Masahisa Okuno

Person

Toyama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing semiconductor device and non-transitory com...
- Patent number 9,793,112
- Issue date Oct 17, 2017
- Hitachi Kokusai Electric Inc.
- Takuya Joda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 9,646,862
- Issue date May 9, 2017
- Hitachi Kokusai Electric, Inc.
- Katsuyoshi Hamano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, substrate processing apparatus, method...
- Patent number 9,502,239
- Issue date Nov 22, 2016
- Hitachi Kokusai Electric Inc.
- Masahisa Okuno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vaporizer for substrate processing apparatus
- Patent number D741823
- Issue date Oct 27, 2015
- Hitachi Kokusai Electric Inc.
- Hideto Tateno
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Substrate processing apparatus having rotatable slot-type antenna a...
- Patent number 8,987,645
- Issue date Mar 24, 2015
- Hitachi Kokusai Electric Inc.
- Unryu Ogawa
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Semiconductor device manufacturing method, substrate processing app...
- Patent number 8,866,271
- Issue date Oct 21, 2014
- Hitachi Kokusai Electric Inc.
- Katsuhiko Yamamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing a semico...
- Patent number 8,557,720
- Issue date Oct 15, 2013
- Hitachi Kokusai Electric, Inc.
- Tokunobu Akao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method of manufacturing a semico...
- Patent number 8,486,222
- Issue date Jul 16, 2013
- Hitachi Kokusai Electric Inc.
- Tokunobu Akao
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180204742
- Publication date Jul 19, 2018
- Hitachi Kokusai Electric Inc.
- Hideto TATENO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COM...
- Publication number 20160203976
- Publication date Jul 14, 2016
- Hitachi Kokusai Electric Inc.
- Takuya JODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Manufacturing Semiconductor Device, Substrate Processing...
- Publication number 20160013053
- Publication date Jan 14, 2016
- Hitachi Kokusai Electric Inc.
- Hiroshi ASHIHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, METHOD...
- Publication number 20150262817
- Publication date Sep 17, 2015
- Hitachi Kokusai Electric Inc.
- Masahisa OKUNO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
- Publication number 20150147894
- Publication date May 28, 2015
- Hitachi Kokusai Electric Inc.
- Katsuyoshi HAMANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20120129358
- Publication date May 24, 2012
- Hitachi Kokusai Electric Inc.
- Unryu OGAWA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING A SEMICO...
- Publication number 20120108080
- Publication date May 3, 2012
- Hitachi Kokusai Electric Inc.
- Tokunobu AKAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING A SEMICO...
- Publication number 20120108061
- Publication date May 3, 2012
- Hitachi Kokusai Electric, Inc.
- Tokunobu AKAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SUBSTRATE PROCESSING APP...
- Publication number 20120086107
- Publication date Apr 12, 2012
- Hitachi Kokusai Electric Inc.
- Katsuhiko Yamamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20110233198
- Publication date Sep 29, 2011
- Hitachi Kokusai Electric Inc.
- Masahisa OKUNO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Masahisa Okuno

Person

Patents Grantslast 30 patents

Method of manufacturing semiconductor device and non-transitory com...

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing method, substrate processing apparatus, method...

Vaporizer for substrate processing apparatus

Substrate processing apparatus having rotatable slot-type antenna a...

Semiconductor device manufacturing method, substrate processing app...

Substrate processing apparatus and method of manufacturing a semico...

Substrate processing apparatus and method of manufacturing a semico...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COM...

Method of Manufacturing Semiconductor Device, Substrate Processing...

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, METHOD...

Substrate Processing Apparatus, Method of Manufacturing Semiconduct...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING A SEMICO...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING A SEMICO...

SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SUBSTRATE PROCESSING APP...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD