Masakazu Ban

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Nirasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Microwave heating apparatus and processing method
- Patent number 9,204,500
- Issue date Dec 1, 2015
- Tokyo Electron Limited
- Taro Ikeda
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Microwave plasma processing device and gate valve for microwave pla...
- Patent number 8,293,067
- Issue date Oct 23, 2012
- Tokyo Electron Limited
- Sunao Muraoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liner for plasma processing apparatus
- Patent number D658691
- Issue date May 1, 2012
- Tokyo Electron Limited
- Kouki Suzuki
- D15 - Machines not elsewhere specified
Information Patent Grant
Liner for plasma processing apparatus
- Patent number D658693
- Issue date May 1, 2012
- Tokyo Electron Limited
- Kouki Suzuki
- D15 - Machines not elsewhere specified
Information Patent Grant
Microwave plasma processing device and gate valve for microwave pla...
- Patent number 7,993,488
- Issue date Aug 9, 2011
- Tokyo Electron Limited
- Sunao Muraoka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MICROWAVE HEATING APPARATUS AND PROCESSING METHOD
- Publication number 20150090708
- Publication date Apr 2, 2015
- TOKYO ELECTRON LIMITED
- Sumi Tanaka
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
MICROWAVE HEATING APPARATUS AND PROCESSING METHOD
- Publication number 20130168390
- Publication date Jul 4, 2013
- TOKYO ELECTRON LIMITED
- Taro IKEDA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
MICROWAVE PLASMA PROCESSING DEVICE AND GATE VALVE FOR MICROWAVE PLA...
- Publication number 20110265952
- Publication date Nov 3, 2011
- TOKYO ELECTRON LIMITED
- Sunao MURAOKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE PLASMA PROCESSING DEVICE AND GATE VALVE FOR MICROWAVE PLA...
- Publication number 20080006371
- Publication date Jan 10, 2008
- TOKYO ELECTRON LIMITED
- Sunao MURAOKA
- H01 - BASIC ELECTRIC ELEMENTS