Masaru Umeda

Person

Chuo-ku, Tokyo, 103, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of making semiconductor ferroelectric memory element, and se...
- Patent number 11,335,783
- Issue date May 17, 2022
- National Institute of Advanced Industrial Science and Technology
- Shigeki Sakai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of making semiconductor ferroelectric memory element, and se...
- Patent number 10,686,043
- Issue date Jun 16, 2020
- National Institute of Advanced Industrial Science and Technology
- Shigeki Sakai
- G11 - INFORMATION STORAGE
Information Patent Grant
Vaporizer, center rod used therein, and method for vaporizing mater...
- Patent number 9,885,113
- Issue date Feb 6, 2018
- Kabushiki Kaisha Watanabe Shoko
- Masaru Umeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ferroelectric device and method of its manufacture
- Patent number 9,818,869
- Issue date Nov 14, 2017
- National Institute of Advanced Industrial Science and Technology
- Shigeki Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Evaporation method and film deposition method
- Patent number 9,644,264
- Issue date May 9, 2017
- Kabushiki Kaisha Watanabe Shoko
- Masayuki Toda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for cooling and dispersing a carrier gas, and method for vap...
- Patent number 9,108,120
- Issue date Aug 18, 2015
- Wacom R&D Corporation
- Masayuki Toda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Center rod for use in the carburetor or carburetor for MOCVD
- Patent number 9,020,332
- Issue date Apr 28, 2015
- Wacom R&D Corporation
- Masayuki Toda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Carburetor, carburetor for MOCVD using same, center rod for use in...
- Patent number 8,897,627
- Issue date Nov 25, 2014
- Wacom R&D Corporation
- Masayuki Toda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vaporizing apparatus and film forming apparatus provided with vapor...
- Patent number 8,486,196
- Issue date Jul 16, 2013
- Kabushiki Kaisha Watanabe Shoko
- Masayuki Toda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vaporizer for MOCVD and method of vaporizing raw material solutions...
- Patent number 7,744,698
- Issue date Jun 29, 2010
- Kabushiki Kaisha Watanabe Shoko
- Masayuki Toda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Levitation transportation device and levitation transportation method
- Patent number 7,704,019
- Issue date Apr 27, 2010
- Kabushiki Kaisha Watanabe Shoko
- Masayuki Toda
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Vaporizer and various devices using the same and an associated vapo...
- Patent number 7,673,856
- Issue date Mar 9, 2010
- Kabushiki Kaisha Watanabe Shoko
- Masayuki Toda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Carburetor, various types of devices using the carburetor, and meth...
- Patent number 7,246,796
- Issue date Jul 24, 2007
- Kabushiki Kaisha Watanabe Shoko
- Masayuki Toda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vaporizer for MOCVD and method of vaporizing raw material solutions...
- Patent number 6,931,203
- Issue date Aug 16, 2005
- Kabushiki Kaisha Motoyama Seisakusho
- Masayuki Toda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vaporizer for MOCVD and method of vaporizing raw material solutions...
- Patent number 6,540,840
- Issue date Apr 1, 2003
- Kabushiki Kaisha Watanabe Shoko
- Masayuki Toda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate transfer device and operating method thereof
- Patent number 6,447,217
- Issue date Sep 10, 2002
- Kabushiki Kaisha Watanabe Shoko
- Masayuki Toda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Air stream transfer apparatus
- Patent number 6,398,464
- Issue date Jun 4, 2002
- Kabushiki Kaisha Watanabe Shoko
- Michio Yagai
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Substrate body transfer apparatus
- Patent number 6,394,733
- Issue date May 28, 2002
- Kabushiki Kaisha Watanabe Shoko
- Masayuki Toda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Air stream particulate collecting transfer apparatus
- Patent number 6,315,501
- Issue date Nov 13, 2001
- Kabushiki Kaisha Watanabe Shoko
- Michio Yagai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin film forming equipment
- Patent number 6,074,538
- Issue date Jun 13, 2000
- Ohmi; Tadahiro
- Tadahiro Ohmi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reduced pressure device and method of making
- Patent number 5,989,722
- Issue date Nov 23, 1999
- Tadahiro Ohmi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer carrying device and wafer carrying method
- Patent number 5,921,744
- Issue date Jul 13, 1999
- Kabushiki-Kaisha Watanabe Shoko
- Masayuki Toda
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Semiconductor apparatus
- Patent number 5,854,116
- Issue date Dec 29, 1998
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin film forming equipment
- Patent number 5,683,072
- Issue date Nov 4, 1997
- Ohmi; Tadahiro
- Tadahiro Ohmi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reduced pressure device
- Patent number 5,591,267
- Issue date Jan 7, 1997
- Tadahiro Ohmi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer carrying device and wafer carrying method
- Patent number 5,518,360
- Issue date May 21, 1996
- Kabushiki-Kaisha Watanabe Shoko
- Masayuki Toda
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Method of forming a monocrystalline film having a closed loop step...
- Patent number 5,362,672
- Issue date Nov 8, 1994
- OHMI Tadahiro
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas supply piping device for a process apparatus
- Patent number 5,313,982
- Issue date May 24, 1994
- OHMI Tadahiro
- Tadahiro Ohmi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor drier
- Patent number 5,249,371
- Issue date Oct 5, 1993
- Kabushiki Kaisha Hitachi Seisakusho
- Yoshio Saito
- F26 - DRYING
Information Patent Grant
Piping system for supplying ultra-pure water
- Patent number 5,160,429
