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Masamichi Kawano

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Patents Grantslast 30 patents

  • Information Patent Grant

    Semiconductor manufacturing apparatus
    • Patent number 7,218,985
    • Issue date May 15, 2007
    • Hitachi High-Technologies Corporation
    • Hidemitsu Naya
    • Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
  • Information Patent Grant

    Semiconductor manufacturing apparatus
    • Patent number 7,027,888
    • Issue date Apr 11, 2006
    • Hitachi High-Technologies Corporation
    • Hidemitsu Naya
    • Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
  • Information Patent Grant

    Semiconductor manufacturing apparatus
    • Patent number 6,941,186
    • Issue date Sep 6, 2005
    • Hitachi High-Technologies Corporation
    • Hidemitsu Naya
    • Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
  • Information Patent Grant

    Charged particle beam exposure apparatus
    • Patent number 5,424,550
    • Issue date Jun 13, 1995
    • Hitachi, Ltd.
    • Masamichi Kawano
    • B82 - NANO-TECHNOLOGY
  • Information Patent Grant

    Charged particle beam exposure apparatus
    • Patent number 5,281,827
    • Issue date Jan 25, 1994
    • Hitachi, Ltd.
    • Masamichi Kawano
    • B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents