Claims
- 1. A charged particle beam exposure apparatus, comprising:
- irradiating means for irradiating a sample with a charged particle beam;
- analog control means for analog controlling the charged particle beam;
- digital control means for digital controlling the analog control means; and
- a digital transmission path connecting the analog control means to the digital control means;
- wherein the analog control means is disposed inside a room, and the digital control means is disposed outside the room.
- 2. A charged particle beam exposure apparatus according to claim 1, wherein
- the digital transmission path includes a parallel digital transmission path, and
- parallel digital data is transferred between the analog control means and the digital control means over the parallel digital transmission path.
- 3. A charged particle beam exposure apparatus according to claim 2, wherein the parallel digital data is transferred between the analog control means and the digital control means over the parallel digital transmission path during a variable parallel transfer period.
- 4. A charged particle beam exposure apparatus according to claim 1, wherein the irradiating means is disposed inside the room.
- 5. A charged particle beam exposure apparatus according to claim 1, further comprising data transmitting means for transmitting data to the digital control means.
- 6. A charged particle beam exposure apparatus according to claim 5, wherein the data transmitting means is disposed outside the room.
- 7. A charged particle beam exposure apparatus according to claim 5, wherein the data transmitting means is disposed inside the room.
- 8. A charged particle beam exposure apparatus according to claim 1, further comprising operation and display means for transmitting operating data for operating the irradiating means to the digital control mean, and for displaying data indicating states of portions of the irradiating means.
- 9. A charged particle beam exposure apparatus according to claim 8, wherein the operation and display means is disposed outside the room.
- 10. A charged particle beam exposure apparatus according to claim 8, wherein the operation and display means is disposed inside the room.
- 11. A charged particle beam exposure apparatus according to claim 8, wherein
- the digital transmission path includes a parallel digital transmission path,
- parallel digital data is transferred between the analog control means and the digital control means over the parallel digital transmission path, and
- serial digital data indicating states of portions of the irradiating means is transferred from the irradiating means and the analog control means to the operation and display means via the digital transmission path and the digital control means.
- 12. A charged particle beam exposure apparatus according to claim 11, wherein the parallel digital data is transferred between the analog control means and the digital control means over the parallel digital transmission path during a variable parallel transfer period.
- 13. A charged particle beam exposure apparatus, comprising:
- an irradiator for irradiating a sample with a charged particle beam;
- an analog controller for analog controlling the charged particle beam;
- a digital controller for digital controlling the analog controller; and
- a digital transmission path connecting the analog controller to the digital controller;
- wherein the analog controller is disposed inside a room, and the digital controller is disposed outside the room.
- 14. A charged particle beam exposure method, comprising the steps of:
- disposing analog control means for analog controlling a charged particle beam inside a room;
- disposing digital control means for digital controlling the analog control means outside the room;
- connecting the analog control means to the digital control means with a digital transmission path;
- irradiating a sample with a charged particle beam with irradiating means;
- analog controlling the charged particle beam with the analog control means; and
- digital controlling the analog control means with the digital control means.
- 15. A charged particle beam exposure method according to claim 14, wherein
- the digital transmission path includes a parallel digital transmission path, and
- the method further comprises the step of
- transferring parallel digital data between the analog control means and the digital control means over the parallel digital transmission path.
- 16. A charged particle beam exposure method according to claim 15, wherein
- the parallel digital data is transferred between the analog control means and the digital control means over the parallel digital transmission path during a parallel transfer period, and
- the method further comprises the step of
- varying the parallel transfer period.
- 17. A charged particle beam exposure method according to claim 14, further comprising the step of disposing the irradiating means inside the room.
- 18. A charged particle beam exposure method according to claim 14, further comprising the step of transmitting data to the digital control means with data transmitting means.
- 19. A charged particle beam exposure method according to claim 18, further comprising the step of disposing the data transmitting means outside the room.
- 20. A charged particle beam exposure method according to claim 18, further comprising the step of disposing the data transmitting means inside the room.
- 21. A charged particle beam exposure method according to claim 14, further comprising the step of transmitting operating data for operating the irradiating means to the digital control mean and displaying data indicating states of portions of the irradiating means with operation and display means.
- 22. A charged particle beam exposure method according to claim 21, further comprising the step of disposing the operation and display means outside the room.
- 23. A charged particle beam exposure method according to claim 21, further comprising the step of disposing the operation and display means inside the room.
- 24. A charged particle beam exposure method according to claim 21, wherein
- the digital transmission path includes a parallel digital transmission path, and
- the method further comprises the steps of
- transferring parallel digital data between the analog control means and the digital control means over the parallel digital transmission path, and
- transferring serial digital data indicating states of portions of the irradiating means from the irradiating means and the analog control means to the operation and display means via the digital transmission path and the digital control means.