- Issue date Nov 3, 1992
- OHMI Tadahiro
- Tadahiro Ohmi
- C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MAKING SEMICONDUCTOR FERROELECTRIC MEMORY ELEMENT, AND SE...
- Publication number 20200279927
- Publication date Sep 3, 2020
- NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Shigeki SAKAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MEMORY ELEMENT, OTHER ELEMENTS, AND THEIR PRODUCTION...
- Publication number 20190273086
- Publication date Sep 5, 2019
- NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Mitsue TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FERROELECTRIC DEVICE AND METHOD FOR MANUFACTURING SAME
- Publication number 20180130909
- Publication date May 10, 2018
- NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Shigeki SAKAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MAKING SEMICONDUCTOR FERROELECTRIC MEMORY ELEMENT, AND SE...
- Publication number 20170309488
- Publication date Oct 26, 2017
- NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Shigeki SAKAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FERROELECTRIC DEVICE AND MEETHOD FOR MANUFACTURING SAME
- Publication number 20160247932
- Publication date Aug 25, 2016
- NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Shigeki SAKAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM-FORMING APPARATUS
- Publication number 20150284845
- Publication date Oct 8, 2015
- KABUSHIKI KAISHA WATANABE SHOKO
- Masayuki Toda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR COOLING AND DISPERSING A CARRIER GAS, AND METHOD FOR VAP...
- Publication number 20150069642
- Publication date Mar 12, 2015
- WACOM R&D CORPORATION
- Masayuki TODA
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
CARBURETOR, CARBURETOR FOR MOCVD USING SAME, CENTER ROD FOR USE IN...
- Publication number 20150053137
- Publication date Feb 26, 2015
- WACOM R&D CORPORATION
- Masayuki TODA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPORIZER, CENTER ROD USED THEREIN, AND METHOD FOR VAPORIZING MATER...
- Publication number 20140050852
- Publication date Feb 20, 2014
- KABUSHIKI KAISHA WATANABE SHOKO
- Masaru Umeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPORIZER
- Publication number 20130291797
- Publication date Nov 7, 2013
- KABUSHIKIKAISHA WATANABE SHOKO
- Masaki Kusuhara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EVAPORATION METHOD AND FILM DEPOSITION METHOD
- Publication number 20130273249
- Publication date Oct 17, 2013
- Masayuki TODA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CARBURETOR, CARBURETOR FOR MOCVD USING SAME, CENTER ROD FOR USE IN...
- Publication number 20120040098
- Publication date Feb 16, 2012
- WACOM R&D CORPORATION
- Masayuki Toda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPORIZING APPARATUS AND FILM FORMING APPARATUS PROVIDED WITH VAPOR...
- Publication number 20100173073
- Publication date Jul 8, 2010
- KABUSHIKI KAISHA WATANABE SHOKO
- Masayuki Toda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LEVITATION TRANSPORTATION DEVICE AND LEVITATION TRANSPORTATION METHOD
- Publication number 20100104380
- Publication date Apr 29, 2010
- Masayuki TODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Vaporizer and various devices using the same and an associated vapo...
- Publication number 20080193645
- Publication date Aug 14, 2008
- Masayuki Toda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Levitation Transportation Device And Levitation Transportation Method
- Publication number 20080031696
- Publication date Feb 7, 2008
- KABUSHIKI KAISHA WATANABE SHOKO
- Masayuki Toda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Surface Treating Apparatus
- Publication number 20070289535
- Publication date Dec 20, 2007
- KABUSHIKI KAISHA WATANABE SHOKO
- Masaru Umeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vaporizer, various apparatuses including the same and method of vap...
- Publication number 20060037539
- Publication date Feb 23, 2006
- Masayuki Toda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Manufacturing method for semiconductor device, and system to which...
- Publication number 20050189620
- Publication date Sep 1, 2005
- Takashi Sugino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor device and method for fabricating the same and semico...
- Publication number 20050124176
- Publication date Jun 9, 2005
- Takashi Sugino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for forming low permittivity film and electron...
- Publication number 20050064724
- Publication date Mar 24, 2005
- Takashi Sugino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for forming film having low dielectric constan...
- Publication number 20040241964
- Publication date Dec 2, 2004
- Takashi Sugino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Deposition method, deposition apparatus, insulating film and semico...
- Publication number 20040157472
- Publication date Aug 12, 2004
- Takashi Sugino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Carburetor, various types of devices using the carburetor, and meth...
- Publication number 20040113289
- Publication date Jun 17, 2004
- Masayuki Toda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Solid state device and its manufacturing method
- Publication number 20040084775
- Publication date May 6, 2004
- Takashi Sugino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrode and device using the same
- Publication number 20040041508
- Publication date Mar 4, 2004
- Takashi Sugino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Vaporizer for MOCVD and method of vaporizing raw material solutions...
- Publication number 20040020437
- Publication date Feb 5, 2004
- Masayuki Toda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vaporizer for MOCVD and method of vaporizing raw material solutions...
- Publication number 20030221625
- Publication date Dec 4, 2003
- Masayuki Toda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Masaru Umeda

