process area P1 by the rotation of the turntable 2 (S100). The wafers W on which the first process gas adsorbs pass the separation area D by the rotation of the turntable 2 (S110). In the separation area D, the separation gas is supplied to each of the surfaces of the wafers W, and unnecessary physically absorbed materials with respect to the first process gas are removed.
The wafers W subsequently pass the second process area P2 by the rotation of the turntable 2 (S120). In the second process area P2, the first process gas is nitrided by plasma of the plasma processing gas supplied from the first plasma processing gas nozzle 32, and the formed nitride film is treated to modify the quality thereof.
In general, ions and radicals are known as active species (precursors) generated by plasma converted from a plasma processing gas. The ions mainly contribute to a modification treatment of a nitride film, and the radicals mainly contribute to a deposition process of a nitride film. Moreover, it is known that the ions have shorter life than the radicals and that the ion energy reaching the wafers W widely decreases by making the distances between the plasma generation units 81a and 81b and the turntable 2 longer.
Here, in the second process area P2, the distance between the first plasma generation unit 81a and the turntable 2 is set at the first distance longer than the second distance described later (see S120). In the second process area P2, the ions reaching the wafers W widely decrease due to the relatively long first distance, and the radicals are mainly supplied to the wafers W. In other words, in the second process area P2, the first process gas on the wafers W is nitrided (initialized) by the first plasma having a relatively low ion energy, and one or more molecular layers of the nitride film that are a component of the thin film are deposited. Furthermore, the deposited nitride film is treated by the second plasma to modify the quality thereof.
In addition, in the initial stage of the film deposition process, when plasma whose precursor has a significant influence on the wafers W is used such as plasma having great ion energy, the wafers W may be nitrided in themselves. In terms of this, in the process performed in the second process area P2, to begin with, the plasma treatment using plasma having low ion energy is preferred to be performed.
The first distance is not limited, but is preferred to be set in a range from 45 to 120 mm in terms of efficiently depositing the nitride film on the wafers W by using the plasma having relatively low ion energy.
Next, the wafers W having passed the second process area P2 pass the third process area P3 by the rotation of the turntable 2 (S130). In the third process area P3, the first process gas is nitrided by the plasma of the plasma processing gas supplied from the second plasma processing gas nozzle 34 as well as the second process area P2, thereby treating the deposited nitride film for modification treatment.
Here, in the third process area P3, the distance between the second plasma generation unit 81b and the turntable 2 is set at the second distance smaller than the above-mentioned first distance (see S130). Due to the second distance relatively smaller than the first distance, in the third process area P3, an amount of the ions reaching the wafers W is more than that in the second process area P2. Here, it should be noted that an amount of radicals in the third process area P3 is also more than that in the second process area P2. Accordingly, in the third process area P3, the first process gas on the wafers W is nitride by plasma having relatively high ion energy and high-dense radicals, and the deposited nitride film is more efficiently modified than that in the second process area P2.
The second distance is not limited as long as the second distance is shorter than the first distance, but is preferred to be set in a range from 20 to 60 mm in terms of more efficiently modifying the nitride film.
The wafers W treated by the second plasma pass the separation area D by the rotation of the turntable 2 (S140). The separation area D is an area to separate the first process area P1 from the third process area P3 so that the unnecessary nitriding gas and the modifying gas do not intrude into the first process area P1.
In the embodiments, by keeping the turntable 2 rotating, the adsorption of the first process gas on the wafers W, the nitriding process of the first process gas adsorbing on the wafers W, and the plasma modification of the reaction product are performed in this order many times. In other words, the film deposition process by the ALD method and the modification process of the deposited film are performed many times by rotating the turntable 2.
Here, in the substrate processing apparatus of the embodiments, the separation areas D are arranged between the process areas P1 and P2 on both sides in the circumferential direction of the turntable 2. Because of this, in the separation areas D, each of the process gas and the plasma processing gases flows toward each of the exhaust openings 61 and 62 while being prevented from mixing with each other.
Next, a description is given below of an example of preferred implementing conditions when performing the method, for example, the film deposition of the nitride film on the wafers W and the modification treatment of the deposited nitride film.
