Masanobu Hatanaka

Person

Susono-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Etch-resistant doped scavenging carbide electrodes
- Patent number 11,770,986
- Issue date Sep 26, 2023
- International Business Machines Corporation
- John Rozen
Information Patent Grant
Conformal replacement gate electrode for short channel devices
- Patent number 11,195,929
- Issue date Dec 7, 2021
- International Business Machines Corporation
- Takashi Ando
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Thin film formation method
- Patent number 11,189,482
- Issue date Nov 30, 2021
- Ulvac, Inc.
- Masanobu Hatanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conformal replacement gate electrode for short channel devices
- Patent number 10,529,815
- Issue date Jan 7, 2020
- International Business Machines Corporation
- Takashi Ando
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Film-forming apparatus
- Patent number 8,419,854
- Issue date Apr 16, 2013
- Ulvac, Inc.
- Masanobu Hatanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device manufacturing method and semiconductor device...
- Patent number 8,367,542
- Issue date Feb 5, 2013
- Ulvac, Inc.
- Masanobu Hatanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing component for vacuum apparatus, resin coating...
- Patent number 8,252,113
- Issue date Aug 28, 2012
- ULVAC, Inc.
- Masanobu Hatanaka
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method of forming barrier film
- Patent number 8,084,368
- Issue date Dec 27, 2011
- ULVAC, Inc.
- Masanobu Hatanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device manufacturing method and semiconductor device...
- Patent number 8,043,963
- Issue date Oct 25, 2011
- Ulvac, Inc.
- Masanobu Hatanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum film-forming apparatus
- Patent number 7,828,900
- Issue date Nov 9, 2010
- Ulvac, Inc.
- Masanobu Hatanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum film-forming apparatus
- Patent number 7,763,115
- Issue date Jul 27, 2010
- ULVAC, Inc.
- Masanobu Hatanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ETCH-RESISTANT DOPED SCAVENGING CARBIDE ELECTRODES
- Publication number 20220344586
- Publication date Oct 27, 2022
- International Business Machines Corporation
- John Rozen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONFORMAL REPLACEMENT GATE ELECTRODE FOR SHORT CHANNEL DEVICES
- Publication number 20200066859
- Publication date Feb 27, 2020
- International Business Machines Corporation
- Takashi Ando
- B82 - NANO-TECHNOLOGY
Information Patent Application
THIN FILM FORMATION METHOD
- Publication number 20190355576
- Publication date Nov 21, 2019
- Ulvac, Inc.
- Masanobu HATANAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONFORMAL REPLACEMENT GATE ELECTRODE FOR SHORT CHANNEL DEVICES
- Publication number 20190131418
- Publication date May 2, 2019
- International Business Machines Corporation
- Takashi Ando
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE...
- Publication number 20120031650
- Publication date Feb 9, 2012
- Ulvac, Inc.
- Masanobu Hatanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING APPARATUS
- Publication number 20100180819
- Publication date Jul 22, 2010
- Ulvac, Inc.
- Masanobu Hatanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE...
- Publication number 20100068880
- Publication date Mar 18, 2010
- Masanobu Hatanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING BARRIER FILM
- Publication number 20100068891
- Publication date Mar 18, 2010
- Masanobu Hatanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for Producing Component for Vacuum Apparatus, Resin Coating...
- Publication number 20090238968
- Publication date Sep 24, 2009
- Masanobu Hatanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM FILM-FORMING APPARATUS
- Publication number 20080202423
- Publication date Aug 28, 2008
- ULVAC, Inc.
- Masanobu HATANAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vaccum film-forming apparatus
- Publication number 20050268852
- Publication date Dec 8, 2005
- Masanobu Hatanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Masanobu Hatanaka

Person

Patents Grantslast 30 patents

Etch-resistant doped scavenging carbide electrodes

Conformal replacement gate electrode for short channel devices

Thin film formation method

Conformal replacement gate electrode for short channel devices

Film-forming apparatus

Semiconductor device manufacturing method and semiconductor device...

Method for producing component for vacuum apparatus, resin coating...

Method of forming barrier film

Semiconductor device manufacturing method and semiconductor device...

Vacuum film-forming apparatus

Vacuum film-forming apparatus

Patents Applicationslast 30 patents

ETCH-RESISTANT DOPED SCAVENGING CARBIDE ELECTRODES

CONFORMAL REPLACEMENT GATE ELECTRODE FOR SHORT CHANNEL DEVICES

THIN FILM FORMATION METHOD

CONFORMAL REPLACEMENT GATE ELECTRODE FOR SHORT CHANNEL DEVICES

SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE...

FILM-FORMING APPARATUS

SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE...

METHOD OF FORMING BARRIER FILM

Method for Producing Component for Vacuum Apparatus, Resin Coating...

VACUUM FILM-FORMING APPARATUS

Vaccum film-forming apparatus