Person

Patents Grantslast 30 patents

Method of making semiconductor ferroelectric memory element, and se...

Method of making semiconductor ferroelectric memory element, and se...

Vaporizer, center rod used therein, and method for vaporizing mater...

Ferroelectric device and method of its manufacture

Evaporation method and film deposition method

Method for cooling and dispersing a carrier gas, and method for vap...

Center rod for use in the carburetor or carburetor for MOCVD

Carburetor, carburetor for MOCVD using same, center rod for use in...

Vaporizing apparatus and film forming apparatus provided with vapor...

Vaporizer for MOCVD and method of vaporizing raw material solutions...

Levitation transportation device and levitation transportation method

Vaporizer and various devices using the same and an associated vapo...

Carburetor, various types of devices using the carburetor, and meth...

Vaporizer for MOCVD and method of vaporizing raw material solutions...

Vaporizer for MOCVD and method of vaporizing raw material solutions...

Substrate transfer device and operating method thereof

Air stream transfer apparatus

Substrate body transfer apparatus

Air stream particulate collecting transfer apparatus

Thin film forming equipment

Reduced pressure device and method of making

Wafer carrying device and wafer carrying method

Semiconductor apparatus

Thin film forming equipment

Reduced pressure device

Wafer carrying device and wafer carrying method

Method of forming a monocrystalline film having a closed loop step...

Gas supply piping device for a process apparatus

Vapor drier

Piping system for supplying ultra-pure water

Patents Applicationslast 30 patents

METHOD OF MAKING SEMICONDUCTOR FERROELECTRIC MEMORY ELEMENT, AND SE...

SEMICONDUCTOR MEMORY ELEMENT, OTHER ELEMENTS, AND THEIR PRODUCTION...

FERROELECTRIC DEVICE AND METHOD FOR MANUFACTURING SAME

METHOD OF MAKING SEMICONDUCTOR FERROELECTRIC MEMORY ELEMENT, AND SE...

FERROELECTRIC DEVICE AND MEETHOD FOR MANUFACTURING SAME

FILM-FORMING APPARATUS

METHOD FOR COOLING AND DISPERSING A CARRIER GAS, AND METHOD FOR VAP...

CARBURETOR, CARBURETOR FOR MOCVD USING SAME, CENTER ROD FOR USE IN...

VAPORIZER, CENTER ROD USED THEREIN, AND METHOD FOR VAPORIZING MATER...

VAPORIZER

EVAPORATION METHOD AND FILM DEPOSITION METHOD

CARBURETOR, CARBURETOR FOR MOCVD USING SAME, CENTER ROD FOR USE IN...

VAPORIZING APPARATUS AND FILM FORMING APPARATUS PROVIDED WITH VAPOR...

LEVITATION TRANSPORTATION DEVICE AND LEVITATION TRANSPORTATION METHOD

Vaporizer and various devices using the same and an associated vapo...

Levitation Transportation Device And Levitation Transportation Method

Substrate Surface Treating Apparatus

Vaporizer, various apparatuses including the same and method of vap...

Manufacturing method for semiconductor device, and system to which...

Semiconductor device and method for fabricating the same and semico...

Method and apparatus for forming low permittivity film and electron...

Method and apparatus for forming film having low dielectric constan...

Deposition method, deposition apparatus, insulating film and semico...

Carburetor, various types of devices using the carburetor, and meth...

Solid state device and its manufacturing method

Electrode and device using the same

Vaporizer for MOCVD and method of vaporizing raw material solutions...

Vaporizer for MOCVD and method of vaporizing raw material solutions...