- 25. A charged particle beam exposure method according to claim 24, wherein
- the parallel digital data is transferred between the analog control means and the digital control means over the parallel digital transmission path during a parallel transfer period, and
- the method further comprises the step of
- varying the parallel transfer period.
- 26. A charged particle beam exposure method, comprising the steps of:
- disposing an analog controller for analog controlling a charged particle beam inside a room;
- disposing a digital controller for digital controlling the analog controller outside the room;
- connecting the analog controller to the digital controller with a digital transmission path;
- irradiating a sample with a charged particle beam with an irradiator;
- analog controlling the charged particle beam with the analog controller; and
- digital controlling the analog controller with the digital controller.
- 27. A charged particle beam exposure apparatus, comprising:
- irradiating means for irradiating a sample with a charged particle beam;
- analog control means for controlling the charged particle beam with analog control signals;
- digital control means for controlling the analog control means with digital control signals; and
- a digital transmission path connecting the digital control means to the analog control means for transmitting the digital control signals between the digital control means and the analog control means;
- wherein the analog control means is disposed inside an enclosed space, and the digital control means is disposed outside the enclosed space.
- 28. A charged particle beam exposure apparatus according to claim 27, wherein the analog control means includes means for converting the digital control signals into the analog control signals.
- 29. A charged particle beam exposure apparatus according to claim 27, wherein
- the digital control signals include digital control signals in the form of parallel digital data,
- the digital transmission path includes a parallel digital transmission path, and
- the parallel digital data is transmitted between the digital control means and the analog control means over the parallel digital transmission path.
- 30. A charged particle beam exposure apparatus according to claim 29, wherein the parallel digital data is transmitted between the digital control means and the analog control means over the parallel digital transmission path during a variable parallel transfer period.
- 31. A charged particle beam exposure apparatus according to claim 27, wherein the irradiating means is disposed inside the enclosed space.
- 32. A charged particle beam exposure apparatus according to claim 27, further comprising data transmitting means for transmitting data to the digital control means.
- 33. A charged particle beam exposure apparatus according to claim 32, wherein the data transmitting means is disposed outside the enclosed space.
- 34. A charged particle beam exposure apparatus according to claim 32, wherein the data transmitting means is disposed inside the enclosed space.
- 35. A charged particle beam exposure apparatus according to claim 27, further comprising operation and display means for transmitting operating data for operating the irradiating means to the digital control means, and displaying data indicating states of portions of the irradiating means.
- 36. A charged particle beam exposure apparatus according to claim 35, wherein the operation and display means is disposed outside the enclosed space.
- 37. A charged particle beam exposure apparatus according to claim 35, wherein the operation and display means is disposed inside the enclosed space.
- 38. A charged particle beam exposure apparatus according to claim 35, wherein
- the digital control signals include digital control signals in the form of parallel digital data,
- the digital transmission path includes a parallel digital transmission path and a serial digital transmission path,
- the parallel digital data is transmitted between the digital control means and the analog control means over the parallel digital transmission path, and
- serial digital data indicating states of portions of the irradiating means is transmitted between the irradiating means and the operation and display means, and between the analog control means and the operation and display means, via the serial digital transmission path and the digital control means.
- 39. A charged particle beam exposure apparatus according to claim 38, wherein the parallel digital data is transmitted between the digital control means and the analog control means over the parallel digital transmission path during a variable parallel transfer period.
- 40. A charged particle beam exposure apparatus, comprising:
- an irradiator for irradiating a sample with a charged particle beam;
- an analog controller for controlling the charged particle beam with analog control signals;
- a digital controller for controlling the analog controller with digital control signals; and
- a digital transmission path connecting the digital controller to the analog controller for transmitting the digital control signals between the digital controller and the analog controller;
- wherein the analog controller is disposed inside an enclosed space, and the digital controller is disposed outside the enclosed space.
- 41. A charged particle beam exposure apparatus according to claim 40, wherein the analog controller includes means for converting the digital control signals into the analog control signals.
- 42. A charged particle beam exposure method, comprising the steps of:
- disposing analog control means for controlling a charged particle beam with analog control signals inside an enclosed space;
- disposing digital control means for controlling the analog control means with digital control signals outside the enclosed space;
- connecting the digital control means to the analog control means with a digital transmission path for transmitting the digital control signals between the digital control means and the analog control means;
- irradiating a sample with a charged particle beam with irradiating means;
- controlling the charged particle beam with the analog control means; and
- controlling the analog control means with the digital control means.
