Masao Ito

Person

  • Yokohama, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Apparatus for performing plasma process on semiconductor wafers and...

    • Patent number 5,601,653
    • Issue date Feb 11, 1997
    • Kabushiki Kaisha Toshiba
    • Masao Ito
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Dry etching method

    • Patent number 5,411,631
    • Issue date May 2, 1995
    • Tokyo Electron Limited
    • Masaru Hori
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Dry etching method

    • Patent number 5,259,923
    • Issue date Nov 9, 1993
    • Tokyo Electron Limited
    • Masaru Hori
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Dry etching method

    • Patent number 5,091,050
    • Issue date Feb 25, 1992
    • Kabushiki Kaisha Toshiba
    • Makoto Fujino
    • H01 - BASIC ELECTRIC ELEMENTS