Masami Yonekawa

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Particle removal method, particle removal apparatus, and method for...
- Patent number 12,157,150
- Issue date Dec 3, 2024
- Canon Kabushiki Kaisha
- Masami Yonekawa
- B08 - CLEANING
Information Patent Grant
Container, processing apparatus, particle removing method, and meth...
- Patent number 11,798,818
- Issue date Oct 24, 2023
- Canon Kabushiki Kaisha
- Masami Yonekawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Imprint apparatus, method of operating the same, and method of manu...
- Patent number 11,036,149
- Issue date Jun 15, 2021
- Canon Kabushiki Kaisha
- Yoichi Matsuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus, method for manufacturing article, and exposure a...
- Patent number 10,889,052
- Issue date Jan 12, 2021
- Canon Kabushiki Kaisha
- Masami Yonekawa
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Lithography apparatus and method of manufacturing article
- Patent number 10,444,646
- Issue date Oct 15, 2019
- Canon Kabushiki Kaisha
- Masami Yonekawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography apparatus and article manufacturing method
- Patent number 10,228,624
- Issue date Mar 12, 2019
- Canon Kabushiki Kaisha
- Masami Yonekawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reflective original, exposure method, and device manufacturing method
- Patent number 9,213,231
- Issue date Dec 15, 2015
- Canon Kabushiki Kaisha
- Masami Yonekawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Trapping device that traps particles in vacuum atmosphere
- Patent number 8,814,970
- Issue date Aug 26, 2014
- Canon Kabushiki Kaisha
- Masami Yonekawa
- B08 - CLEANING
Information Patent Grant
Exposure apparatus and original
- Patent number 7,911,588
- Issue date Mar 22, 2011
- Canon Kabushiki Kaisha
- Masami Yonekawa
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Exposure apparatus having a processing chamber, a vacuum chamber an...
- Patent number 7,670,754
- Issue date Mar 2, 2010
- Canon Kabushiki Kaisha
- Ryo Edo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for removing contaminant on original, method o...
- Patent number 7,319,507
- Issue date Jan 15, 2008
- Canon Kabushiki Kaisha
- Masami Yonekawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 7,193,682
- Issue date Mar 20, 2007
- Canon Kabushiki Kaisha
- Masami Yonekawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure apparatus and its control method, stage apparatus, and dev...
- Patent number 6,741,328
- Issue date May 25, 2004
- Canon Kabushiki Kaisha
- Masami Yonekawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and control method for correcting an exposure op...
- Patent number 6,433,351
- Issue date Aug 13, 2002
- Canon Kabushiki Kaisha
- Masami Yonekawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and its control method, stage apparatus, and dev...
- Patent number 6,330,052
- Issue date Dec 11, 2001
- Canon Kabushiki Kaisha
- Masami Yonekawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection aligner and projection aligning method
- Patent number 6,088,082
- Issue date Jul 11, 2000
- Canon Kabushiki Kaisha
- Masami Yonekawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection optical system, exposure apparatus and semiconductor-dev...
- Patent number 5,953,106
- Issue date Sep 14, 1999
- Canon Kabushiki Kaisha
- Yasuyuki Unno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus which determines the minimum number o...
- Patent number 5,654,792
- Issue date Aug 5, 1997
- Canon Kabushiki Kaisha
- Masami Yonekawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus with an aberration compensation devic...
- Patent number 5,184,176
- Issue date Feb 2, 1993
- Canon Kabushiki Kaisha
- Yasuyuki Unno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PARTICLE REMOVAL METHOD, PARTICLE REMOVAL APPARATUS, AND METHOD FOR...
- Publication number 20230149982
- Publication date May 18, 2023
- Canon Kabushiki Kaisha
- Masami Yonekawa
- B08 - CLEANING
Information Patent Application
EVALUATION METHOD, SUBSTRATE PROCESSING APPARATUS, MANUFACTURING ME...
- Publication number 20220364972
- Publication date Nov 17, 2022
- Canon Kabushiki Kaisha
- Masami Yonekawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTAINER, PROCESSING APPARATUS, PARTICLE REMOVING METHOD, AND METH...
- Publication number 20200176275
- Publication date Jun 4, 2020
- Canon Kabushiki Kaisha
- Masami Yonekawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20190064682
- Publication date Feb 28, 2019
- Canon Kabushiki Kaisha
- Masami Yonekawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS, METHOD OF OPERATING THE SAME, AND METHOD OF MANU...
- Publication number 20180356741
- Publication date Dec 13, 2018
- Canon Kabushiki Kaisha
- Yoichi Matsuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS, METHOD FOR MANUFACTURING ARTICLE, AND EXPOSURE A...
- Publication number 20170246792
- Publication date Aug 31, 2017
- Canon Kabushiki Kaisha
- Masami Yonekawa
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
LITHOGRAPHY APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20170235234
- Publication date Aug 17, 2017
- Canon Kabushiki Kaisha
- Masami Yonekawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
REFLECTIVE ORIGINAL, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
- Publication number 20150017573
- Publication date Jan 15, 2015
- Canon Kabushiki Kaisha
- Masami Yonekawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TRAPPING DEVICE THAT TRAPS PARTICLES IN VACUUM ATMOSPHERE
- Publication number 20110186082
- Publication date Aug 4, 2011
- Canon Kabushiki Kaisha
- Masami YONEKAWA
- B08 - CLEANING
Information Patent Application
EXPOSURE APPARATUS
- Publication number 20100183987
- Publication date Jul 22, 2010
- Canon Kabushiki Kaisha
- Masami Yonekawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND ORIGINAL
- Publication number 20080246939
- Publication date Oct 9, 2008
- Canon Kabushiki Kaisha
- Masami Yonekawa
- B82 - NANO-TECHNOLOGY
Information Patent Application
EXPOSURE APPARATUS, REMOVAL METHOD, AND DEVICE MANUFACTURING METHOD
- Publication number 20070285635
- Publication date Dec 13, 2007
- MASAMI YONEKAWA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20070127004
- Publication date Jun 7, 2007
- Canon Kabushiki Kaisha
- Masami Yonekawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus and method for removing contaminant on original, method o...
- Publication number 20060082743
- Publication date Apr 20, 2006
- Canon Kabushiki Kaisha
- Masami Yonekawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and device manufacturing method
- Publication number 20050183823
- Publication date Aug 25, 2005
- Canon Kabushiki Kaisha
- Masami Yonekawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Processing system and exposure apparatus using the same
- Publication number 20050121144
- Publication date Jun 9, 2005
- Canon Kabushiki Kaisha
- Ryo Edo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND CONTROL METHOD FOR CORRECTING AN EXPOSURE OP...
- Publication number 20020053644
- Publication date May 9, 2002
- MASAMI YONEKAWA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and its control method, stage apparatus, and dev...
- Publication number 20020044269
- Publication date Apr 18, 2002
- Masami Yonekawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Masami Yonekawa

