Number | Name | Date | Kind |
---|---|---|---|
4480284 | Tojo et al. | Oct 1984 | |
4551192 | Di Milia et al. | Nov 1985 | |
4771730 | Tezuka | Sep 1988 | |
4990464 | Baumgart et al. | Feb 1991 | |
5104834 | Watanabe et al. | Apr 1992 | |
5117121 | Watanabe et al. | May 1992 | |
5151845 | Watanabe et al. | Sep 1992 | |
5191506 | Logan et al. | Mar 1993 | |
5255153 | Nozawa et al. | Oct 1993 | |
5324053 | Kubota et al. | Jun 1994 | |
5463526 | Mundt | Oct 1995 | |
5486974 | Kasahara | Jan 1996 | |
5486975 | Shamouilian et al. | Jan 1996 | |
5539179 | Nozawa et al. | Jul 1996 | |
5583736 | Anderson et al. | Dec 1996 | |
5631803 | Cameron et al. | May 1997 | |
5646814 | Shamouilian et al. | Jul 1997 | |
5745331 | Shamouilian et al. | Apr 1998 | |
5745332 | Burkhart et al. | Apr 1998 | |
5764471 | Burkhart | Jun 1998 | |
5777838 | Tamagawa et al. | Jul 1998 | |
5909355 | Parkhe | Jun 1999 |
Number | Date | Country |
---|---|---|
63-194345 | Aug 1988 | JP |
7-74233 | Mar 1995 | JP |
Entry |
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Hartsough, Larry D., “Electrostatic Wafer Holding”, Solid State Technology, pp. 87-90, Jan. 1993. |
Singer, Peter, “Electrostatic Chucks in Wafer Processing”, Semiconductor International, pp. 57-62, Apr. 1995. |