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Masanori Ono
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Chiba, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Temperature controlled substrate support assembly
Patent number
11,158,526
Issue date
Oct 26, 2021
Applied Materials, Inc.
Vijay D. Parkhe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Real time monitoring with closed loop chucking force control
Patent number
10,460,916
Issue date
Oct 29, 2019
Applied Materials, Inc.
Wendell Glenn Boyd
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pixilated cooling, temperature controlled substrate support assembly
Patent number
10,403,534
Issue date
Sep 3, 2019
Applied Materials, Inc.
Vijay D. Parkhe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck with external flow adjustments for improved tem...
Patent number
10,121,688
Issue date
Nov 6, 2018
Applied Materials, Inc.
Matthew J. Busche
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Control systems employing deflection sensors to control clamping fo...
Patent number
9,875,923
Issue date
Jan 23, 2018
Applied Materials, Inc.
Wendell Boyd
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck with external flow adjustments for improved tem...
Patent number
9,622,375
Issue date
Apr 11, 2017
Applied Materials, Inc.
Matthew J. Busche
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Control systems employing deflection sensors to control clamping fo...
Patent number
9,558,981
Issue date
Jan 31, 2017
Applied Materials, Inc.
Wendell Boyd
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck with internal flow adjustments for improved tem...
Patent number
9,520,315
Issue date
Dec 13, 2016
Applied Materials, Inc.
Vijay D. Parkhe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sputtering apparatus with magnetron device
Patent number
6,506,290
Issue date
Jan 14, 2003
Applied Materials, Inc.
Masanori Ono
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus for retaining a workpiece upon a workpiece support and me...
Patent number
6,259,592
Issue date
Jul 10, 2001
Applied Materials, Inc.
Masanori Ono
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Patents Applications
last 30 patents
Information
Patent Application
TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY
Publication number
20220013374
Publication date
Jan 13, 2022
Applied Materials, Inc.
Vijay D. PARKHE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REAL TIME MONITORING WITH CLOSED LOOP CHUCKING FORCE CONTROL
Publication number
20180330926
Publication date
Nov 15, 2018
Applied Materials, Inc.
Wendell Glenn BOYD
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK WITH EXTERNAL FLOW ADJUSTMENTS FOR IMPROVED TEM...
Publication number
20170213754
Publication date
Jul 27, 2017
Matthew J. Busche
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTROL SYSTEMS EMPLOYING DEFLECTION SENSORS TO CONTROL CLAMPING FO...
Publication number
20170103911
Publication date
Apr 13, 2017
Applied Materials, Inc.
Wendell BOYD
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PIXILATED TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY
Publication number
20150228513
Publication date
Aug 13, 2015
Applied Materials, Inc.
Vijay D. PARKHE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK WITH INTERNAL FLOW ADJUSTMENTS FOR IMPROVED TEM...
Publication number
20150187626
Publication date
Jul 2, 2015
Vijay D. Parkhe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK WITH EXTERNAL FLOW ADJUSTMENTS FOR IMPROVED TEM...
Publication number
20150187625
Publication date
Jul 2, 2015
Matthew J. Busche
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTROL SYSTEMS EMPLOYING DEFLECTION SENSORS TO CONTROL CLAMPING FO...
Publication number
20150138687
Publication date
May 21, 2015
Applied Materials, Inc.
Wendell BOYD
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PIXILATED COOLING, TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY
Publication number
20150129165
Publication date
May 14, 2015
Applied Materials, Inc.
Vijay D. PARKHE
H01 - BASIC ELECTRIC ELEMENTS