Person

Patents Grantslast 30 patents

Particle removal method, particle removal apparatus, and method for...

Container, processing apparatus, particle removing method, and meth...

Imprint apparatus, method of operating the same, and method of manu...

Imprint apparatus, method for manufacturing article, and exposure a...

Lithography apparatus and method of manufacturing article

Lithography apparatus and article manufacturing method

Reflective original, exposure method, and device manufacturing method

Trapping device that traps particles in vacuum atmosphere

Exposure apparatus and original

Exposure apparatus having a processing chamber, a vacuum chamber an...

Apparatus and method for removing contaminant on original, method o...

Exposure apparatus and device manufacturing method

Exposure apparatus and its control method, stage apparatus, and dev...

Exposure apparatus and control method for correcting an exposure op...

Exposure apparatus and its control method, stage apparatus, and dev...

Projection aligner and projection aligning method

Projection optical system, exposure apparatus and semiconductor-dev...

Projection exposure apparatus which determines the minimum number o...

Projection exposure apparatus with an aberration compensation devic...

Patents Applicationslast 30 patents

PARTICLE REMOVAL METHOD, PARTICLE REMOVAL APPARATUS, AND METHOD FOR...

EVALUATION METHOD, SUBSTRATE PROCESSING APPARATUS, MANUFACTURING ME...

CONTAINER, PROCESSING APPARATUS, PARTICLE REMOVING METHOD, AND METH...

LITHOGRAPHY APPARATUS AND METHOD OF MANUFACTURING ARTICLE

IMPRINT APPARATUS, METHOD OF OPERATING THE SAME, AND METHOD OF MANU...

IMPRINT APPARATUS, METHOD FOR MANUFACTURING ARTICLE, AND EXPOSURE A...

LITHOGRAPHY APPARATUS AND ARTICLE MANUFACTURING METHOD

REFLECTIVE ORIGINAL, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

TRAPPING DEVICE THAT TRAPS PARTICLES IN VACUUM ATMOSPHERE

EXPOSURE APPARATUS

EXPOSURE APPARATUS AND ORIGINAL

EXPOSURE APPARATUS, REMOVAL METHOD, AND DEVICE MANUFACTURING METHOD

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

Apparatus and method for removing contaminant on original, method o...

Exposure apparatus and device manufacturing method

Processing system and exposure apparatus using the same

EXPOSURE APPARATUS AND CONTROL METHOD FOR CORRECTING AN EXPOSURE OP...

Exposure apparatus and its control method, stage apparatus, and dev...