A flow rate of the first process gas in the film deposition process is not limited, but can be set at, for example, a range of about 900 to 1500 sccm.
A flow rate of an ammonia-containing gas contained in the plasma processing gases is not limited, but can be set at, for example, a range of about 4000 to 5000 sccm.
The pressure inside the vacuum chamber 1 is not limited, but can be set at, for example, a range of about 0.75 to 0.9 Torr.
The temperature of the wafers W is not limited, but can be set at, for example, a range of about 350 to 450 degrees C.
The rotational speed of the turntable 2 is not limited, but can be set at, for example, a range of 60 to 300 rpm.
Next, a more detailed description is given below of the embodiments of the present invention by citing specific working examples.
In the plasma treatment of the method for processing the substrate of the embodiments, a description is given below of a working example of having acknowledged that the generation of the loading effect can be prevented and a thin film having a desired film quality can be deposited by passing a wafer through an area having low ion energy and a low radical concentration (the second process area P2) and then passing the wafer through an area having high ion energy and a high radical concentration (the third process area P3).
A film deposition process was performed on a wafer W under the following conditions by the method for processing the substrate as described with reference to
The film deposition process of the working example 1 was as follows:
First process gas: DCS (dichlorosilane)
Processing gas in step S120: NH3=4000 sccm
First distance in step S120: 90 mm
Processing gas in step S130: NH3/Ar/H2=300/1900/600 sccm
Second distance in step S130: 37.5 mm.
Moreover, as a comparative example 1, the film deposition process of the comparative example 1 was performed as well as the method of the working example 1 except that the second distance in step S130 was set at 90 mm.
Furthermore, as a comparative example 2, the film deposition process of the comparative example 1 was performed as well as the method of the working example 1 except that the first distance in step S120 was set at 37.5 mm and that the second distance in step S130 was set at 90 mm.
By measuring each film thickness of reaction products (nitride films) on the wafers W obtained after performing the working example 1 and the comparative examples 1 and 2, a film deposition rate per one cycle from steps S100 to S140 and uniformity within a surface of the wafer W of the deposited film were obtained.
As clearly noted from the film deposition rates shown in
On the other hand, from the results of the uniformity within the surface of the wafer W shown in
From the results discussed above, it is noted that the method for processing the substrate according to the working example 1 can deposit a film having very excellent uniformity within a surface of a wafer W while maintaining a certain film deposition rate by passing the substrates through an area having small ion energy and a low radical concentration (second process area P2) and then passing the substrates through an area having great ion energy and a high radical concentration (third process area P3) in a plasma treatment.
In addition, a wet etching was performed in the obtained film by using dilute hydrofluoric acid of 0.5%.
As shown in
An evaluation was performed to determine whether the loading effect can be prevented by the method for processing the substrate of the working example 1.
As shown in
A description is given below of a working example in which a relationship between a distance from the plasma generation unit to the wafer W and an amount of nitriding the wafer W in itself.
A film deposition process was performed on a wafer W under the following conditions by the method for processing the substrate as described with reference to
As the film deposition conditions, the first distance in step S120 and the second distance in step S130 are set at the same value. More specifically, the values are set at 30 mm, 37.5 mm, 60 mm and 90 mm, and the amount of nitriding the wafer W after the film deposition process was measured at each of the setting distances.
As shown in
As discussed above, it was noted that the generation of the loading effect can be prevented and a thin film having a desired film quality can be deposited by passing a substrate through an area having a small ion energy and a low radical concentration (second process area P2) and then by passing the substrate through an area having a great ion energy and a high radical concentration (third process area P3) from the working examples 1 and 2.
In a method for processing a substrate of a working example 3, a comparative experiment of an amount of film deposition, a film quality and the like was performed between the case of rotating the turntable 2 in a clockwise fashion illustrated by the arrow of
In this manner, by nitriding and modifying a Si-containing film with first plasma containing hydrogen gas and then by nitriding so as to form an adsorption site with second plasma containing ammonia gas and no hydrogen gas, DCS could readily adsorb to the adsorption site when DCS was supplied. This causes the loading effect to be preferable, thereby efficiently depositing a Si-containing film.
