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Yokohama, JP
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last 30 patents
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Patent Grant
Apparatus for performing plasma process on semiconductor wafers and...
Patent number
5,601,653
Issue date
Feb 11, 1997
Kabushiki Kaisha Toshiba
Masao Ito
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Dry etching method
Patent number
5,411,631
Issue date
May 2, 1995
Tokyo Electron Limited
Masaru Hori
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Dry etching method
Patent number
5,259,923
Issue date
Nov 9, 1993
Tokyo Electron Limited
Masaru Hori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dry etching method
Patent number
5,091,050
Issue date
Feb 25, 1992
Kabushiki Kaisha Toshiba
Makoto Fujino
H01 - BASIC ELECTRIC ELEMENTS