Masamichi Hara

Person

Clifton Park, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
Film forming apparatus and film forming method
- Patent number 8,518,181
- Issue date Aug 27, 2013
- Tokyo Electron Limited
- Masamichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for reducing particle contamination in a depos...
- Patent number 8,268,078
- Issue date Sep 18, 2012
- Tokyo Electron Limited
- Kenji Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of integrating PEALD Ta-containing films into Cu metallization
- Patent number 7,959,985
- Issue date Jun 14, 2011
- Tokyo Electron Limited
- Tadahiro Ishizaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and fabrication process of a semiconduc...
- Patent number 7,772,111
- Issue date Aug 10, 2010
- Tokyo Electron Limited
- Taro Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film precursor tray for use in a film precursor evaporation system...
- Patent number 7,708,835
- Issue date May 4, 2010
- Tokyo Electron Limited
- Kenji Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-tray film precursor evaporation system and thin film depositi...
- Patent number 7,638,002
- Issue date Dec 29, 2009
- Tokyo Electron Limited
- Kenji Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for preparing solid precursor tray for use in solid precurso...
- Patent number 7,488,512
- Issue date Feb 10, 2009
- Tokyo Electron Limited
- Kenji Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Replaceable precursor tray for use in a multi-tray solid precursor...
- Patent number 7,484,315
- Issue date Feb 3, 2009
- Tokyo Electron Limited
- Kenji Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for thin film deposition using multi-tray film precursor eva...
- Patent number 7,459,396
- Issue date Dec 2, 2008
- Tokyo Electron Limited
- Kenji Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and fabrication process of a semiconduc...
- Patent number 7,332,426
- Issue date Feb 19, 2008
- Tokyo Electron Limited
- Taro Ikeda
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR THERMAL AND PLASMA ENHANCED VAPOR DEPOSITION AND METH...
- Publication number 20120315404
- Publication date Dec 13, 2012
- TOKYO ELECTRON LIMITED
- Yicheng Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR REDUCING CARBON MONOXIDE POISONING AT THE...
- Publication number 20070234955
- Publication date Oct 11, 2007
- TOKYO ELECTRON LIMITED
- Kenji Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for reducing particle formation in a vapor dis...
- Publication number 20070218200
- Publication date Sep 20, 2007
- Kenji Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of integrating PEALD Ta- containing films into Cu metallization
- Publication number 20070218683
- Publication date Sep 20, 2007
- TOKYO ELECTRON LIMITED
- Tadahiro Ishizaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for reducing particle contamination in a depos...
- Publication number 20070215048
- Publication date Sep 20, 2007
- Kenji Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND FABRICATION PROCESS OF A SEMICONDUC...
- Publication number 20070134907
- Publication date Jun 14, 2007
- TOKYO ELECTRON LIMITED
- Taro Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for thermal and plasma enhanced vapor deposition and meth...
- Publication number 20070116873
- Publication date May 24, 2007
- TOKYO ELECTRON LIMITED
- Yicheng Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for thermal and plasma enhanced vapor deposition and meth...
- Publication number 20070116872
- Publication date May 24, 2007
- TOKYO ELECTRON LIMITED
- Yicheng Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR THIN FILM DEPOSITION USING MULTI-TRAY FILM PRECURSOR EVA...
- Publication number 20070032079
- Publication date Feb 8, 2007
- TOKYO ELECTRON LIMITED
- Kenji Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film precursor evaporation system and method of using
- Publication number 20060185597
- Publication date Aug 24, 2006
- Kenji Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film precursor tray for use in a film precursor evaporation system...
- Publication number 20060185598
- Publication date Aug 24, 2006
- Kenji Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multi-tray film precursor evaporation system and thin film depositi...
- Publication number 20060112882
- Publication date Jun 1, 2006
- TOKYO ELECTRON LIMITED
- Kenji Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Replaceable precursor tray for use in a multi-tray solid precursor...
- Publication number 20060112883
- Publication date Jun 1, 2006
- Kenji Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for preparing solid precursor tray for use in solid precurso...
- Publication number 20060115593
- Publication date Jun 1, 2006
- Kenji Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film forming apparatus and film forming method
- Publication number 20060032444
- Publication date Feb 16, 2006
- TOKYO ELECTRON LIMITED
- Masamichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing method and fabrication process of a semiconduc...
- Publication number 20050272247
- Publication date Dec 8, 2005
- TOKYO ELECTRON LIMITED
- Taro Ikeda
- H01 - BASIC ELECTRIC ELEMENTS

Masamichi Hara

Person

Patents Grantslast 30 patents

Film forming apparatus and film forming method

Method and apparatus for reducing particle contamination in a depos...

Method of integrating PEALD Ta-containing films into Cu metallization

Substrate processing method and fabrication process of a semiconduc...

Film precursor tray for use in a film precursor evaporation system...

Multi-tray film precursor evaporation system and thin film depositi...

Method for preparing solid precursor tray for use in solid precurso...

Replaceable precursor tray for use in a multi-tray solid precursor...

Method for thin film deposition using multi-tray film precursor eva...

Substrate processing method and fabrication process of a semiconduc...

Patents Applicationslast 30 patents

APPARATUS FOR THERMAL AND PLASMA ENHANCED VAPOR DEPOSITION AND METH...

METHOD AND APPARATUS FOR REDUCING CARBON MONOXIDE POISONING AT THE...

Method and apparatus for reducing particle formation in a vapor dis...

Method of integrating PEALD Ta- containing films into Cu metallization

Method and apparatus for reducing particle contamination in a depos...

SUBSTRATE PROCESSING METHOD AND FABRICATION PROCESS OF A SEMICONDUC...

Apparatus for thermal and plasma enhanced vapor deposition and meth...

Apparatus for thermal and plasma enhanced vapor deposition and meth...

METHOD FOR THIN FILM DEPOSITION USING MULTI-TRAY FILM PRECURSOR EVA...

Film precursor evaporation system and method of using

Film precursor tray for use in a film precursor evaporation system...

Multi-tray film precursor evaporation system and thin film depositi...

Replaceable precursor tray for use in a multi-tray solid precursor...

Method for preparing solid precursor tray for use in solid precurso...

Film forming apparatus and film forming method

Substrate processing method and fabrication process of a semiconduc...