- 43. A charged particle beam exposure method according to claim 42, wherein the analog control means includes means for converting the digital control signals into the analog control signals.
- 44. A charged particle beam exposure method according to claim 42, wherein
- the digital control signals include digital control signals in the form of parallel digital data,
- the digital transmission path includes a parallel digital transmission path, and
- the method further comprises the step of
- transmitting the parallel digital data between the digital control means and the analog control means over the parallel digital transmission path.
- 45. A charged particle beam exposure method according to claim 44, wherein
- the parallel digital data is transmitted between the digital control means and the analog control means over the parallel digital transmission path during a parallel transfer period, and
- the method further comprises the step of
- varying the parallel transfer period.
- 46. A charged particle beam exposure method according to claim 42, further comprising the step of disposing the irradiating means inside the enclosed space.
- 47. A charged particle beam exposure method according to claim 42, further comprising the step of transmitting data to the digital control means with data transmitting means.
- 48. A charged particle beam exposure method according to claim 47, further comprising the step of disposing the data transmitting means outside the enclosed space.
- 49. A charged particle beam exposure method according to claim 47, further comprising the step of disposing the data transmitting means inside the enclosed space.
- 50. A charged particle beam exposure method according to claim 42, further comprising the step of transmitting operating data for operating the irradiating means to the digital control means, and displaying data indicating states of portions of the irradiating means, with operation and display means.
- 51. A charged particle beam exposure method according to claim 50, further comprising the step of disposing the operation and display means outside the enclosed space.
- 52. A charged particle beam exposure method according to claim 50, further comprising the step of disposing the operation and display means inside the enclosed space.
- 53. A charged particle beam exposure method according to claim 50, wherein
- the digital control signals include digital control signals in the form of parallel digital data,
- the digital transmission path includes a parallel digital transmission path and a serial digital transmission path, and
- the method further comprises the steps of
- transmitting the parallel digital data between the digital control means and the analog control means over the parallel digital transmission path, and
- transmitting serial digital data indicating states of portions of the irradiating means between the irradiating means and the operation and display means, and between the analog control means and the operation and display means, via the serial digital transmission path and the digital control means.
- 54. A charged particle beam exposure method according to claim 53, wherein
- the parallel digital data is transmitted between the digital control means and the analog control means over the parallel digital transmission path during a parallel transfer period, and
- the method further comprises the step of
- varying the parallel transfer period.
- 55. A charged particle beam exposure method, comprising the steps of:
- disposing an analog controller for controlling a charged particle beam with analog control signals inside an enclosed space;
- disposing a digital controller for controlling the analog controller with digital control signals outside the enclosed space;
- connecting the digital controller to the analog controller with a digital transmission path for transmitting the digital control signals between the digital control means and the analog control means;
- irradiating a sample with a charged particle beam with an irradiator;
- controlling the charged particle beam with the analog controller; and
- controlling the analog controller with the digital controller.
- 56. A charged particle beam exposure method according to claim 55, wherein the analog controller includes means for converting the digital control signals into the analog control signals.
- 57. An apparatus comprising:
- a device to be controlled;
- analog control means for controlling the device to be controlled with analog control signals;
- digital control means for controlling the analog control means with digital control signals; and
- a digital transmission path connecting the digital control means to the analog control means for transmitting the digital control signals between the digital control means and the analog control means;
- wherein the analog control means is disposed inside an enclosed space, and the digital control means is disposed outside the enclosed space.
- 58. An apparatus according to claim 57, wherein the apparatus is a charged particle beam exposure apparatus; and
- wherein the device to be controlled is irradiating means for irradiating a sample with a charged particle beam.
- 59. A method comprising the steps of:
- disposing analog control means for controlling a device to be controlled with analog control signals inside an enclosed space;
- disposing digital control means for controlling the analog control means with digital control signals outside the enclosed space;
- connecting the digital control means to the analog control means with a digital transmission path for transmitting the digital control signals between the digital control means and the analog control means;
- controlling the device to be controlled with the analog control means; and
- controlling the analog control means with the digital control means.
- 60. A method according to claim 59, wherein the method is a charged particle beam exposure method;
- wherein the device to be controlled is irradiating means for irradiating a sample with a charged particle beam; and
- wherein the method further comprises the step of irradiating the sample with the charged particle beam with the irradiating means.
Priority Claims (1)
Number |
Date |
Country |
Kind |
2-250277 |
Sep 1990 |
JPX |
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Parent Case Info
This is a continuation of application Ser. No. 763,145, filed on Sep. 20, 1991, now U.S. Pat. No. 5,281,827.
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Continuations (1)
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Number |
Date |
Country |
Parent |
763145 |
Sep 1991 |
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