Thus, even though the Si containing film was nitrided by the first plasma containing ammonia gas and no hydrogen gas and then the Si-containing film was nitrided and modified by the second plasma containing hydrogen gas, the Si-containing film terminated with H without forming an adsorption site and became difficult for DCS to adsorb thereto when DCS was supplied. This does not make the loading effect preferable, and does not cause the Si-containing film to be deposited efficiently.
TABLE 1 shows results of films deposited all over a whole flat surface of a wafer W by the method for processing the substrate of the working example 3 of the present invention and by the method for processing the substrate of the comparative example. With respect to the process conditions, a substrate temperature was 400 degrees C., and a pressure inside the vacuum chamber 1 was 0.75 Torr. A flow rate of DCS was 1000 sccm (further 500 sccm of N2 was supplied), and a flow rate of ammonia gas in the first plasma treatment area 81a was 300 slm. A flow rate of hydrogen gas was 600 sccm, and a flow rate of argon gas was 1900 sccm. A flow rate of ammonia gas in the second plasma treatment area 81b was 4000 slm, and a flow rate of N2 gas in the separation areas D was 3000 sccm.
As shown in TABLE 1, a deposition rate per one cycle in the method for processing the substrate of the working example 3 was 0.065 nm/cycle, and a deposition rate per one cycle in the method for processing the substrate in the method for processing the substrate of the comparative example was 0.060 nm/cycle. The deposition rate per one cycle of the method for processing the substrate of the working example 3 was about 8% higher than that of the comparative example. Moreover, the uniformity within a surface of the method for processing the substrate of the working example 3 was 1.76%, and the uniformity within a surface of the method for processing the substrate of the comparative example 3 was 2.93%. The uniformity within a surface of the method for processing the substrate of the working example 3 was preferable to that of the comparative example.
In this manner, the method for processing the substrate of the working example 3 could obtain better results in both of the film deposition rate and the uniformity within the surface than that of the method for processing the substrate of the comparative example.
Here, the method for processing the substrate of the working example 3 can be implemented not only by the substrate processing apparatus illustrated in
According to the embodiments of the present invention, there is provided a method for processing a substrate and a substrate processing apparatus that can prevent the generation of the loading effect and deposit a thin film having a desired film quality.
All examples recited herein are intended for pedagogical purposes to aid the reader in understanding the invention and the concepts contributed by the inventor to furthering the art, and are to be construed as being without limitation to such specifically recited examples and conditions, nor does the organization of such examples in the specification relate to a showing of the superiority or inferiority of the invention. Although the embodiments of the present invention have been described in detail, it should be understood that various changes, substitutions, and alterations could be made hereto without departing from the spirit and scope of the invention.
| Number | Date | Country | Kind |
|---|---|---|---|
| 2014-023006 | Feb 2014 | JP | national |
| 2014-206571 | Oct 2014 | JP | national |
This patent application is a continuation application of and claims the benefit of priority under 35 U.S.C. 120 to patent application Ser. No. 14/613,656 filed on Feb. 4, 2015, which is based upon and claims the benefit of priority of Japanese Patent Application No. 2014-23006, filed on Feb. 10, 2014, and Japanese Patent Application No. 2014-206571, filed on Oct. 7, 2014, the entire contents of which are incorporated herein by reference.
| Number | Name | Date | Kind |
|---|---|---|---|
| 4854266 | Simson et al. | Aug 1989 | A |
| 5281274 | Yoder | Jan 1994 | A |
| 5620523 | Maeda et al. | Apr 1997 | A |
| 5744049 | Hills et al. | Apr 1998 | A |
| 5849088 | DeDontney et al. | Dec 1998 | A |
| 5906354 | Gilbert et al. | May 1999 | A |
| 6279503 | Choi et al. | Aug 2001 | B1 |
| 6340501 | Kamiyama et al. | Jan 2002 | B1 |
| 6634314 | Hwang et al. | Oct 2003 | B2 |
| 7153542 | Nguyen et al. | Dec 2006 | B2 |
| 8034723 | Ohizumi et al. | Oct 2011 | B2 |
| 8092598 | Baek et al. | Jan 2012 | B2 |
| 8372202 | Kato et al. | Feb 2013 | B2 |
| 8465591 | Kato et al. | Jun 2013 | B2 |
| 8465592 | Kato et al. | Jun 2013 | B2 |
| 8518183 | Honma | Aug 2013 | B2 |
| 8673079 | Kato et al. | Mar 2014 | B2 |
| 8673395 | Kato et al. | Mar 2014 | B2 |
| 8721790 | Kato et al. | May 2014 | B2 |
| 8746170 | Orito et al. | Jun 2014 | B2 |
| 8808456 | Kato et al. | Aug 2014 | B2 |
| 8835332 | Kato et al. | Sep 2014 | B2 |
| 8840727 | Kato et al. | Sep 2014 | B2 |
| 8845857 | Ohizumi et al. | Sep 2014 | B2 |
| 8854449 | Aikawa et al. | Oct 2014 | B2 |
| 8882915 | Kato et al. | Nov 2014 | B2 |
| 8882916 | Kumagai et al. | Nov 2014 | B2 |
| 8906246 | Kato et al. | Dec 2014 | B2 |
| 8951347 | Kato et al. | Feb 2015 | B2 |
| 8961691 | Kato et al. | Feb 2015 | B2 |
| 8962495 | Ikegawa et al. | Feb 2015 | B2 |
| 8992685 | Kato et al. | Mar 2015 | B2 |
| 9023738 | Kato et al. | May 2015 | B2 |
| 9040434 | Kato | May 2015 | B2 |
| 9053909 | Kato et al. | Jun 2015 | B2 |
| 9103030 | Kato et al. | Aug 2015 | B2 |
| 9111747 | Yamawaku et al. | Aug 2015 | B2 |
| 9136133 | Oshimo et al. | Sep 2015 | B2 |
| 20020195056 | Sandhu et al. | Dec 2002 | A1 |
| 20040052972 | Schmitt | Mar 2004 | A1 |
| 20060177579 | Shin et al. | Aug 2006 | A1 |
| 20060196538 | Kubista et al. | Sep 2006 | A1 |
| 20070215036 | Park et al. | Sep 2007 | A1 |
| 20070218701 | Shimizu et al. | Sep 2007 | A1 |
| 20070218702 | Shimizu et al. | Sep 2007 | A1 |
| 20080208385 | Sakamoto et al. | Aug 2008 | A1 |
| 20080216864 | Sexton et al. | Sep 2008 | A1 |
| 20090272402 | Kim et al. | Nov 2009 | A1 |
| 20090324826 | Kato et al. | Dec 2009 | A1 |
| 20090324828 | Kato et al. | Dec 2009 | A1 |
| 20100050942 | Kato et al. | Mar 2010 | A1 |
| 20100050943 | Kato et al. | Mar 2010 | A1 |
| 20100050944 | Kato et al. | Mar 2010 | A1 |
| 20100055297 | Kato et al. | Mar 2010 | A1 |
| 20100055312 | Kato et al. | Mar 2010 | A1 |
| 20100055314 | Kato et al. | Mar 2010 | A1 |
| 20100055315 | Honma | Mar 2010 | A1 |
| 20100055316 | Honma | Mar 2010 | A1 |
| 20100055319 | Kato et al. | Mar 2010 | A1 |
| 20100055320 | Honma | Mar 2010 | A1 |
| 20100055347 | Kato et al. | Mar 2010 | A1 |
| 20100055351 | Kato et al. | Mar 2010 | A1 |
| 20100116210 | Kato et al. | May 2010 | A1 |
| 20100124610 | Aikawa et al. | May 2010 | A1 |
