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Masaichi Eda
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Gresham, OR, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method of forming a semiconductor device
Patent number
11,049,956
Issue date
Jun 29, 2021
Semiconductor Components Industries, LLC
Dean E. Probst
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reduced dry etching lag
Patent number
7,094,687
Issue date
Aug 22, 2006
LSI Logic Corporation
Masaichi Eda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of preventing resist poisoning in dual damascene structures
Patent number
6,969,683
Issue date
Nov 29, 2005
LSI Logic Corporation
Rongxiang Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for reducing microtrenching for borderless via...
Patent number
6,794,304
Issue date
Sep 21, 2004
LSI Logic Corporation
Shiqun Gu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High selectivity SiC etch in integrated circuit fabrication
Patent number
6,743,725
Issue date
Jun 1, 2004
LSI Logic Corporation
Rongxiang Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of preventing resist poisoning in dual damascene structures
Patent number
6,713,386
Issue date
Mar 30, 2004
LSI Logic Corporation
Rongxiang Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Anti-reflective coatings for use at 248 nm and 193 nm
Patent number
6,686,272
Issue date
Feb 3, 2004
LSI Logic Corporation
Sang-Yun Lee
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF FORMING A SEMICONDUCTOR DEVICE
Publication number
20200395468
Publication date
Dec 17, 2020
Semiconductor Components Industries, LLC
Dean E. PROBST
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REDUCED DRY ETCHING LAG
Publication number
20060199366
Publication date
Sep 7, 2006
Masaichi Eda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of preventing resist poisoning in dual damascene structures
Publication number
20040161927
Publication date
Aug 19, 2004
LSI Logic Corporation
Rongxiang Hu
H01 - BASIC ELECTRIC ELEMENTS