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SHIMADA-SHI, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Wafer cleaning device and tray for use in wafer cleaning device
Patent number
6,616,774
Issue date
Sep 9, 2003
SPC Electronics
Haruki Sonoda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-step flow cleaning method and multi-step flow cleaning apparatus
Patent number
6,432,218
Issue date
Aug 13, 2002
SPC Electronics Corporation
Masatoshi Hirokawa
B08 - CLEANING
Information
Patent Grant
Stream drying process
Patent number
5,709,037
Issue date
Jan 20, 1998
Mitsubishi Denki Kabushiki Kaisha
Hiroshi Tanaka
F26 - DRYING
Information
Patent Grant
Steam drying apparatus, cleaning apparatus incorporating the same,...
Patent number
5,608,974
Issue date
Mar 11, 1997
Mitsubishi Denki Kabushiki Kaisha
Hiroshi Tanaka
F26 - DRYING
Patents Applications
last 30 patents
Information
Patent Application
Wafer cleaning device and tray for use in wafer cleaning device
Publication number
20020066472
Publication date
Jun 6, 2002
Haruki Sonoda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER CLEANING DEVICE AND TRAY FOR USE IN WAFER CLEANING DEVICE
Publication number
20010047817
Publication date
Dec 6, 2001
HARUKI SONODA
H01 - BASIC ELECTRIC ELEMENTS