| 20100132614 | Kato et al. | Jun 2010 | A1 |
| 20100132615 | Kato et al. | Jun 2010 | A1 |
| 20100136795 | Honma | Jun 2010 | A1 |
| 20100151131 | Obara et al. | Jun 2010 | A1 |
| 20100227046 | Kato et al. | Sep 2010 | A1 |
| 20100227059 | Kato et al. | Sep 2010 | A1 |
| 20100260935 | Kato et al. | Oct 2010 | A1 |
| 20100260936 | Kato et al. | Oct 2010 | A1 |
| 20110039026 | Kato et al. | Feb 2011 | A1 |
| 20110048326 | Kato et al. | Mar 2011 | A1 |
| 20110100489 | Orito et al. | May 2011 | A1 |
| 20110104395 | Kumagai et al. | May 2011 | A1 |
| 20110126985 | Ohizumi et al. | Jun 2011 | A1 |
| 20110139074 | Kato et al. | Jun 2011 | A1 |
| 20110151122 | Kato et al. | Jun 2011 | A1 |
| 20110155056 | Kato et al. | Jun 2011 | A1 |
| 20110155057 | Kato et al. | Jun 2011 | A1 |
| 20110159187 | Kato et al. | Jun 2011 | A1 |
| 20110159188 | Kato et al. | Jun 2011 | A1 |
| 20110159702 | Ohizumi et al. | Jun 2011 | A1 |
| 20110214611 | Kato et al. | Sep 2011 | A1 |
| 20110236598 | Kumagai et al. | Sep 2011 | A1 |
| 20120075460 | Aikawa et al. | Mar 2012 | A1 |
| 20120076937 | Kato et al. | Mar 2012 | A1 |
| 20120222615 | Kato et al. | Sep 2012 | A1 |
| 20120267341 | Kato et al. | Oct 2012 | A1 |
| 20130059415 | Kato et al. | Mar 2013 | A1 |
| 20130122718 | Kato et al. | May 2013 | A1 |
| 20130164942 | Kato et al. | Jun 2013 | A1 |
| 20130251904 | Kato et al. | Sep 2013 | A1 |
| 20130337635 | Yamawaku et al. | Dec 2013 | A1 |
| 20130337658 | Ikegawa et al. | Dec 2013 | A1 |
| 20140017909 | Kato | Jan 2014 | A1 |
| 20140170859 | Yamawaku et al. | Jun 2014 | A1 |
| 20140174351 | Aikawa | Jun 2014 | A1 |
| 20140199856 | Kato et al. | Jul 2014 | A1 |
| 20140213068 | Kato et al. | Jul 2014 | A1 |
| 20140220260 | Yamawaku et al. | Aug 2014 | A1 |
| 20140345523 | Kikuchi et al. | Nov 2014 | A1 |
| 20140349032 | Kato et al. | Nov 2014 | A1 |
| 20150011087 | Oshimo et al. | Jan 2015 | A1 |
| 20150024143 | Kumagai et al. | Jan 2015 | A1 |
| 20150031218 | Karakawa | Jan 2015 | A1 |
| 20150078864 | Sato et al. | Mar 2015 | A1 |
| 20150079807 | Tamura et al. | Mar 2015 | A1 |
| 20150184293 | Kato et al. | Jul 2015 | A1 |
| 20150184294 | Kato et al. | Jul 2015 | A1 |
| 20150214029 | Hane et al. | Jul 2015 | A1 |
| 20150225849 | Kato et al. | Aug 2015 | A1 |
| Number | Date | Country |
|---|---|---|
| 1269046 | Oct 2000 | CN |
| 101076878 | Nov 2007 | CN |
| H04-287912 | Oct 1992 | JP |
| 3144664 | Mar 2001 | JP |
| 2001-254181 | Sep 2001 | JP |
| 2007-247066 | Sep 2007 | JP |
| 2013-161874 | Aug 2013 | JP |
| 2013-165116 | Aug 2013 | JP |
| 2006065014 | Jun 2006 | WO |
| 2013137115 | Sep 2013 | WO |
| Number | Date | Country | |
|---|---|---|---|
| 20170268104 A1 | Sep 2017 | US |
| Number | Date | Country | |
|---|---|---|---|
| Parent | 14613656 | Feb 2015 | US |
| Child | 15617102 | US |
